Invention Grant
- Patent Title: Optical spectrometer with matched étendue
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Application No.: US15119055Application Date: 2015-02-28
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Publication No.: US09909992B2Publication Date: 2018-03-06
- Inventor: Pol Van Dorpe , Peter Peumans
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP14157397 20140228
- International Application: PCT/EP2015/054225 WO 20150228
- International Announcement: WO2015/128503 WO 20150903
- Main IPC: G01J3/30
- IPC: G01J3/30 ; G01N21/65 ; A61B5/00 ; A61B5/145 ; A61B5/1455 ; G01J3/02 ; G01J3/36 ; G01J3/44 ; G01J3/26 ; G01N33/49 ; G01J3/12

Abstract:
The present disclosure relates to systems, methods, and sensors configured to characterize a radiation beam. At least one embodiment relates to an optical system. The optical system includes an optical radiation guiding system. The optical radiation guiding system includes a collimator configured to collimate the radiation beam into a collimated radiation beam. The optical radiation guiding system also includes a beam shaper configured to distribute power of the collimated radiation beam over a discrete number of line shaped fields. A spectrum of the collimated radiation beam entering the beam shaper is delivered to each of the discrete number of line shaped fields. The optical system further includes a spectrometer chip. The spectrometer chip is configured to process the spectrum of the collimated radiation beam in each of the discrete number of line shaped fields coming from the beam shaper.
Public/Granted literature
- US20160356720A1 Optical Spectrometer With Matched Etendue Public/Granted day:2016-12-08
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