公开(公告)号：KR1020130007469A

公开(公告)日：2013-01-18

申请号：KR1020120069186

申请日：2012-06-27

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 나카야미치코 ,  오미네하루키 ,  즈나모토테츠 ,  나가이케히로시

IPC: H01L21/66

Abstract: PURPOSE: A method and an apparatus for detecting an abnormal state are provided to improve the accuracy of determining abnormal discharges by detecting the abnormal discharges from sampling data. CONSTITUTION: A monitor(72) detects the operation while a wafer is separated and a return gate valve is opened. The monitor considers the operation as the movement that the wafer is separated. An obtaining unit(73) obtains a high frequency signal from a RF sensor, and an AE signal from an AE sensor. The obtaining unit detects acoustic emission generated from a process chamber. An interpreter(74) interprets the waveform patterns of the AE signal and high frequency signal. An abnormal state determining unit(75) determines whether or not abnormal discharges occur based on the result of interpreting the waveform patterns. [Reference numerals] (14) DC high voltage; (36) Return gate valve; (60) Directivity combining unit; (61) AE sensor; (62) Noise elimination filter; (71) Plasma processing controller; (72) Monitor; (73) Obtaining unit; (74) Interpreter; (75) Abnormal state determining unit; (76) Memory; (AA) Pin; (BB) Threshold

Abstract translation: 目的：提供一种用于检测异常状态的方法和装置，以通过检测来自采样数据的异常放电来提高确定异常放电的精度。 构成：监视器（72）在晶片分离并且返回闸阀打开时检测操作。 显示器将操作视为晶片分离的运动。 获取单元（73）从RF传感器获得高频信号和从AE传感器获得的AE信号。 获取单元检测从处理室产生的声发射。 解释器（74）解释AE信号和高频信号的波形模式。 异常状态确定单元（75）基于解释波形图案的结果来确定是否发生异常放电。 （附图标记）（14）直流高压; （36）返闸阀; （60）方向性组合单元; （61）AE传感器; （62）消噪滤波器; （71）等离子处理控制器; （72）监控; （73）获取单位; （74）口译员 （75）异常状态判定单元; （76）记忆; （AA）针; （BB）阈值