公开(公告)号：KR1020070114199A

公开(公告)日：2007-11-29

申请号：KR1020077022258

申请日：2006-02-22

Applicant: 사이머 엘엘씨

Inventor： 브라운다니엘제이.더블유. ,  어쇼프알렉산더아이. ,  플로이로브블라디미르비. ,  포멘코프이고르브이. ,  파트로윌리엄엔.

IPC: H01S3/22

CPC classification number: H01S3/225 ,  H01S3/094 ,  H01S3/10015 ,  H01S3/10023 ,  H01S3/109 ,  H01S3/1611 ,  H01S3/1653 ,  H01S3/2255 ,  H01S3/2308 ,  H01S3/2333 ,  H01S3/2366 ,  H01S3/2375 ,  H01S3/2383 ,  H05G2/003 ,  H05G2/005 ,  H05G2/008

Abstract: An apparatus and method is disclosed which may comprise an EUV drive laser system comprising: a solid state seed laser master oscillator laser; a gas discharge excimer laser gain generator producing a drive laser output light beam. The solid state seed laser may comprise a third harmonic Nd: YLF laser, which may be tunable. The gas discharge excimer gain generator laser may comprise a XeF excimer laser power amplifier or power oscillator. The solid state laser may comprise a tunable laser tuned by changing the temperature of a laser crystal comprising the solid state laser, or by utilizing a wavelength selection element, e.g., a Lyot filter or an etalon.

Abstract translation: 公开了一种可以包括EUV驱动激光系统的装置和方法，该系统包括：固态种子激光主振荡器激光器; 产生驱动激光输出光束的气体放电准分子激光增益发生器。 固态种子激光器可以包括可调谐的三次谐波Nd：YLF激光器。 气体放电准分子增益发生器激光器可以包括XeF准分子激光功率放大器或功率振荡器。 固体激光器可以包括通过改变包括固态激光器的激光晶体的温度或通过利用波长选择元件例如Lyot滤光器或标准具来调节的可调谐激光器。