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公开(公告)号：WO02069077B1
公开(公告)日：2003-08-28
申请号：PCT/US0150922
申请日：2001-10-29
Applicant: ADE CORP
Inventor： MALLORY ROY E , JUDELL NEIL
IPC: G01P3/489 , G01D5/245 , G01H3/08 , G01H17/00 , G01M13/04 , G01R23/00 , G05B1/06 , G06F20060101 , G06F1/00 , G06F19/00 , G11B5/596 , G11B19/20
CPC classification number: G01H3/08 , G01M13/045
Abstract: A process for obtaining the periodic component in a data vector of data taken of a sensed property of an element driven by one or more rotary components (16b) over several rotations. The procedure comprises first forming the data vector asynchronously with respect to rotation of said one or more rotary components (16b). A series of marker signals representing the rotation of the one or more rotary components (16b) is also established. From these the periodic component of data in said data vector is determined as a function of the data in the data vector and the marker signals.
Abstract translation: 用于获得数据的数据矢量中的周期性分量的过程，所述周期性分量取自由一个或多个旋转部件（16b）驱动的元件在几次旋转中的感测特性。 该过程包括首先相对于所述一个或多个旋转部件（16b）的旋转异步地形成数据向量。 表示一个或多个旋转部件（16b）的旋转的一系列标记信号也被建立。 从这些数据向量中的数据的周期分量被确定为数据向量中的数据和标记信号的函数。
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公开(公告)号：JP2002236036A
公开(公告)日：2002-08-23
申请号：JP2001218885
申请日：2001-07-19
Applicant: ADE CORP
Inventor： MALLORY ROY E
Abstract: PROBLEM TO BE SOLVED: To provide a method of facilitating the field replacement of sensors which requires not normalization techniques nor components. SOLUTION: The replacement sensor's transmission function of the sensors need only to be measured, and not adjusted, to achieve a simple field- replacement of sensors. The signal processing unit's transfer function needs only be adjusted, and not necessary to be measured. When a need arises for the replacement of sensors, by this method, simple calculations and adjustments, typically expedited by means of a computer program, can be made in the field.
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公开(公告)号：JP2004286742A
公开(公告)日：2004-10-14
申请号：JP2004072083
申请日：2004-03-15
Applicant: Ade Corp , エーディーイー コーポレーション
Inventor： MALLORY ROY E
Abstract: PROBLEM TO BE SOLVED: To provide a non-contact capacitive displacement sensor capable of measuring the position of a non-planar object. SOLUTION: A probe 300 is shaped to have a radius of curvature r P substantially matching the shape of the cylindrical surface of a target 308, to measure a uniform space r P -r T between the sensor at the probe tip and the shaped target 308. Since the space between the sensor and the target 308 is uniform, an accurate measured value r P -r T of the uniform space is determined introducing a well-known equation showing the general relationship between the capacity and space of a parallel plate capacitor. COPYRIGHT: (C)2005,JPO&NCIPI
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公开(公告)号：EP1311865A4
公开(公告)日：2007-05-30
申请号：EP01914690
申请日：2001-03-02
Applicant: ADE CORP
Inventor： MALLORY ROY E , CARTER RICHARD B
Abstract: A capacitive displacement sensor (10) for measuring thin targets (20) is presented. The plate of the measurement probe is designed to take into account the thin target shape and to provide accurate measurements of the thin target by reducing lateral movement sensitivity of the plate. The probe may also include a guard (30) to reduce capacitive coupling of the plate with other structures which would affect the accuracy of the measurement.
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公开(公告)号：JP2000136903A
公开(公告)日：2000-05-16
申请号：JP20194399
申请日：1999-07-15
Applicant: ADE CORP
Inventor： MALLORY ROY E
Abstract: PROBLEM TO BE SOLVED: To realize a nonlinear response which is approximate to an ideal loop gain response and to increase the measuring range of a capacitance-type displacement gage by incorporating a resistor into a part of a nonlinear current mirror for loop gain control. SOLUTION: A resistor 90 is incorporated into a part of a nonlinear current mirror 100 for loop gain control. When the nonlinear current mirror 100 is built in as a part of a capacitance-type displacement gage, the gain of the gage is changed as a function of an input to the gage, and a change in the gain due to the capacitance of a probe is compensated. Consequently, the gap region and the frequency response of the capacitance-type displacement gage are increased. For example, the base 82 of a first transistor 81 is connected to the base 87 of a second transistor 85, and it is set into continuity with the collector 83 of the first transistor 81 so as to act as the input of the current mirror 100. The collector 86 of the second transistor 85 functions as the output of the current mirror 100. The resistor 90 is inserted across the emitter 84 of the first transistor 81 and the ground.
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Patent Agency Ranking
公开(公告)号：JPH1070162A
公开(公告)日：1998-03-10
申请号：JP5684397
申请日：1997-02-25
Applicant: ADE CORP
Inventor： MALLORY ROY E , DOMENICALI PETER , PODUJE NOEL S , BELYAEV ALEXANDER , HARVEY PETER A , SMITH RICHARD S
IPC: H01L21/66 , H01L21/677 , H01L21/68
Abstract: PROBLEM TO BE SOLVED: To provide a high-speed and low-cost system for testing wafers and its automatic calibration system. SOLUTION: In an instrumentation station 118, a wafer 124 is rotated in its vertical plane and a scanning sensor is moved linearly along a parallel axis with the rotational plane of the wafer 124 to obtain thereby spiral and other scanning paths of the wafer 124 over its whole surface. By holding the wafer 124 vertically in this way, the errors caused by the originating deflection from the weight of the wafer itself, especially the large wafer (e.g. 300mm in diameter), are reduced. Further, in the instrumentation station 118, providing a plurality of wafer grippers, they are moved in the plane of the wafer 124 to fasten it to the grippers in predetermined places for its rotation. Also, in the instrumentation station 118, a plurality of master calibration gauges 212 are provided to simplify thereby the calibration of the testing system for wafers, making any wafer for calibration tests unnecessary. Digitizing early the obtained probe instrumentation data of the wafer 124, they are calibrated thereafter in a digital way to decode them again and perform their filterings and other processings.
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公开(公告)号：EP1399792A4
公开(公告)日：2005-01-19
申请号：EP02739999
申请日：2002-06-27
Applicant: ADE CORP
Inventor： MALLORY ROY E
CPC classification number: C04B28/04 , H03F1/347 , Y02W30/92 , Y02W30/94 , Y02W30/95 , C04B18/08 , C04B18/162 , C04B18/141
Abstract: A mechanism to provide a bootstrapped power source for a differential operational amplifier (30'') includes a three-winding transformer (52) having a first winding disposed between a positive voltage (+V) and a plus power (54) input to the amplifier, yielding an initial plus voltage, a second winding disposed between a negative voltage (-V) and a minus power input (56) to the amplifier (30'') yielding an initial minus voltage, and a third winding disposed between a ground and a plus input (58) to the amplifier (30'') providing a feedback path. The differential operational amplifier (30'') output is connected to ground. The amplifier (30'') minus input (16) is connected to a signal (Vs) and when the signal (Vs) is displaced a first amount from a first voltage (Vi), the plus and minus power inputs are displaced approximately the same amount from the initial positive (Vi) and negative voltages (Vo).
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公开(公告)号：EP1330690A4
公开(公告)日：2007-11-07
申请号：EP01273870
申请日：2001-10-29
Applicant: ADE CORP
Inventor： MALLORY ROY E , JUDELL NEIL
IPC: G01P3/489 , G06F1/00 , G01D5/245 , G01H3/08 , G01H17/00 , G01M13/04 , G01R23/00 , G05B1/06 , G06F20060101 , G06F19/00 , G11B5/596 , G11B19/20
CPC classification number: G01H3/08 , G01M13/045
Abstract: A process for obtaining the periodic component in a data vector of data taken of a sensed property of an element driven by one or more rotary components (16b) over several rotations. The procedure comprises first forming the data vector asynchronously with respect to rotation of said one or more rotary components (16b). A series of marker signals representing the rotation of the one or more rotary components (16b) is also established. From these the periodic component of data in said data vector is determined as a function of the data in the data vector and the marker signals.
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公开(公告)号：DE60228250D1
公开(公告)日：2008-09-25
申请号：DE60228250
申请日：2002-06-27
Applicant: ADE CORP
Inventor： MALLORY ROY E
Abstract: A mechanism to provider a bootstrapped power source for a differential operational amplifier includes a three-winding transformer having a first winding disposed between a positive voltage and a plus power input to the amplifier, yielding an initial plus voltage, a second winding disposed between a negative voltage and a minus power input to the amplifier yielding an initial minus voltage, and a third winding disposed between a ground and a plus input to the amplifier providing a feedback path. The differential operational amplifier output is connected to ground. The said amplifier minus input is connect to a signal and when the signal is displaced a first amount from a first voltage, the plus and minus power inputs are displaced approximately the same amount from the initial positive and negative voltages.
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公开(公告)号：SG125944A1
公开(公告)日：2006-10-30
申请号：SG200401530
申请日：2004-03-17
Applicant: ADE CORP
Inventor： MALLORY ROY E
Abstract: An improved non-contact capacitive displacement sensor that may be employed for accurately measuring small distances between the sensor (300) and shaped targets (308). The non-contact capacitive displacement sensor includes a probe having a sensor element and a guard element. The guard element substantially surrounds the sensor element. At least the sensor element {300) has a shape that substantially matches the shape of a target element (308).
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