公开(公告)号：WO2006066207A3

公开(公告)日：2009-04-09

申请号：PCT/US2005045931

申请日：2005-12-17

Applicant: ADE CORP

Inventor： JUDELL NEIL ,  GAO SONGPING ,  TIEMEYER TIMOTHY R

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The processing subsystem has a channel formation capability for forming selected channels and developing channel output associated with each selected channel, with the channel output developed from collector output associated with at least one collection and detection module. Also, a spherical defect channel is described for detection of small spherical objects and defects with like geometries, using scattered light observed by the back collector output and P-polarized scattered light observed by wing collectors.

Abstract translation: 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 处理子系统具有用于形成所选择的信道的信道形成能力和与每个选择的信道相关联的开发信道输出，其中信道输出从与至少一个收集和检测模块相关联的收集器输出开发。 另外，使用通过后集电极输出观察到的散射光和机翼收集器观察到的P偏振散射光，描述了用于检测小球形物体和类似几何形状的缺陷的球形缺陷通道。

公开(公告)号：WO2006066205A3

公开(公告)日：2009-04-09

申请号：PCT/US2005045929

申请日：2005-12-17

Applicant: ADE CORP

Inventor： BILLS RICHARD EARL ,  JUDELL NEIL ,  TIEMEYER TIMOTHY R ,  MCNIVEN JAMES PETER

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 这些部件中的一些，最明显的是光束源子系统，光束扫描子系统和光学收集和检测子系统是模块化的，用于现场更换和/或维护。 光学收集和检测系统在后四分之一的四分之一区域中具有翼收集器和后收集器，用于从工件表面散射的收集光。 这可以大大提高系统的测量能力。 还包括使用翼收集器和后收集器检测不对称缺陷的方法。

公开(公告)号：WO2006066135A9

公开(公告)日：2006-08-03

申请号：PCT/US2005045782

申请日：2005-12-17

Applicant: ADE CORP

Inventor： ANDREWS SCOTT ,  JUDELL NEIL ,  BILLS RICHARD EARL ,  TIEMEYER TIMOTHY R

IPC: G01B9/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The signal processing subsystem comprises a series of data acquisition nodes, each dedicated to a collection detection module and a plurality of data reduction nodes, made available on a peer to peer basis to each data acquisition nodes. Improved methods for detecting signal in the presence of noise are also provided.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件移动子系统，光学收集和检测子系统以及处理子系统。 信号处理子系统包括一系列数据采集节点，每个数据采集节点专用于收集检测模块和多个数据简化节点，可在每个数据采集节点的对等基础上可用。 还提供了用于在存在噪声的情况下检测信号的改进方法。

公开(公告)号：WO2006066135A3

公开(公告)日：2009-04-16

申请号：PCT/US2005045782

申请日：2005-12-17

Applicant: ADE CORP

Inventor： ANDREWS SCOTT ,  JUDELL NEIL ,  BILLS RICHARD EARL ,  TIEMEYER TIMOTHY R

IPC: G01N21/88 ,  G06F17/30 ,  G06K9/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The signal processing subsystem comprises a series of data acquisition nodes, each dedicated to a collection detection module and a plurality of data reduction nodes, made available on a peer to peer basis to each data acquisition nodes. Improved methods for detecting signal in the presence of noise are also provided.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 信号处理子系统包括一系列数据采集节点，每个数据采集节点专用于收集检测模块和多个数据缩减节点，可在每个数据采集节点的基础上可用。 还提供了用于在存在噪声的情况下检测信号的改进方法。

公开(公告)号：JP2005208042A

公开(公告)日：2005-08-04

申请号：JP2004308470

申请日：2004-10-22

Applicant: Ade Corp ,  エーディーイー コーポレーション

Inventor： JUDELL NEIL ,  MURPHREE MICHAEL

IPC: G01B11/02 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66

CPC classification number: G01N21/9501

Abstract: PROBLEM TO BE SOLVED: To provide a system and method of inspecting semiconductor wafers capable of determining the height of a defect on a wafer surface whether or not the scattering power associated with the defect exceeds the dynamic range of the system.
SOLUTION: In the wafer defect inspection system, when the defect on the wafer surface is detected, the three-dimensional shape of the defect is regarded as a Gaussian shape. A plurality of cross-sectional areas of the Gaussian shape are defined, a respective value of each cross-sectional area is determined, and a respective value of the natural logarithm of intermediate heights of the Gaussian shape corresponding to the cross-sectional areas is determined. The cross-sectional area values are plotted as a function of the natural logarithm of the intermediate height values to form a substantially linear plot, a natural logarithm of the height value corresponding to a zero area value based on the substantially linear plot is determined, and the inverse natural logarithm of the value is determined to obtain the height of the Gaussian shape.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种检查能够确定晶片表面上的缺陷的高度的半导体晶片的系统和方法，无论与缺陷相关联的散射功率是否超过系统的动态范围。 解决方案：在晶片缺陷检查系统中，当检测到晶片表面上的缺陷时，缺陷的三维形状被认为是高斯形状。 定义高斯形状的多个横截面面积，确定每个横截面积的相应值，并且确定与横截面积对应的高斯形状的中间高度的自然对数的相应值 。 将横截面积值绘制为中间高度值的自然对数的函数以形成基本上线性的图，确定基于基本上线性的绘图对应于零面积值的高度值的自然对数，以及 确定该值的反自然对数以获得高斯形状的高度。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：WO02069077B1

公开(公告)日：2003-08-28

申请号：PCT/US0150922

申请日：2001-10-29

Applicant: ADE CORP

Inventor： MALLORY ROY E ,  JUDELL NEIL

IPC: G01P3/489 ,  G01D5/245 ,  G01H3/08 ,  G01H17/00 ,  G01M13/04 ,  G01R23/00 ,  G05B1/06 ,  G06F20060101 ,  G06F1/00 ,  G06F19/00 ,  G11B5/596 ,  G11B19/20

CPC classification number: G01H3/08 ,  G01M13/045

Abstract: A process for obtaining the periodic component in a data vector of data taken of a sensed property of an element driven by one or more rotary components (16b) over several rotations. The procedure comprises first forming the data vector asynchronously with respect to rotation of said one or more rotary components (16b). A series of marker signals representing the rotation of the one or more rotary components (16b) is also established. From these the periodic component of data in said data vector is determined as a function of the data in the data vector and the marker signals.

Abstract translation: 用于获得数据的数据矢量中的周期性分量的过程，所述周期性分量取自由一个或多个旋转部件（16b）驱动的元件在几次旋转中的感测特性。 该过程包括首先相对于所述一个或多个旋转部件（16b）的旋转异步地形成数据向量。 表示一个或多个旋转部件（16b）的旋转的一系列标记信号也被建立。 从这些数据向量中的数据的周期分量被确定为数据向量中的数据和标记信号的函数。

公开(公告)号：WO2006066137A3

公开(公告)日：2009-04-16

申请号：PCT/US2005045784

申请日：2005-12-17

Applicant: ADE CORP

Inventor： JUDELL NEIL ,  KOHL IAN THOMAS ,  GOA SONGPING ,  BILLS RICHARD EARL

IPC: G01N21/88 ,  G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的改变而改变输出狭缝的宽度。

公开(公告)号：WO2006066139A2

公开(公告)日：2006-06-22

申请号：PCT/US2005045786

申请日：2005-12-17

Applicant: ADE CORP

Inventor： BILLS RICHARD EARL ,  JUDELL NEIL ,  FREISCHLAD KLAUS REINHARD

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to, greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，大大提高测量能力 的系统。 光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。

公开(公告)号：WO2006066136A2

公开(公告)日：2006-06-22

申请号：PCT/US2005045783

申请日：2005-12-17

Applicant: ADE CORP

Inventor： BILLS RICHARD EARL ,  JUDELL NEIL

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.

Abstract translation: 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统具有设置在后四分之一圆周的入射平面外部的后收集器，用于收集从工件表面散射的光。 背部收集器相对于归因于缺陷散射部分的散射光部分的雾度部分的散射光部分相对最小设置，或者在瑞利散射中相对最小。

公开(公告)号：EP1330690A4

公开(公告)日：2007-11-07

申请号：EP01273870

申请日：2001-10-29

Applicant: ADE CORP

Inventor： MALLORY ROY E ,  JUDELL NEIL

IPC: G01P3/489 ,  G06F1/00 ,  G01D5/245 ,  G01H3/08 ,  G01H17/00 ,  G01M13/04 ,  G01R23/00 ,  G05B1/06 ,  G06F20060101 ,  G06F19/00 ,  G11B5/596 ,  G11B19/20

CPC classification number: G01H3/08 ,  G01M13/045

Abstract: A process for obtaining the periodic component in a data vector of data taken of a sensed property of an element driven by one or more rotary components (16b) over several rotations. The procedure comprises first forming the data vector asynchronously with respect to rotation of said one or more rotary components (16b). A series of marker signals representing the rotation of the one or more rotary components (16b) is also established. From these the periodic component of data in said data vector is determined as a function of the data in the data vector and the marker signals.