公开(公告)号：WO2006066205A3

公开(公告)日：2009-04-09

申请号：PCT/US2005045929

申请日：2005-12-17

Applicant: ADE CORP

Inventor： BILLS RICHARD EARL ,  JUDELL NEIL ,  TIEMEYER TIMOTHY R ,  MCNIVEN JAMES PETER

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 这些部件中的一些，最明显的是光束源子系统，光束扫描子系统和光学收集和检测子系统是模块化的，用于现场更换和/或维护。 光学收集和检测系统在后四分之一的四分之一区域中具有翼收集器和后收集器，用于从工件表面散射的收集光。 这可以大大提高系统的测量能力。 还包括使用翼收集器和后收集器检测不对称缺陷的方法。

公开(公告)号：WO2006066206A2

公开(公告)日：2006-06-22

申请号：PCT/US2005045930

申请日：2005-12-17

Applicant: ADE CORP

Inventor： BILLS RICHARD EARL ,  MCNIVEN JAMES PETER

IPC: H01J40/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features masking positioned in the collection and detection subsystem arranged to selectively prevent a portion of scattered light from passing through. Also included is a scatter absorbing system having a series of scatter absorbing elements for minimizing unrelated to the scatter associated with a desired location on the surface.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件移动子系统，光学收集和检测子系统以及处理子系统。 所述系统具有位于所述收集和检测子系统中的掩蔽，所述掩蔽系统布置成选择性地防止一部分散射光通过。 还包括具有一系列散射吸收元件的散射吸收系统，用于最小化与与表面上的期望位置相关联的散射无关。