-
1.发明申请SYSTEM AND METHOD FOR INSPECTING A WORKPIECE SURFACE USING COMBINATIONS OF LIGHT COLLECTORS 审中-公开使用光收集器组合检查工件表面的系统和方法
公开(公告)号：WO2006066207A3
公开(公告)日：2009-04-09
申请号：PCT/US2005045931
申请日：2005-12-17
Applicant: ADE CORP
Inventor： JUDELL NEIL , GAO SONGPING , TIEMEYER TIMOTHY R
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The processing subsystem has a channel formation capability for forming selected channels and developing channel output associated with each selected channel, with the channel output developed from collector output associated with at least one collection and detection module. Also, a spherical defect channel is described for detection of small spherical objects and defects with like geometries, using scattered light observed by the back collector output and P-polarized scattered light observed by wing collectors.
Abstract translation: 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 处理子系统具有用于形成所选择的信道的信道形成能力和与每个选择的信道相关联的开发信道输出，其中信道输出从与至少一个收集和检测模块相关联的收集器输出开发。 另外，使用通过后集电极输出观察到的散射光和机翼收集器观察到的P偏振散射光，描述了用于检测小球形物体和类似几何形状的缺陷的球形缺陷通道。
-
2.发明申请
公开(公告)号：WO2006066135A3
公开(公告)日：2009-04-16
申请号：PCT/US2005045782
申请日：2005-12-17
Applicant: ADE CORP
Inventor： ANDREWS SCOTT , JUDELL NEIL , BILLS RICHARD EARL , TIEMEYER TIMOTHY R
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The signal processing subsystem comprises a series of data acquisition nodes, each dedicated to a collection detection module and a plurality of data reduction nodes, made available on a peer to peer basis to each data acquisition nodes. Improved methods for detecting signal in the presence of noise are also provided.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 信号处理子系统包括一系列数据采集节点，每个数据采集节点专用于收集检测模块和多个数据缩减节点，可在每个数据采集节点的基础上可用。 还提供了用于在存在噪声的情况下检测信号的改进方法。
-
Patent Agency Ranking3.发明申请METHOD AND SYSTEM FOR CLASSIFIYING DEFECTS OCCURRING AT A SURFACE OF A SUBSTRATE USING GRAPHICAL REPRESENTATION OF MULTI-CHANNEL DATA 审中-公开使用多通道数据的图形表示对基板表面进行分类缺陷的方法和系统
公开(公告)号：WO2004111618A3
公开(公告)日：2005-05-06
申请号：PCT/US2004018323
申请日：2004-06-09
Applicant: ADE CORP , TIEMEYER TIMOTHY R , AKUTSU JAMES S , SALTER ROBERT J , ZENG YU
Inventor： TIEMEYER TIMOTHY R , AKUTSU JAMES S , SALTER ROBERT J , ZENG YU
CPC classification number: G06T7/0004 , G01N21/9501 , G06K9/62 , G06K9/6253 , G06T7/0002 , G06T11/206 , G06T2207/30148
Abstract: A population of data points each having three or more parameters associated therewith, such as multi-channel defect data from an optical scanner, are plotted in three dimensions, and grouping of data points are identified. Boundary surfaces are defined in the three-dimensional space for delineating groupings of data points. The different groupings correspond to different data classifications or types. Classification algorithms based on the boundary surfaces are defined. When applied to defect classification, the algorithms can be exported to an optical scanner for runtime classification of defects. An algorithm for identifying a particular grouping of data points can be defined as a Boolean combination of grouping rules from two or more different n-dimensional representations, where n can be either 2 or 3 for each representation.
Abstract translation: 每个具有与其相关联的三个或多个参数的数据点的数据点（诸如来自光学扫描仪的多通道缺陷数据）被绘制在三维中，并且识别数据点的分组。 边界面在三维空间中定义，用于描绘数据点的分组。 不同的分组对应于不同的数据分类或类型。 定义基于边界面的分类算法。 当应用于缺陷分类时，算法可以导出到光学扫描仪中以进行缺陷的运行时分类。 用于识别数据点的特定分组的算法可以被定义为来自两个或更多个不同n维表示的分组规则的布尔组合，其中对于每个表示，n可以是2或3。
-
4.发明申请SYSTEM AND METHOD FOR INSPECTION OF A WORKPIECE SURFACE USING MULTIPLE SCATTERED LIGHT COLLECTORS 审中-公开使用多个散焦光收集器检查工件表面的系统和方法
公开(公告)号：WO2006066205A3
公开(公告)日：2009-04-09
申请号：PCT/US2005045929
申请日：2005-12-17
Applicant: ADE CORP
Inventor： BILLS RICHARD EARL , JUDELL NEIL , TIEMEYER TIMOTHY R , MCNIVEN JAMES PETER
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 这些部件中的一些，最明显的是光束源子系统，光束扫描子系统和光学收集和检测子系统是模块化的，用于现场更换和/或维护。 光学收集和检测系统在后四分之一的四分之一区域中具有翼收集器和后收集器，用于从工件表面散射的收集光。 这可以大大提高系统的测量能力。 还包括使用翼收集器和后收集器检测不对称缺陷的方法。
-
5.发明申请SYSTEM AND METHOD FOR INSPECTING A WORKPIECE SURFACE USING SURFACE STRUCTURE SPATIAL FREQUENCIES 审中-公开使用表面结构空间频率检测工件表面的系统和方法
公开(公告)号：WO2006066255A3
公开(公告)日：2007-07-12
申请号：PCT/US2005046181
申请日：2005-12-17
Applicant: ADE CORP
Inventor： TIEMEYER TIMOTHY R , AKATSU JAMES
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A method for inspecting a surface of a workpiece comprises scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light and scattered light comprising light that is scattered from the surface upon impingement thereon by the incident beam; and determining an extent of a contribution to surface roughness from a component of the surface, with the component having a surface roughness spatial frequency range.
Abstract translation: 用于检查工件表面的方法包括扫描工件表面上的入射光束以撞击其上以产生反射光和散射光，其包括由入射光束在其上撞击时从表面散射的光; 并且确定从表面的部件对表面粗糙度的贡献的程度，其中该部件具有表面粗糙度空间频率范围。
-
6.发明申请
公开(公告)号：WO2006066135A9
公开(公告)日：2006-08-03
申请号：PCT/US2005045782
申请日：2005-12-17
Applicant: ADE CORP
Inventor： ANDREWS SCOTT , JUDELL NEIL , BILLS RICHARD EARL , TIEMEYER TIMOTHY R
IPC: G01B9/00
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The signal processing subsystem comprises a series of data acquisition nodes, each dedicated to a collection detection module and a plurality of data reduction nodes, made available on a peer to peer basis to each data acquisition nodes. Improved methods for detecting signal in the presence of noise are also provided.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件移动子系统，光学收集和检测子系统以及处理子系统。 信号处理子系统包括一系列数据采集节点，每个数据采集节点专用于收集检测模块和多个数据简化节点，可在每个数据采集节点的对等基础上可用。 还提供了用于在存在噪声的情况下检测信号的改进方法。
-
公开(公告)号：DE112004001024T5
公开(公告)日：2006-06-01
申请号：DE112004001024
申请日：2004-06-09
Applicant: ADE CORP
Inventor： TIEMEYER TIMOTHY R , AKUTSU JAMES S , SALTER ROBERT J , ZENG YU
Abstract: A population of data points each having three or more parameters associated therewith, such as multi-channel defect data from an optical scanner, are plotted in three dimensions, and groupings of data points are identified. Boundary surfaces are defined in the three-dimensional space for delineating groupings of data points. The different groupings correspond to different data classifications or types. Classification algorithms based on the boundary surfaces are defined. When applied to defect classification, the algorithms can be exported to an optical scanner for runtime classification of defects. An algorithm for identifying a particular grouping of data points can be defined as a Boolean combination of grouping rules from two or more different n-dimensional representations, where n can be either 2 or 3 for each representation.
-
-
-
-
-
-
Search Results
7
records
(took 0.024 seconds)
