Abstract:
A process for producing a synthetic silica glass optical component which contains at least 1null1017 molecules/cm3 and has an OH concentration of at most 200 ppm and substantially no reduction type defects, by treating a synthetic silica glass having a hydrogen molecule content of less than 1null1017 molecules/cm3 at a temperature of from 300 to 600null C. in a hydrogen gas-containing atmosphere at a pressure of from 2 to 30 atms.
Abstract translation:通过处理氢分子含量小于1×10 17的合成石英玻璃,制造合成石英玻璃光学组件的方法,该方法含有至少1×10 17分子/ cm 3且具有至多200ppm的OH浓度且基本上没有还原型缺陷 分子/ cm3,温度为300-600℃,在氢气气氛中,压力为2-30atm。
Abstract:
A synthetic quartz glass for optical use, to be used by irradiation with light within a range of from the ultraviolet region to the vacuum ultraviolet region, which contains fluorine, which has a ratio of the scattering peak intensity of 2250 cmnull1 (I2250) to the scattering peak intensity of 800 cmnull1 (I800), i.e. I2250/I800, of at most 1null10null4 in the laser Raman spectrum, and which has an absorption coefficient of light of 245 nm of at most 2null10null3 cmnull1.
Abstract translation:一种用于光学用的合成石英玻璃,其用于通过在含有氟的紫外线区域至真空紫外线区域的范围内的光照射而使用,该散射峰强度比例为2250cm <上标> -1 >(I <下标> 2250 highlight>)到800 cm <上标> -1>(I <下标> 800 highlight>)的散射峰强度,即I <下标> 2250 highlight> / I 在激光拉曼光谱中,最多为1×10 <上标> -4>的<下标> 800 highlight>,其吸光系数为245nm,最多为2×10 <上标> -3> cm -1>。