公开(公告)号：KR20180030162A

公开(公告)日：2018-03-21

申请号：KR20187004492

申请日：2016-06-30

Applicant: ASML NETHERLANDS BV

Inventor： DIRKS REMCO ,  VAN KRAAIJ MARKUS GERARDUS MARTINUS MARIA ,  PISARENCO MAXIM

IPC: G03F7/20 ,  G06F17/50 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/66

CPC classification number: G06F17/5009 ,  G03F7/70058 ,  G03F7/705 ,  G03F7/70625 ,  H01L21/3065 ,  H01L21/308 ,  H01L22/20

Abstract: 구조체(900)의파라미터가관찰된회절방사선으로부터의복원에의해측정된다. 이방법은: (a) 2차원또는 3차원모델공간에서구조체를표현하는구조체모델을규정하는단계; (b) 구조체모델을사용하여방사선과상기구조체의상호작용을시뮬레이션하는단계; 및 (c) 구조체모델의파라미터를변경하면서단계 (b)를반복하는단계를포함한다. 구조체모델은모델공간의적어도제 1 차원(Z)에따라슬라이스들(a-f)의시리즈로분할된다. 슬라이스들로분할됨으로써, 적어도하나의서브-구조체의경사면(904, 906)은상기모델공간(X)의적어도제 1 차원을따라스텝들(904', 906')의시리즈에의해근사화된다. 슬라이스들의개수는파라미터가변함에따라동적으로변동할수 있다. 상기경사면을근사화하는스텝들의개수는일정하게유지된다. 대응하는스텝을도입하지않고, 추가절개부(1302, 1304)가도입된다.

Abstract translation: 通过从观察到的衍射辐射中恢复来测量结构900的参数。 该方法包括：（a）定义表示二维或三维模型空间中的结构的结构模型; （b）使用结构模型模拟结构与辐射的相互作用; （c）在改变结构模型的参数的同时重复步骤（b）。 根据模型空间的至少第一维度（Z），结构模型被划分为一系列切片（a-f）。 切片，使得至少一个子结构的斜面904和906也沿着向上模型空间X的第一维度通过一系列步骤904'和906'近似。 切片的数量可能会随着参数的变化而动态变化。 近似斜率的步数保持不变。 插入额外的切口1302和1304而不引入相应的步骤。

公开(公告)号：NL2005733A

公开(公告)日：2011-06-09

申请号：NL2005733

申请日：2010-11-22

Applicant: ASML NETHERLANDS BV

Inventor： SETIJA IRWAN ,  KRAAIJ MARKUS ,  DIRKS REMCO ,  BEURDEN MARTIJN CONSTANT

IPC: G01N21/47 ,  G03F7/20

Abstract: Numerical calculation of electromagnetic scattering properties and structural parameters of periodic structures is disclosed. A reflection coefficient has a representation as a bilinear or sesquilinear form. Computations of reflection coefficients and their derivatives for a single outgoing direction can benefit from an adjoint-state variable. Because the linear operator is identical for all angles of incidence that contribute to the same outgoing wave direction, there exists a single adjoint-state variable that generates all reflection coefficients from all incident waves that contribute to the outgoing wave. This adjoint-state variable can be obtained by numerically solving a single linear system, whereas one otherwise would need to solve a number of linear systems equal to the number of angles of incidence.

公开(公告)号：NL2005521A

公开(公告)日：2011-04-26

申请号：NL2005521

申请日：2010-10-14

Applicant: ASML NETHERLANDS BV

Inventor： BEURDEN MARTIJN ,  SETIJA IRWAN ,  DIRKS REMCO

IPC: G01N21/47 ,  G03F7/20

Abstract: A projection operator framework is described to analyze the concept of localized normal-vector fields within field-material interactions in a spectral basis, in isotropic and anisotropic media. Generate a localized normal-vector field n in a region of the structure defined by the material boundary, decomposed into sub-regions with a predefined normal-vector field and possibly corresponding closed-form integrals. Construct a continuous vector field F using the normal-vector field to select continuous components ET and Dn. Localized integration of normal-vector field n over the sub-regions to determine coefficients of, C. Determine components Ex, Ey, Ez of the electromagnetic field by using field-material interaction operator C to operate on vector field F. Calculate electromagnetic scattering properties of the structure using the determined components of the electromagnetic field.