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    Multi-cell detector for charged particles
    2.
    发明授权
    Multi-cell detector for charged particles 有权

    公开(公告)号：US11784024B2

    公开(公告)日：2023-10-10

    申请号：US17572557

    申请日：2022-01-10

    Applicant: ASML Netherlands B.V.

    Inventor： Joe Wang ,  Yongxin Wang ,  Zhongwei Chen ,  Xuerang Hu

    IPC: H01J37/244 ,  H01J37/28

    CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/04756 ,  H01J2237/2441

    Abstract: A multi-cell detector may include a first layer having a region of a first conductivity type and a second layer including a plurality of regions of a second conductivity type. The second layer may also include one or more regions of the first conductivity type. The plurality of regions of the second conductivity type may be partitioned from one another, preferably by the one or more regions of the first conductivity type of the second layer. The plurality of regions of the second conductivity type may be spaced apart from one or more regions of the first conductivity type in the second layer. The detector may further include an intrinsic layer between the first and second layers.

    Semiconductor charged particle detector for microscopy
    3.
    发明授权
    Semiconductor charged particle detector for microscopy 有权

    公开(公告)号：US11508547B2

    公开(公告)日：2022-11-22

    申请号：US16435145

    申请日：2019-06-07

    Applicant: ASML Netherlands B.V.

    Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai ,  Kenichi Kanai

    IPC: H01J37/244 ,  G01T1/24 ,  H01J37/28 ,  H01J37/285 ,  H01L31/08

    Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.

    Method and apparatus for charged particle detection
    4.
    发明授权
    Method and apparatus for charged particle detection 有权

    公开(公告)号：US11295930B2

    公开(公告)日：2022-04-05

    申请号：US16484106

    申请日：2018-02-01

    Applicant: ASML Netherlands B.V.

    Inventor： Yongxin Wang ,  Weiming Ren ,  Zhonghua Dong ,  Zhongwei Chen

    IPC: H01J37/244 ,  H01J37/28 ,  G01N23/2251

    Abstract: Systems and methods are provided for charged particle detection. The detection system can comprise a signal processing circuit configured to generate a set of intensity gradients based on electron intensity data received from a plurality of electron sensing elements. The detection system can further comprise a beam spot processing module configured to determine, based on the set of intensity gradients, at least one boundary of a beam spot; and determine, based on the at least one boundary, that a first set of electron sensing elements of the plurality of electron sensing elements is within the beam spot. The beam spot processing module can further be configured to determine an intensity value of the beam spot based on the electron intensity data received from the first set of electron sensing elements and also generate an image of a wafer based on the intensity value.

    Pixel shape and section shape selection for large active area high speed detector
    7.
    发明授权
    Pixel shape and section shape selection for large active area high speed detector 有权

    公开(公告)号：US11594395B2

    公开(公告)日：2023-02-28

    申请号：US17049329

    申请日：2019-03-21

    Applicant: ASML Netherlands B.V.

    Inventor： Yongxin Wang ,  Zhonghua Dong

    IPC: H01J37/244 ,  H01L27/146

    Abstract: Detectors and detection systems are disclosed. According to certain embodiments, a detector comprises a substrate comprising a plurality of sensing elements including a first sensing element and a second sensing element, wherein at least the first sensing element is formed in a triangular shape. The detector may include a switching region configured to connect the first sensing 5 element and the second sensing element. There may also be provided a plurality of sections including a first section connecting a first plurality of sensing elements to a first output and a second section connecting a second plurality of sensing elements to a second output. The section may be provided in a hexagonal shape.

    Charged particle detector with gain element
    8.
    发明授权
    Charged particle detector with gain element 有权

    公开(公告)号：US12230470B2

    公开(公告)日：2025-02-18

    申请号：US16800946

    申请日：2020-02-25

    Applicant: ASML Netherlands B.V.

    Inventor： Yongxin Wang ,  Rui-Ling Lai

    IPC: H01J37/244 ,  H01L27/144 ,  H01L27/146 ,  H01L31/115 ,  H01L31/18

    Abstract: A detector may be provided with a sensing element or an array of sensing elements, each of the sensing elements may have a corresponding gain element. A substrate may be provided having a sensing element and a gain element integrated together. The gain element may include a section in which, along a direction perpendicular to an incidence direction of an electron beam, a region of first conductivity is provided adjacent to a region of second conductivity, and a region of third conductivity may be provided adjacent to the region of second conductivity. The sensing element may include a section in which, along the incidence direction, a region of fourth conductivity is provided adjacent to an intrinsic region of the substrate, and the region of second conductivity may be provided adjacent to the intrinsic region.

    Semiconductor charged particle detector for microscopy
    9.
    发明授权
    Semiconductor charged particle detector for microscopy 有权

    公开(公告)号：US12205792B2

    公开(公告)日：2025-01-21

    申请号：US17970469

    申请日：2022-10-20

    Applicant: ASML NETHERLANDS B.V.

    Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai ,  Kenichi Kanai

    IPC: H01J37/244 ,  G01T1/24 ,  H01J37/28 ,  H01J37/285 ,  H01L31/08

    Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.

    Switch matrix design for beam image system
    10.
    发明授权
    Switch matrix design for beam image system 有权

    公开(公告)号：US11476085B2

    公开(公告)日：2022-10-18

    申请号：US16648385

    申请日：2018-09-14

    Applicant: ASML Netherlands B.V.

    Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai

    IPC: G01J1/00 ,  H01J37/244 ,  H01L27/146

    Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.

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