公开(公告)号：JPH11271774A

公开(公告)日：1999-10-08

申请号：JP3833699

申请日：1999-02-17

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレイション

Inventor： ALESSANDRO CESARE CAREGARI ,  PRAVEEN CHAUDARI ,  DOYLE JAMES P ,  JAMES ANDREW LACEY ,  SHUI CHIN ALAN LIEN ,  PURUSHOTHAMAN SAMPATH ,  MAHESHU GOVIND SAMANT ,  JAMES L SPADEL ,  JOACHIM SUTOA

IPC: G02F1/1337

CPC classification number: G02F1/13378

Abstract: PROBLEM TO BE SOLVED: To form the alignment layer which has its characteristics improved without any mechanical contact with a striking directional particle beam to impinge on a film surface and arranging at least one liquid crystal on the struck surface.
SOLUTION: High-cost excessive layers and machining steps, and mechanical contact with the surface of the alignment layer are avoided by depositing the alignment layer directly on the surface with directivity. A substrate 10 is exposed to an ion beam 12 at a certain angle 14 of incidence. When the surface 16 is deposited with an ion beam 12, a material is deposited directly or indirectly on the surface 16 or is injected into the surface to form the alignment layer used to align light crystal. The layer can be made homogeneous by bonds preferentially aligned on the substrate surface 16 and the liquid crystal can be controlled more precisely. The thickness and electron characteristics of the alignment layer can be adapted such that optical performance can be obtained. Further, this alignment is manufactured economically in terms of time and cost.
COPYRIGHT: (C)1999,JPO

Abstract translation: 要解决的问题：为了形成具有改进的特性的取向层，而不会与击打的方向性粒子束机械接触以撞击在膜表面上并且在击打表面上布置至少一个液晶。 解决方案：通过以方向性将对准层直接沉积在表面上，避免了高成本的过量层和加工步骤以及与取向层的表面的机械接触。 衬底10以一定的入射角度14暴露于离子束12。 当表面16沉积有离子束12时，材料直接或间接沉积在表面16上或被注入到表面中以形成用于对准光晶体的取向层。 可以通过优先对准在基板表面16上的键而使该层均匀，并且可以更精确地控制液晶。 可以适应取向层的厚度和电子特性，使得可以获得光学性能。 此外，这种对准在时间和成本方面经济地制造。

公开(公告)号：JP2002062532A

公开(公告)日：2002-02-28

申请号：JP2001192436

申请日：2001-06-26

Applicant: IBM

Inventor： CALLEGARI ALESSANDRO ,  PURAVIIN CHOODARI ,  JAMES PATRICK DOYLE ,  GALLIGAN EILEEN ANN ,  KATO YOSHIMINE ,  JAMES ANDREW LACEY ,  SHUI CHIN ALAN RYAN ,  MINHA RUU ,  NAKANO HIROTAKE

IPC: G02F1/1333 ,  C23C14/06 ,  C23C14/22 ,  C23C14/34 ,  G02F1/1337

Abstract: PROBLEM TO BE SOLVED: To provide a method for forming an alignment layer on a substrate. SOLUTION: The film is adhered and aligned in a single step with a method containing a step to shoot an ion-beam at the substrate with a specified incident angle and simultaneously to adhere the film to the substrate (a) and to align an atomic structure of the film in at least a specified aligning direction (b).

公开(公告)号：JPH11271773A

公开(公告)日：1999-10-08

申请号：JP3831799

申请日：1999-02-17

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレイション

Inventor： ALESSANDRO CESARE CAREGARI ,  PRAVEEN CHAUDARI ,  DOYLE JAMES P ,  JAMES ANDREW LACEY ,  SHUI CHIN ALAN LIEN ,  PURUSHOTHAMAN SAMPATH ,  MAHESHU GOVIND SAMANT ,  JAMES L SPADEL ,  JOACHIM SUTOA

IPC: G02F1/1337

CPC classification number: G02F1/13378 ,  G02F1/133734 ,  G02F2001/133765

Abstract: PROBLEM TO BE SOLVED: To obtain a low-cost, reliable light crystal display which is manufactured in a small number of steps by depositing an amorphous alignment layer on a transparent substrate by using a dry machining method. SOLUTION: The amorphous alignment layer is deposited on the transparent substrate by using the dry machining method such as plasma-reinforced chemical vapor-phase deposition. Then the atomic structure of the dry-machined alignment layer is aligned to at least one desired direction by using a particle beam device 48. A plasma generation unit 52 operates to generate ions and a group of three electrodes 54, 56, and 58 takes ions out to irradiate the substrate 20. The substrate 20 is fixed to a plate fixation platform 62 so that an angle θ as an angle of incidence of accelerated particles to a line perpendicular to the substrate 20 is maintained. The angle θ is preferably in a range of about 20 to 80 deg.. The alignment layer may be formed by a nonaqueous gas environmental deposition method such as vapor deposition, sputter deposition, and ion beam deposition.

Abstract translation: 要解决的问题：为了获得通过使用干式加工方法在透明基板上沉积非晶取向层而以少量步骤制造的低成本，可靠的光晶体显示器。 解决方案：通过使用等离子体增强化学气相沉积等干式加工方法将非晶取向层沉积在透明基板上。 然后通过使用粒子束装置48将干法加工的取向层的原子结构与至少一个所需的方向对准。等离子体产生单元52操作以产生离子，并且一组三个电极54,56和58取离子 从而照射基板20.基板20被固定到板固定平台62上，从而保持作为加速颗粒到垂直于基板20的线的入射角的角度θ。 角度θ优选在约20〜80度的范围内。取向层可以通过非水气体环境沉积方法形成，例如气相沉积，溅射沉积和离子束沉积。