公开(公告)号：JP2003328123A

公开(公告)日：2003-11-19

申请号：JP2002138571

申请日：2002-05-14

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーション

Inventor： KATO YOSHIMINE

IPC: C23C14/35

Abstract: PROBLEM TO BE SOLVED: To provide a sputtering system by which film deposition efficiency can be improved by reducing the possibility of the occurrence of abnormal electric discharge and also to provide a sputtering method using the sputtering system. SOLUTION: The sputtering system comprises a vessel 10 capable of evacuation, a target 22 held in the vessel 10, a substrate 14 onto which a target material is deposited, and magnets 20a to 20f for applying a magnetic field to the discharge plasma generated in the vessel 10. The magnets 20a to 20f apply the magnetic field containing a horizontal component and a vertical component to the surface of the target, and the ends 22a and 22b of the target are disposed in the positions where the horizontal component of the magnetic field changes across 0 or in the positions to the target 22 center side of the above positions where the horizontal component of the magnetic field changes across 0. COPYRIGHT: (C)2004,JPO

Abstract translation: 要解决的问题：提供一种可以通过降低发生异常放电的可能性来提高成膜效率的溅射系统，并且还提供使用溅射系统的溅射方法。 解决方案：溅射系统包括能够排空的容器10，保持在容器10中的靶22，沉积有靶材料的衬底14和用于向放电等离子体施加磁场的磁体20a至20f 磁体20a至20f将包含水平分量和垂直分量的磁场施加到目标的表面，目标的端部22a和22b设置在目标的水平分量的位置 磁场在磁场的水平分量变化的上述位置的0或位于目标22的中心侧的位置变化。（C）2004，JPO

公开(公告)号：JP2002062532A

公开(公告)日：2002-02-28

申请号：JP2001192436

申请日：2001-06-26

Applicant: IBM

Inventor： CALLEGARI ALESSANDRO ,  PURAVIIN CHOODARI ,  JAMES PATRICK DOYLE ,  GALLIGAN EILEEN ANN ,  KATO YOSHIMINE ,  JAMES ANDREW LACEY ,  SHUI CHIN ALAN RYAN ,  MINHA RUU ,  NAKANO HIROTAKE

IPC: G02F1/1333 ,  C23C14/06 ,  C23C14/22 ,  C23C14/34 ,  G02F1/1337

Abstract: PROBLEM TO BE SOLVED: To provide a method for forming an alignment layer on a substrate. SOLUTION: The film is adhered and aligned in a single step with a method containing a step to shoot an ion-beam at the substrate with a specified incident angle and simultaneously to adhere the film to the substrate (a) and to align an atomic structure of the film in at least a specified aligning direction (b).

公开(公告)号：JP2002055348A

公开(公告)日：2002-02-20

申请号：JP2000228748

申请日：2000-07-28

Applicant: IBM

Inventor： KATO YOSHIMINE ,  KAMIYA HIROYUKI

IPC: C23C14/06 ,  C23C14/35 ,  G02F1/1337

Abstract: PROBLEM TO BE SOLVED: To provide a liquid crystal device using a carbon film which can align a liquid crystal at a time of film formation, and to provide a device to manufacture the liquid crystal device, a method for manufacturing the liquid crystal device and a method for forming an alignment film. SOLUTION: The liquid crystal device contains substrates 1a, 1b facing each other and having electrodes, an optical cell formed between the electrodes facing each other, a liquid crystal material 2 filling the optical cell, and carbon films 5a, 5b deposited on the faces of the substrates 1a, 1b in contact with the liquid crystal material 2 to align the liquid crystal material 2.

公开(公告)号：JP2003107243A

公开(公告)日：2003-04-09

申请号：JP2001283259

申请日：2001-09-18

Applicant: IBM

Inventor： KATO YOSHIMINE

IPC: G02B5/30 ,  C23C14/06 ,  G02B1/08 ,  G02F1/1337

Abstract: PROBLEM TO BE SOLVED: To provide a light transmission film, a method of manufacturing this light transmission film, an alignment layer formed of this light transmission film, a liquid crystal liquid crystal panel including this alignment layer and a display device. SOLUTION: The light transmission film containing an amorphous carbon fluoride is provided. Further, the integrated transmittance in a visible region at a film of 100 nm is preferably specified to approximately >=50%. The above light transmission film is composed to include the amorphous carbon fluoride and the atomic ratio of a hydrogen atom and a fluorine atom can be made to >=1/9. The permeability in the visible region can be controlled by controlling the atom ratio of the fluorine atom. The alignment layer for a liquid crystal material constituted to include this light transmission film, the liquid crystal panel using this alignment layer and the display device are also provided.

公开(公告)号：HK24096A

公开(公告)日：1996-02-16

申请号：HK24096

申请日：1996-02-08

Applicant: IBM

Inventor： KATO YOSHIMINE ,  SHIMIZU TERUHISA ,  TAKAYAMA SHINJI ,  TANAKA HIROSHI

IPC: G11B11/10 ,  G11B11/105 ,  G11B7/24

Abstract: A magneto-optical recording medium is provided which has high magneto-optic effect even under a short-wavelength light, high anisotropy in the direction perpendicular to the film surface, and permits high-density recording, the medium having a first magnetic layer laminated onto a second magnetic layer, the first magnetic layer being a rare-earth-transition-metal amorphous film with mainly a light rare-earth element as rare-earth element, the light rare-earth element being at least one element selected from an element group consisting of Nd and Pr, and the second magnetic layer being a rare-earth-transition-metal amorphous film with at least one element selected from an element group consisting of Tb and Dy as rare-earth element.

公开(公告)号：DE69020992D1

公开(公告)日：1995-08-24

申请号：DE69020992

申请日：1990-09-17

Applicant: IBM

Inventor： KATO YOSHIMINE ,  SHIMIZU TERUHISA ,  TAKAYAMA SHINJI ,  TANAKA HIROSHI

IPC: G11B11/10 ,  G11B11/105 ,  G11B7/24

Abstract: A magneto-optical recording medium is provided which has high magneto-optic effect even under a short-wavelength light, high anisotropy in the direction perpendicular to the film surface, and permits high-density recording, the medium having a first magnetic layer laminated onto a second magnetic layer, the first magnetic layer being a rare-earth-transition-metal amorphous film with mainly a light rare-earth element as rare-earth element, the light rare-earth element being at least one element selected from an element group consisting of Nd and Pr, and the second magnetic layer being a rare-earth-transition-metal amorphous film with at least one element selected from an element group consisting of Tb and Dy as rare-earth element.

公开(公告)号：DE69020992T2

公开(公告)日：1996-04-04

申请号：DE69020992

申请日：1990-09-17

Applicant: IBM

Inventor： KATO YOSHIMINE ,  SHIMIZU TERUHISA ,  TAKAYAMA SHINJI ,  TANAKA HIROSHI

IPC: G11B11/10 ,  G11B11/105 ,  G11B7/24

Abstract: A magneto-optical recording medium is provided which has high magneto-optic effect even under a short-wavelength light, high anisotropy in the direction perpendicular to the film surface, and permits high-density recording, the medium having a first magnetic layer laminated onto a second magnetic layer, the first magnetic layer being a rare-earth-transition-metal amorphous film with mainly a light rare-earth element as rare-earth element, the light rare-earth element being at least one element selected from an element group consisting of Nd and Pr, and the second magnetic layer being a rare-earth-transition-metal amorphous film with at least one element selected from an element group consisting of Tb and Dy as rare-earth element.

公开(公告)号：CA2017300C

公开(公告)日：1994-05-17

申请号：CA2017300

申请日：1990-05-22

Applicant: IBM

Inventor： KATO YOSHIMINE ,  SHIMIZU TERUHISA ,  TAKAYAMA SHINJI ,  TANAKA HIROSHI

IPC: G11B11/10 ,  G11B11/105 ,  G11C13/06

Abstract: A magneto-optical recording medium has a first magnetic layer laminated on a second magnetic layer, the first magnetic layer, of (Nd, Pr)-transition-metal amorphous alloy systems, having high magneto-optical effect at short wavelengths but low perpendicular anisotropy, and the second magnetic layer, of (Tb, Dy)-transition-metal amorphous alloy systems, having low magneto-optical effect at short wavelengths but low perpendicular anisotropy. By exerting magnetic exchange coupling between these two layers on the said first layer to induce strong perpendicular anisotropy in it, a perpendicular magnetized magneto-optical recording medium is obtained that has overall high magneto-optical effect, even at short wavelengths.