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公开(公告)号:FR2295466A1
公开(公告)日:1976-07-16
申请号:FR7533276
申请日:1975-10-22
Applicant: IBM
Inventor: GIPSTEIN EDWARD , MOREAU WAYNE M , NEED OMAR U III
IPC: G03F7/16 , G03C1/74 , G03F7/038 , G03F7/039 , H01L21/027 , H05K3/00 , G03G17/00 , H01L21/312
Abstract: Very sensitive electron beam positive resists have been obtained using films of nitrocellulose containing 10.5 to 12% nitrogen.
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公开(公告)号:FR2286419A1
公开(公告)日:1976-04-23
申请号:FR7525149
申请日:1975-08-07
Applicant: IBM
Inventor: GIPSTEIN EDWARD , MOREAU WAYNE M , NEED OMAR U III
Abstract: 1500403 Sensitized olefin-sulphone polymers INTERNATIONAL BUSINESS MACHINES CORP 21 May 1975 [26 Sept 1974] 21838/75 Addition to 1421805 Heading G2C A radiation sensitive positive resist comprises an olefin-sulphone polymer sensitized by a charge transfer agent or a free radical source. The polymer is preferably poly (hexene-1-sulphone) and sensitizers include azulene, 2, 4, 7-trinitrofluorenone, fluorene, diphenylamine, p-nitroaniline, CCl4, CBr4, Cl4, phenyl disulphide, azobenzene, and poly(alpha-chloromethylacrylate). The resist is degraded on exposure to U.V., visible light, x-rays, gamma radiation and low energy electron beams of from 10 to 30 KeV. The exposed areas of the polymer are removed using a solvent such as 1,4- dichlorobutane.
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公开(公告)号:FR2286418A1
公开(公告)日:1976-04-23
申请号:FR7525148
申请日:1975-08-07
Applicant: IBM
Inventor: GIPSTEIN EDWARD , MOREAU WAYNE M , NEED OMAR U III
IPC: G03F7/20 , G03F7/039 , G03F7/30 , H01L21/027 , G03F7/00
Abstract: Electron beam positive resists which are sensitive to electron beam radiation and simultaneously thermally stable are prepared using polycarbonates.
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4.
公开(公告)号:SG42851A1
公开(公告)日:1997-10-17
申请号:SG1996000141
申请日:1994-01-11
Applicant: IBM
Inventor: GURNEY BRUCE ALVIN , HEIM DAVID EUGENE , LEFAKIS HARALAMBOS , NEED OMAR U III , SPERIOSU VIRGIL SIMON , WILHOIT DENNIS RICHARD
Abstract: A magnetoresistive read sensor based on the spin valve effect is described, in which a component of the read element resistance varies as the cosine of the angle between the magnetization directions in two adjacent magnetic layers. The sensor read element includes two adjacent ferromagnetic layers separated by a nonmagnetic metallic layer. A layer of nonmagnetic electrically conductive material is deposited adjacent to and in contact with at least one of the ferromagnetic layers (referred to as a filter layer) to form a back or conduction layer which provides a low resistance path for conduction electrons transmitted through the adjacent filter layer. The thickness of the filter layer is selected such that it effectively blocks conduction electrons having spins antiparallel to the direction of magnetization in the filter layer while allowing conduction electrons with parallel spins to be transmitted through the layer into the adjacent back layer. The magnetization of the filter layer is free to rotate in response to an applied magnetic field thereby effectively varying the electrically resistance to conduction electrons in the back/filter layer. The thickness of the back layer is selected to optimize the sensor parameters being measured and is in a range of about 4.0A to 1000A.
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公开(公告)号:FR2299665A1
公开(公告)日:1976-08-27
申请号:FR7538564
申请日:1975-12-09
Applicant: IBM
Inventor: GIPSTEIN EDWARD , NEED OMAR U III , MOREAU WAYNE M
IPC: B41C1/00 , C08J3/28 , G03F7/039 , H01L21/027 , G03C1/495 , C08F220/10 , H01L21/312
Abstract: 1515330 Electron sensitive polymers INTERNATIONAL BUSINESS MACHINES CORP 5 Dec 1975 [29 Jan 1975] 49960/75 Heading G2C Positive resist masks are formed by exposing a supported film of a non-crosslinked polymeric material to electron beam radiation in a predetermined pattern so as to degrade the polymeric material in the exposed areas, and removing the degraded products in the exposed areas. The polymeric material used is selected from (1) polyalkyl methacrylates and copolymers of alkyl methacrylates with halogen - or cyano - containing monomers and (2) post halogenated derivatives of the polymers in (1). The coated polymers may be baked prior to exposure and also after development.
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公开(公告)号:FR2295467A1
公开(公告)日:1976-07-16
申请号:FR7533875
申请日:1975-10-29
Applicant: IBM
Inventor: GIPSTEIN EDWARD , MOREAU WAYNE M , NEED OMAR U III
IPC: H05K3/00 , G03F7/039 , H01L21/027 , G03G17/00 , H01L21/312
Abstract: Very sensitive electron beam positive resists have been obtained using films of polymeric methyl methacrylate containing acetate polymers.
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7.
公开(公告)号:FR2286414A1
公开(公告)日:1976-04-23
申请号:FR7525147
申请日:1975-08-07
Applicant: IBM
Inventor: GIPSTEIN EDWARD , MOREAU WAYNE MARTIN , NEED OMAR U III
IPC: H05K3/00 , G03F7/039 , H01L21/027 , G03C1/72 , G03F7/00
Abstract: Production of an image on a high-resolution radiation sensitive positive resist material, by comprises (1) applying a film of a poly-(alpha-lower-alkenyl ketone) on a substrate (2) irradiating in a pre-determined pattern, and (3) treating the film with a solvent for the breakdown product formed in the irradiated areas. Used in mfr. of integrated printed circuits, printing plates etc. Post hardening of the photo-resist image is not required. The image has a high resolution, below the film thickness e.g. 0.5 um lines with the same separation can be obtained in 1 um films.
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