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公开(公告)号：AU2003263367A1
公开(公告)日：2004-04-08
申请号：AU2003263367
申请日：2003-09-15
Applicant: IBM
Inventor： CABRAL CYRIL JR , CLEVENGER LAWRENCE ALFRED , HSU LOUIS LU-CHEN , SHEPARD JOSEPH FRANCIS JR , WONG KWONG HON
IPC: H01L21/28 , H01L21/336 , H01L29/423
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