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公开(公告)号:DE2428812A1
公开(公告)日:1975-01-23
申请号:DE2428812
申请日:1974-06-14
Applicant: IBM
Inventor: GIPSTEIN EDWARD , CORTELLINO CHARLES ANTHONY , MOREAU WAYNE MARTIN , WAPPINGERS FALLS N Y
IPC: G03F7/038 , G03F7/20 , G03G15/05 , H01L21/027 , H05K3/06 , G03F7/00 , G03F1/00