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公开(公告)号：DE3168576D1
公开(公告)日：1985-03-14
申请号：DE3168576
申请日：1981-04-02
Applicant: IBM
IPC: H01L21/331 , H01L21/762 , H01L21/8224 , H01L21/8228 , H01L27/082 , H01L29/10 , H01L29/423 , H01L29/73 , H01L29/732 , H01L29/735 , H01L27/08 , H01L21/82
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