-
1.发明申请SYSTEM FOR AND METHOD OF INVESTIGATING THE EXACT SAME POINT ON A SAMPLE SUBSTRATE WITH MULTIPLE WAVELENGTHS 审中-公开在多波长样本基质上研究精确同点的系统和方法
公开(公告)号：WO2008048312A3
公开(公告)日：2008-10-30
申请号：PCT/US2006047654
申请日：2006-12-14
Applicant: J A WOOLLAM CO INC
Inventor： LIPHARDT MARTIN M , JOHS BLAINE D , HERZINGER CRAIG M , HE PING , GOEDEN CHRISTOPHER A , WOLLAM JOHN A , WELCH JAMES D
IPC: G02B3/14
CPC classification number: G01N21/211 , G01J3/0208 , G01N21/55 , G01N2021/213
Abstract: Disclosed are system for and method of analyzing asample at substantially the exact same small spot point on a sample with a plurality of wavelengths.
Abstract translation: 公开了在具有多个波长的样本上基本上完全相同的小斑点处分析样本的系统和方法。
-
Patent Agency Ranking
公开(公告)号：EP1902281A4
公开(公告)日：2013-01-09
申请号：EP06784936
申请日：2006-06-15
Applicant: J A WOOLLAM CO INC
Inventor： LIPHARDT MARTIN M
IPC: G01J4/00
CPC classification number: G01N21/211
-
3.发明公开SYSTEM AND METHOD FOR CONTROLLING INTENSITY OF A BEAM OF ELECTROMAGNETIC RADIATION IN ELLIPSOMETERS AN POLARIMETERS 有权系统及其控制方法电磁辐射的射线的强度和椭偏仪偏光计
公开(公告)号：EP2109758A4
公开(公告)日：2012-03-14
申请号：EP08726833
申请日：2008-03-14
Applicant: J A WOOLLAM CO INC
Inventor： PFEIFFER GALEN L , LIPHARDT MARTIN M
CPC classification number: G01J3/10 , G01J3/447 , G01J4/00 , G01N21/211 , G01N2021/213
-
公开(公告)号：EP2446235A4
公开(公告)日：2014-11-12
申请号：EP10792439
申请日：2010-06-18
Applicant: J A WOOLLAM CO INC , UNIV NEBRASKA
Inventor： HERZINGER CRAIG M , SCHUBERT MATHIAS M , HOFMANN TINO , LIPHARDT MARTIN M , WOOLLAM JOHN A
CPC classification number: G01N21/3581 , G01N21/211 , G01N2021/213
-
公开(公告)号：EP3152536A4
公开(公告)日：2018-05-23
申请号：EP15803319
申请日：2015-01-20
Applicant: J A WOOLLAM CO INC
Inventor： LIPHARDT MARTIN M , HALE JEFFREY S , HE PING , PFEIFFER GALEN L
IPC: G01J4/00
CPC classification number: G02B17/0621 , G01J1/0411 , G01J1/0414 , G01J4/00 , G01J4/04 , G01N21/21 , G02B19/0023 , G02B19/0076 , G02B27/0012 , G02B27/286
Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
-
6.发明公开FAST SAMPLE HEIGHT, AOI AND POI ALIGNMENT IN MAPPING ELLIPSOMETER OR THE LIKE 有权FAST样品高度，AOI和POI对准一个ABBILDUNGSELLIPSOMETER或类似
公开(公告)号：EP2283401A4
公开(公告)日：2012-02-01
申请号：EP08874227
申请日：2008-11-20
Applicant: J A WOOLLAM CO INC
Inventor： HE PING , HALE JEFFREY S , PFEIFFER GALEN L , LIPHARDT MARTIN M
CPC classification number: G01N21/211 , G01J4/00 , G01N2021/213
-
-
-
-
-
Search Results
6
records
(took 0.025 seconds)
