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公开(公告)号：DE69638171D1
公开(公告)日：2010-06-10
申请号：DE69638171
申请日：1996-03-12
Applicant: J A WOOLLAM CO INC
Inventor： GREEN STEVEN E , WOOLLAM JOHN A , HERZINGER CRAIG M , DUCHARME STEPHEN P , JOHS BLAINE D
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Patent Agency Ranking
公开(公告)号：AT466272T
公开(公告)日：2010-05-15
申请号：AT96301670
申请日：1996-03-12
Applicant: J A WOOLLAM CO INC
Inventor： GREEN STEVEN E , WOOLLAM JOHN A , HERZINGER CRAIG M , DUCHARME STEPHEN P , JOHS BLAINE D
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3.发明申请SYSTEM FOR AND METHOD OF INVESTIGATING THE EXACT SAME POINT ON A SAMPLE SUBSTRATE WITH MULTIPLE WAVELENGTHS 审中-公开在多波长样本基质上研究精确同点的系统和方法
公开(公告)号：WO2008048312A3
公开(公告)日：2008-10-30
申请号：PCT/US2006047654
申请日：2006-12-14
Applicant: J A WOOLLAM CO INC
Inventor： LIPHARDT MARTIN M , JOHS BLAINE D , HERZINGER CRAIG M , HE PING , GOEDEN CHRISTOPHER A , WOLLAM JOHN A , WELCH JAMES D
IPC: G02B3/14
CPC classification number: G01N21/211 , G01J3/0208 , G01N21/55 , G01N2021/213
Abstract: Disclosed are system for and method of analyzing asample at substantially the exact same small spot point on a sample with a plurality of wavelengths.
Abstract translation: 公开了在具有多个波长的样本上基本上完全相同的小斑点处分析样本的系统和方法。
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公开(公告)号：EP2798322A4
公开(公告)日：2015-06-17
申请号：EP12861672
申请日：2012-04-06
Applicant: J A WOOLLAM CO INC
Inventor： HERZINGER CRAIG M
IPC: G01J4/00 , G01N21/21 , G01N21/3581
CPC classification number: G01J4/00 , G01N21/211 , G01N21/3581
Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).
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公开(公告)号：EP2446235A4
公开(公告)日：2014-11-12
申请号：EP10792439
申请日：2010-06-18
Applicant: J A WOOLLAM CO INC , UNIV NEBRASKA
Inventor： HERZINGER CRAIG M , SCHUBERT MATHIAS M , HOFMANN TINO , LIPHARDT MARTIN M , WOOLLAM JOHN A
CPC classification number: G01N21/3581 , G01N21/211 , G01N2021/213
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6.发明公开DISCRETE POLARIZATION STATE ROTATABLE COMPENSATOR SPECTROSCOPIC ELLIPSOMETER SYSTEM, AND METHOD OF CALIBRATION 审中-公开与分立的偏振态校准的可旋转补偿器的光谱椭偏仪
公开(公告)号：EP2044404A4
公开(公告)日：2012-10-24
申请号：EP06786916
申请日：2006-07-11
Applicant: J A WOOLLAM CO INC
Inventor： JOHS BLAINE D , HERZINGER CRAIG M , GREEN STEVEN E , HALE JEFFREY S
IPC: G01N21/21
CPC classification number: G01N21/211 , G01N21/274 , G01N2021/213
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