公开(公告)号：US20180158645A1

公开(公告)日：2018-06-07

申请号：US15576686

申请日：2016-08-11

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Bok Lae CHO ,  Sang Jung AHN ,  Inho SUL

IPC: H01J37/16 ,  H01J37/244 ,  H01J37/22 ,  H01J37/18 ,  G02B21/02 ,  G02B21/06 ,  G02B21/36 ,  G02B21/00

CPC classification number: H01J37/16 ,  G02B21/0004 ,  G02B21/02 ,  G02B21/06 ,  G02B21/36 ,  G02B21/361 ,  H01J37/18 ,  H01J37/20 ,  H01J37/226 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2448 ,  H01J2237/2808 ,  H01J2237/2855

Abstract: A vacuum sample chamber for a particle and optical device includes on one surface thereof, an aperture through which a particle beam to be focused along an optical axis of particles such as electrons, ions and neutral particles is incident; and on the opposite surface thereof, a detachable sample holder through which light penetrates, thereby enabling a sample to be observed and analyzed by means of the particle beam and light. A sample chamber is capable of reducing observation time by maintaining a vacuum therein even when a sample is put into or taken out from a sample chamber of an electron microscope or focused ion beam observation equipment, and capable of obtaining an optical image on the outside thereof without inserting a light source or an optical barrel into the sample chamber. A light-electron fusion microscope comprising the sample chamber.