公开(公告)号：US20180158645A1

公开(公告)日：2018-06-07

申请号：US15576686

申请日：2016-08-11

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Bok Lae CHO ,  Sang Jung AHN ,  Inho SUL

IPC: H01J37/16 ,  H01J37/244 ,  H01J37/22 ,  H01J37/18 ,  G02B21/02 ,  G02B21/06 ,  G02B21/36 ,  G02B21/00

CPC classification number: H01J37/16 ,  G02B21/0004 ,  G02B21/02 ,  G02B21/06 ,  G02B21/36 ,  G02B21/361 ,  H01J37/18 ,  H01J37/20 ,  H01J37/226 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2448 ,  H01J2237/2808 ,  H01J2237/2855

Abstract: A vacuum sample chamber for a particle and optical device includes on one surface thereof, an aperture through which a particle beam to be focused along an optical axis of particles such as electrons, ions and neutral particles is incident; and on the opposite surface thereof, a detachable sample holder through which light penetrates, thereby enabling a sample to be observed and analyzed by means of the particle beam and light. A sample chamber is capable of reducing observation time by maintaining a vacuum therein even when a sample is put into or taken out from a sample chamber of an electron microscope or focused ion beam observation equipment, and capable of obtaining an optical image on the outside thereof without inserting a light source or an optical barrel into the sample chamber. A light-electron fusion microscope comprising the sample chamber.

公开(公告)号：US20150371811A1

公开(公告)日：2015-12-24

申请号：US14696569

申请日：2015-04-27

Applicant: Korea Research Institute of Standards and Science

Inventor： Takashi OGAWA ,  Bok Lae CHO ,  Sang Jung AHN ,  In Yong PARK ,  Cheolsu HAN

IPC: H01J37/12 ,  G01N23/225 ,  H01J49/44 ,  H01J37/21 ,  H01J37/05

CPC classification number: H01J37/05 ,  G01N23/2251 ,  H01J37/12 ,  H01J37/21 ,  H01J49/44 ,  H01J2237/057 ,  H01J2237/1516 ,  H01J2237/2448 ,  H01J2237/24485

Abstract: Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator.

Abstract translation: 本文公开了一种单色仪和包括该单色仪的带电粒子束装置。 单色仪可以包括第一静电透镜，其被配置为具有由入射在第一静电透镜上的发射体放电的带电粒子束，折射带电粒子束的射线，并且包括多个电极和与该第一静电透镜间隔开的第二静电透镜 第一静电透镜以特定间隔被配置为具有与第一静电透镜的中心轴线相同设置的中心轴，由入射在第二静电透镜上的第一静电透镜输出的带电粒子束折射带电的光线 粒子束，并且包括多个电极。 因此，具有即使在通过单色仪之后，带电粒子束也具有优异的特性的优点。

公开(公告)号：US20180218874A1

公开(公告)日：2018-08-02

申请号：US15576687

申请日：2016-01-06

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Bok Lae CHO ,  In Yong PARK

IPC: H01J37/065 ,  H01J37/26

CPC classification number: H01J37/065 ,  H01J37/06 ,  H01J37/26 ,  H01J2237/061 ,  H01J2237/06341

Abstract: The present invention relates to an electron gun for facilitating position adjustment, and an electron microscope including the same, the electron gun improving a vacuum structure so as to easily move a filament block or an electron tip of an electron gun without having bellows for maintaining a vacuum when the center axis of the filament block or the electron tip of the electron gun is mechanically misaligned with the center axis of a anode and a focusing lens.