公开(公告)号：US20210181090A1

公开(公告)日：2021-06-17

申请号：US17256966

申请日：2019-07-03

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Yong Jai CHO ,  Won CHEGAL ,  Hyun Mo CHO

IPC: G01N21/21 ,  G01N21/13 ,  G01B11/27

Abstract: The present invention relates to a normal incidence ellipsometer and a method for measuring the optical properties of a sample by using same. The purpose of the present invention is to provide: a normal incidence ellipsometer in which a wavelength-dependent compensator is replaced with a wavelength-independent linear polarizer such that equipment calibration procedures are simplified while a measurement wavelength range expansion can be easily implemented; and a method for measuring the optical properties of a sample by using same.

公开(公告)号：US20230168185A1

公开(公告)日：2023-06-01

申请号：US17921706

申请日：2020-09-21

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Hyun Mo CHO ,  Dong Hyung KIM ,  Won CHEGAL ,  Yong Jai CHO

IPC: G01N21/21 ,  G01N21/11

CPC classification number: G01N21/211 ,  G01N21/11 ,  G01N2021/752

Abstract: An embodiment of the present disclosure provides a multi-reflection silicon-based liquid immersion micro-channel measurement device and measurement method capable of improving measurement sensitivity by completely separating, through multi-reflection, first reflective light reflected by a sample detection layer and a second reflective light by a prism-buffer solution interface and by allowing the light to enter multiple times through the multi-reflection. The multi-reflection silicon-based liquid immersion micro-channel measurement device according to the embodiment of the present disclosure includes a micro-channel structure including a support, and one or more micro-channels formed on the support and each having a sample detection layer with a fixed bioadhesive material for detecting a sample, a sample injection unit configured to inject a buffer solution containing the sample into the micro-channel, a prism unit including a prism, and a reflection structure formed by coating a bottom surface of the prism with a mirror reflection material, the polarized light generating unit configured to generate polarized light, and the polarized light detecting unit configured to detect a polarization change of reflected light.

公开(公告)号：US20180113069A1

公开(公告)日：2018-04-26

申请号：US15557446

申请日：2016-03-08

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Yong Jai CHO ,  Won CHEGAL ,  Hyun Mo CHO

IPC: G01N21/21 ,  G01J4/04 ,  G01B11/06 ,  G01B11/24

CPC classification number: G01N21/211 ,  G01B11/0641 ,  G01B11/24 ,  G01J4/04 ,  G01N21/8422

Abstract: The present invention relates to an optical element rotation type ellipsometer, and more particularly, to an ellipsometer used to measure Mueller-matrix components of a sample by measuring and analyzing a change in a polarization state of light reflected or transmitted by the sample.According to the exemplary embodiment of the present invention, it is possible to provide the achromatic rotating-element ellipsometer and the method for measuring Mueller-matrix elements of a sample using the same capable of measuring the Mueller-matrix elements of the anisotropic sample as well as the isotropic sample by using four polarizers.

公开(公告)号：US20180100795A1

公开(公告)日：2018-04-12

申请号：US15532896

申请日：2016-04-27

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Hyun Mo CHO ,  Won CHEGAL ,  Yong Jai CHO

IPC: G01N21/21 ,  G01N21/41 ,  G01B11/06 ,  B01L3/00

CPC classification number: G01N21/211 ,  B01L3/502715 ,  B01L2300/0654 ,  B01L2300/08 ,  B01L2300/0816 ,  B01L2300/168 ,  G01B11/06 ,  G01N21/21 ,  G01N21/4133 ,  G01N2021/213

Abstract: An oblique incidence, prism-incident, silicon-based, immersion microchannel-based measurement device related to an example of the present disclosure may include: a microchannel structure which has a support, a substrate which is formed on the support and made of a semiconductor or dielectric material, a cover part which has a prism structure and is installed on the support, and a microchannel which is formed in any one of an upper portion of the support and a lower end of the cover part; a sample injection part which forms an adsorption layer for a sample on a substrate by injecting a buffer solution containing the sample made of a biomaterial into the microchannel; a polarized light generation part which emits polarized incident light through an incident surface of the prism to the adsorption layer at an incident angle that satisfies a p-wave antireflection condition; and a polarized light detection part which first reflective light reflected by at least one of the adsorption layer and the substrate enters through a reflective surface of the prism and which detects a change in polarization of the first reflective light.