公开(公告)号：JP2006186381A

公开(公告)日：2006-07-13

申请号：JP2006000173

申请日：2006-01-04

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  H01L21/304 ,  B24D3/00 ,  B24D3/28 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/321

Abstract: PROBLEM TO BE SOLVED: To provide a CMP process and products thereof which can reduce dishing by removing metal selectively and relatively slowly. SOLUTION: In this CMP process and products thereof, alumina is used including α-alumina particles with a particle size of less than 50 nm and a surface area of at least 50 m 2 /g. COPYRIGHT: (C)2006,JPO&NCIPI

公开(公告)号：JP2002038132A

公开(公告)日：2002-02-06

申请号：JP2001135915

申请日：2001-05-07

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K

IPC: C04B38/06 ,  C01F7/02 ,  C01F7/44 ,  C04B35/111 ,  C09K3/14

Abstract: PROBLEM TO BE SOLVED: To provide an α-alumina abrasive grain suitable for the grinding under medium to low pressure. SOLUTION: The α-alumina grain particle has a crystal size smaller than 5 μm, essentially all alumina grain has α-form, the density of the grain is 3.6-3.9 g/cc, the grain diameter is 0.1-5 μm and the grain contains randomly distributed essentially spherical voids.

公开(公告)号：CA2344980C

公开(公告)日：2006-06-27

申请号：CA2344980

申请日：2001-04-25

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K

IPC: C04B38/06 ,  C09K3/14 ,  C01F7/02 ,  C01F7/44 ,  C04B35/111

Abstract: Alpha alumina abrasive grits which are particularly well-suited to medium to low pressure grinding applications wherein the grits comprise uniformly dispersed microvoids.

公开(公告)号：DE60001958T2

公开(公告)日：2004-03-04

申请号：DE60001958

申请日：2000-06-06

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  KHAUND ARUP

IPC: B24B37/00 ,  C01F17/00 ,  C09K3/14 ,  H01L21/304 ,  H01L21/306

Abstract: A polishing slurry, useful in optical or CMP applications, comprises a ceria with a BET surface area of at least 10 m2/gm. The slurry may be made by subjecting a commercial ceria slurry comprising agglomerates to a mechano-chemical treatment at a pH of from 9 to 11 using media that are low purity alpha alumina or zirconia. Preferred slurries maintain a positive surface charge at all pH values. CMP slurries preferably comprise in addition an anionic surfactant to aid in removal of surface residues.

公开(公告)号：AU752038B2

公开(公告)日：2002-09-05

申请号：AU5464700

申请日：2000-06-06

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  KHAUND ARUP

IPC: B24B37/00 ,  C01F17/00 ,  C09K3/14 ,  H01L21/304 ,  H01L21/306

Abstract: A polishing slurry, useful in optical or CMP applications, comprises a ceria with a BET surface area of at least 10 m2/gm. The slurry may be made by subjecting a commercial ceria slurry comprising agglomerates to a mechano-chemical treatment at a pH of from 9 to 11 using media that are low purity alpha alumina or zirconia. Preferred slurries maintain a positive surface charge at all pH values. CMP slurries preferably comprise in addition an anionic surfactant to aid in removal of surface residues.

公开(公告)号：CA2383504A1

公开(公告)日：2001-04-26

申请号：CA2383504

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  DELANEY WILLIAM R ,  TANIKELLA BRAHMANANDAM V

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

公开(公告)号：DE10121656B4

公开(公告)日：2012-08-02

申请号：DE10121656

申请日：2001-05-03

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K

IPC: C01F7/02 ,  C04B38/06 ,  C01F7/44 ,  C04B35/111 ,  C09K3/14

Abstract: Verfahren für die Herstellung von Alpha-Aluminiumoxid Schleifkörnern, welches umfaßt: a) Bilden einer wäßrigen Dispersion einer Alpha-Aluminiumoxid-Vorstufe; Bilden eines Gels; b) gleichmäßiges Verteilen von Poren bildenden Teilchen in dem Gel; trocknen und brennen des Gels, um die Alpha-Aluminiumoxid-Vorstufe in ein poröses Alpha-Aluminiumoxid zu überführen, wobei die Poren bildenden Teilchen derart ausgewählt sind, daß das Alpha-Aluminiumoxid gleichmäßig darin verteilte, im Wesentlichen kugelförmige Mikro-Poren mit Durchmessern von 0,1 bis 5 Mikrometern sowie eine Dichte von 3,6 bis 3,9 g/m3 aufweist; und c) Bilden von Schleifkörnern in einem gewünschten Größenbereich.

公开(公告)号：HK1050913A1

公开(公告)日：2003-07-11

申请号：HK03103083

申请日：2003-04-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  C01F7/44 ,  C09G20090101 ,  C09G1/02 ,  C09K20090101 ,  C09K3/14 ,  H01L20090101 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：AU754060B2

公开(公告)日：2002-10-31

申请号：AU7090200

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：DE10121656A1

公开(公告)日：2001-11-22

申请号：DE10121656

申请日：2001-05-03

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K

IPC: C04B38/06 ,  C01F7/02 ,  C01F7/44 ,  C04B35/111 ,  C09K3/14