公开(公告)号：JP2006186381A

公开(公告)日：2006-07-13

申请号：JP2006000173

申请日：2006-01-04

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  H01L21/304 ,  B24D3/00 ,  B24D3/28 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/321

Abstract: PROBLEM TO BE SOLVED: To provide a CMP process and products thereof which can reduce dishing by removing metal selectively and relatively slowly. SOLUTION: In this CMP process and products thereof, alumina is used including α-alumina particles with a particle size of less than 50 nm and a surface area of at least 50 m 2 /g. COPYRIGHT: (C)2006,JPO&NCIPI

公开(公告)号：CA2383504A1

公开(公告)日：2001-04-26

申请号：CA2383504

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  DELANEY WILLIAM R ,  TANIKELLA BRAHMANANDAM V

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

公开(公告)号：HK1050913A1

公开(公告)日：2003-07-11

申请号：HK03103083

申请日：2003-04-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  C01F7/44 ,  C09G20090101 ,  C09G1/02 ,  C09K20090101 ,  C09K3/14 ,  H01L20090101 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：AU754060B2

公开(公告)日：2002-10-31

申请号：AU7090200

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：BR0014755A

公开(公告)日：2002-09-24

申请号：BR0014755

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS E PLASTI

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

公开(公告)号：AU7090200A

公开(公告)日：2001-05-10

申请号：AU7090200

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS AND PLASTICS INC

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：CA2382724C

公开(公告)日：2006-01-24

申请号：CA2382724

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R ,  GARG AJAY K

IPC: B24B37/00 ,  C09K3/14 ,  C01F7/44 ,  C09G1/02 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particle s having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：ZA200201091B

公开(公告)日：2003-07-30

申请号：ZA200201091

申请日：2002-02-07

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  B24B37/00 ,  H01L21/304 ,  H01L21/321 ,  C09K ,  C09G ,  H01L

Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：AU754328B2

公开(公告)日：2002-11-14

申请号：AU7090000

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

公开(公告)号：BR0014533A

公开(公告)日：2002-06-04

申请号：BR0014533

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS E PLASTI

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.