公开(公告)号：JP2014058444A

公开(公告)日：2014-04-03

申请号：JP2013235337

申请日：2013-11-13

Applicant: Saint-Gobain Ceramics & Plastics Inc ,  サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド

Inventor： TANIKELLA BRAHMANANDAM V ,  CHRISTOPHER ARCONA ,  DAVID I GINDHART ,  CHRISTOPHER D JONES ,  SIMPSON MATTHEW A

IPC: C30B33/00 ,  H01L21/304

CPC classification number: B24B7/22 ,  B24B49/12

Abstract: PROBLEM TO BE SOLVED: To provide a method for realigning a crystal orientation of a single crystal body such as a sapphire in the production of a single crystal for a semiconductor of a nitride material of group III and V elements, especially GaN.SOLUTION: A method for altering a crystal orientation of a single crystal body includes a step of analyzing the crystal orientation of a single crystal body and a step of calculating an angle of orientation difference between a selected crystal orientation of the single crystal body and a projection of crystal orientation along a first main outer surface of the single crystal body. The method further includes a step of removing a material from at least a part of the first main outer surface to alter the angle of orientation difference.

Abstract translation: 要解决的问题：提供一种用于在制造用于III族氮化物材料的半导体的单晶的制造中的蓝宝石等单晶体的晶体取向的方法以及V族元素，特别是GaN。解决方案：A 用于改变单晶体的晶体取向的方法包括分析单晶体的晶体取向的步骤和计算单晶体的选定晶体取向与晶体取向投影之间的取向差角度的步骤 沿着单晶体的第一主外表面。 该方法还包括从第一主外表面的至少一部分去除材料以改变取向差的角度的步骤。

公开(公告)号：JP2006186381A

公开(公告)日：2006-07-13

申请号：JP2006000173

申请日：2006-01-04

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  H01L21/304 ,  B24D3/00 ,  B24D3/28 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/321

Abstract: PROBLEM TO BE SOLVED: To provide a CMP process and products thereof which can reduce dishing by removing metal selectively and relatively slowly. SOLUTION: In this CMP process and products thereof, alumina is used including α-alumina particles with a particle size of less than 50 nm and a surface area of at least 50 m 2 /g. COPYRIGHT: (C)2006,JPO&NCIPI

公开(公告)号：JP2012250344A

公开(公告)日：2012-12-20

申请号：JP2012185056

申请日：2012-08-24

Applicant: Saint-Gobain Ceramics & Plastics Inc ,  サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  CHERIAN ISAAC K ,  VEDANTHAM RAMANUJAM

IPC: B24B1/00 ,  C30B25/18 ,  C30B29/38

CPC classification number: C30B29/20

Abstract: PROBLEM TO BE SOLVED: To provide a sapphire substrate that has a larger size than that of a conventional substrate and is of high quality.SOLUTION: The sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.

Abstract translation: 要解决的问题：提供具有比常规基板大的尺寸的蓝宝石基板，并且具有高质量。 解决方案：蓝宝石衬底包括大致平坦的表面，其具有选自由a面，r面，m面和c面取向组成的组的结晶取向，并且具有不大于约的nTTV 0.037μm/ cm 2，其中nTTV是对于大致平坦的表面的表面积进行标准化的总厚度变化，基底的直径不小于约9.0cm。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：WO2008083081A3

公开(公告)日：2008-11-06

申请号：PCT/US2007088576

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS ,  TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

IPC: B24B7/22 ,  B24B37/04 ,  H01L21/20

CPC classification number: B24B7/228 ,  Y10T428/257 ,  Y10T428/26

Abstract: A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 µm/cm 2 , wherein nTTV is total thickness variation normalized for surface area of teh generally planar surface, the substrate having a diameter not less than about 9.0 cm.

Abstract translation: 蓝宝石衬底包括具有选自由a面，r面，m面和c面取向组成的组的结晶取向，且具有不大于约0.037μm/ cm 2的nTTV的大致平坦的表面， SUP> 2，其中nTTV是对于大致平坦表面的表面积归一化的总厚度变化，所述基底具有不小于约9.0cm的直径。

公开(公告)号：UA98314C2

公开(公告)日：2012-05-10

申请号：UAA200906859

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

IPC: B24B7/00 ,  B24B37/005 ,  H01L21/20 ,  H01L21/304

Abstract: Описанасапфирнаяподложка, котораяимеетв целомплоскуюповерхностьс кристаллографическойориентацией, выбраннойизгруппы, состоящейиза-плоскостной, r-плоскостной, m-плоскостнойи с-плоскостнойориентаций, ивеличиной nTTV неболеечемприблизительно 0,037 мкм/см, где nTTV являетсяобщейвариациейтолщины, нормированнойк площадиповерхностиуказаннойв целомплоскойповерхности, гдеуказаннаяподложкаимеетдиаметрнеменеепримерно .

公开(公告)号：CA2673662A1

公开(公告)日：2008-07-10

申请号：CA2673662

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： VEDANTHAM RAMANUJAM ,  RIZZUTO ROBERT A ,  TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN

IPC: B24B7/22 ,  B24B37/04 ,  H01L21/20

Abstract: A sapphire substrate includes a generally planar surface having a crystal lographic orientation selected from the group consisting of a-plane, r-plane , m-plane, and c-plane orientations, and having a nTTV of not greater than a bout 0.037 µm/cm2, wherein nTTV is total thickness variation normalized for surface area of teh generally planar surface, the substrate having a diamete r not less than about 9.0 cm.

公开(公告)号：AU754328B2

公开(公告)日：2002-11-14

申请号：AU7090000

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

公开(公告)号：BR0012290A

公开(公告)日：2002-04-16

申请号：BR0012290

申请日：2000-06-06

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  KHAUND ARUP

IPC: B24B37/00 ,  C01F17/00 ,  C09K3/14 ,  H01L21/304 ,  H01L21/306

Abstract: A polishing slurry, useful in optical or CMP applications, comprises a ceria with a BET surface area of at least 10 m2/gm. The slurry may be made by subjecting a commercial ceria slurry comprising agglomerates to a mechano-chemical treatment at a pH of from 9 to 11 using media that are low purity alpha alumina or zirconia. Preferred slurries maintain a positive surface charge at all pH values. CMP slurries preferably comprise in addition an anionic surfactant to aid in removal of surface residues.

公开(公告)号：AU7090000A

公开(公告)日：2001-04-30

申请号：AU7090000

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

公开(公告)号：CA2382724A1

公开(公告)日：2001-04-12

申请号：CA2382724

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R ,  GARG AJAY K

IPC: B24B37/00 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particle s having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.