High frequency MOS device and manufacturing process thereof
    1.
    发明公开
    High frequency MOS device and manufacturing process thereof 有权
    Hochfrequenz-MOS-Anordnung und Verfahren zur deren Herstellung

    公开(公告)号:EP1868247A1

    公开(公告)日:2007-12-19

    申请号:EP06425396.6

    申请日:2006-06-13

    Abstract: MOS device (1) formed in a semiconductor body (2) having a first conductivity type and a surface (7) and housing a first current-conduction region (3) and a second current-conduction region (4), of a second conductivity type. The first and second current-conduction regions (3, 4) define between them a channel (5), arranged below a gate region (10), formed on top of the surface (7) and electrically insulated from the channel region (5). A conductive region (12) extends on top of a portion (5a) of the channel (5), adjacent to and insulated from the gate region only on a side thereof facing the first current-conduction region (3). The conductive region (12) is biased so as to modulate the current flowing in the channel (5).

    Abstract translation: MOS器件(1)形成在具有第一导电类型的半导体本体(2)和表面(7)中,并且容纳第二导电区域(3)和第二电流传导区域(4) 类型。 第一和第二电流传导区域(3,4)在它们之间限定布置在栅极区域(10)下方的通道(5),形成在表面(7)的顶部上并且与沟道区域(5)电绝缘, 。 导电区域(12)在沟道(5)的一部分(5a)的顶部上延伸,仅在其面对第一电流传导区域(3)的一侧上与栅极区域相邻并与栅极区域绝缘。 导电区域(12)被偏置以便调制在通道(5)中流动的电流。

    Lateral MOS device and method of making the same
    2.
    发明公开
    Lateral MOS device and method of making the same 有权
    Laterale MOS-Anordnung und Verfahren zu deren Herstellung

    公开(公告)号:EP1635399A1

    公开(公告)日:2006-03-15

    申请号:EP04425671.7

    申请日:2004-09-08

    Abstract: A lateral MOS device (1) is formed in a body (2) having a surface (7) and is formed by a semiconductor layer (40) of a first conductivity type; a drain region (10, 11) of a second conductivity type, formed in the semiconductor layer (40) and facing the surface (7); a source region (13) of the second conductivity type, formed in the semiconductor layer (40) and facing the surface (7); a channel (15) of the first conductivity type, formed in the semiconductor layer (40) between the drain region (10, 11) and the source region (13) and facing the surface (7); and an insulated gate region (20-22), formed on top of the surface (7) over the channel region (15). In order to improve the dynamic performance, a conductive region (23) extends only on one side of the insulated gate region (20-22), on top of the drain region (10, 11) but not on top of the insulated gate region.

    Abstract translation: 横向MOS器件(1)形成在具有表面(7)的主体(2)中并且由第一导电类型的半导体层(40)形成; 形成在所述半导体层(40)中且面向所述表面(7)的第二导电类型的漏区(10,11); 形成在所述半导体层(40)中并面向所述表面(7)的所述第二导电类型的源极区域(13); 在所述漏极区域(10)和所述源极区域(13)之间的所述半导体层(40)中形成并面对所述表面(7)的第一导电类型的沟道(15)。 以及形成在通道区域(15)上方的表面(7)的顶部上的绝缘栅极区域(20-22)。 为了改善动态性能,导电区域(23)仅在绝缘栅极区域(20-22)的一侧上延伸,在漏极区域(10,11)的顶部上延伸,而不在绝缘栅极区域的顶部 。

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