公开(公告)号：EP4361560A1

公开(公告)日：2024-05-01

申请号：EP23202344.0

申请日：2023-10-09

Applicant: STMicroelectronics S.r.l.

Inventor： CARULLI, Paola ,  FALORNI, Luca Giuseppe ,  FEDELI, Patrick ,  GUERINONI, Luca

IPC: G01C19/5762 ,  G01C19/5747

CPC classification number: G01C19/5762 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope (10) with detection along a vertical axis is provided with a detection structure (10) having a movable structure (12), suspended above a substrate (13) so as to perform, as a function of an angular velocity (Ωz) around the vertical axis a sense movement along a first horizontal axis (x). The movable structure has at least one drive mass (14) internally defining a window (16), elastically coupled to a rotor anchor (20'), at an anchoring region (A), through elastic anchoring elements (21); at least one bridge element (18), rigid and of a conductive material, cantilevered suspended and extending within the window along the first horizontal axis, elastically coupled to the drive mass; movable electrodes (23), carried integrally by the bridge element with extension along a second horizontal axis (y). The detection structure (10) also has stator electrodes (28, 29), arranged in the window and interdigitated with the movable electrodes, at a certain separation distance below the bridge element (18), which extends longitudinally above the same stator electrodes and the movable electrodes.

公开(公告)号：EP4300040A1

公开(公告)日：2024-01-03

申请号：EP23180883.3

申请日：2023-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： FALORNI, Luca Giuseppe ,  FEDELI, Patrick ,  GATTERE, Gabriele ,  VALZASINA, Carlo ,  CARULLI, Paola

IPC: G01C19/5747

Abstract: MEMS gyroscope (350), having a first movable mass (303, 403) configured to move with respect to a fixed structure along a first drive direction and along a first sense direction, transverse to the first drive direction; a first drive assembly (310), coupled to the first movable mass and configured to generate a first alternate drive movement; a first drive elastic structure (320), coupled to the first movable mass and to the first drive assembly, rigid in the first drive direction and compliant in the first sense direction; a second movable mass (303, 403), configured to move with respect to the fixed structure in a second drive direction parallel to the first drive direction and in a second sense direction parallel to the first sense direction; a second drive assembly (311), coupled to the second movable mass and configured to generate a second alternate drive movement in the second drive direction; and a second drive elastic structure (320), coupled to the second movable mass and to the second drive assembly, rigid in the second drive direction and compliant in the second sense direction.

公开(公告)号：EP4253909A3

公开(公告)日：2023-12-27

申请号：EP23163094.8

申请日：2023-03-21

Applicant: STMicroelectronics S.r.l.

Inventor： FALORNI, Luca Giuseppe ,  CARULLI, Paola ,  FEDELI, Patrick ,  GUERINONI, Luca

IPC: G01C19/574

Abstract: A MEMS angular rate sensor is presented with two pairs of suspended masses that are micromachined on a semiconductor layer. A first pair includes two masses opposite to and in mirror image of each other. The first pair of masses has driving structures to generate a mechanical oscillation in a linear direction. A second pair of masses includes two masses opposite to and in mirror image of each other. The second pair of masses is coupled to the first pair of driving masses with coupling elements. The two pairs of masses are coupled to a central bridge. The central bridge has a differential configuration to reject any external disturbances. Each of the masses of the two pairs of masses includes different portions to detect different linear and angular movements.

公开(公告)号：EP3945323A1

公开(公告)日：2022-02-02

申请号：EP21188923.3

申请日：2021-07-30

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  FEDELI, Patrick ,  VALZASINA, Carlo

IPC: G01P15/09 ,  B81B3/00 ,  G01P15/08

Abstract: A MEMS accelerometer including a supporting structure (2; 102) and at least one deformable group (21*, 51; 121*, 151) and one second deformable group (22*, 52; 122*, 152), which include, respectively, a first deformable cantilever element (21*; 121*) and a second deformable cantilever element (22*; 122*), which each have a respective first end, which is fixed to the supporting structure (2; 102), and a respective second end. The first and second deformable groups (21*, 51; 121*, 151) further include, respectively, a first piezoelectric detection structure (51; 151) and a second piezoelectric detection structure (52; 152). The MEMS accelerometer (1; 101) further includes: a first mobile mass (31, 131) and a second mobile mass (32, 132), which are fixed, respectively, to the second ends of the first and second deformable cantilever elements (21*, 22*; 121*, 122*) and are vertically staggered with respect to the first and second deformable cantilever elements (21*, 121*; 22*, 122*), respectively; and a first elastic structure (M1, M1'), which elastically couples the first and second mobile masses (31; 131; 32, 132).

公开(公告)号：EP4379320A1

公开(公告)日：2024-06-05

申请号：EP23211935.4

申请日：2023-11-24

Applicant: STMicroelectronics S.r.l.

Inventor： GUERINONI, Luca ,  FEDELI, Patrick ,  FALORNI, Luca Giuseppe

IPC: G01C19/5719 ,  G01C19/5733

CPC classification number: G01C19/5719 ,  G01C19/5733

Abstract: A microelectromechanical device includes: a support body (8, 10-13); at least one movable mass (15) of semiconductor material, elastically constrained to the support body (8, 10-13) so as to be able to oscillate; fixed detection electrodes (22, 23) rigidly connected to the support body (8, 10-13) and capacitively coupled to the at least one movable mass (15); and at least one test structure (17) of semiconductor material, rigidly connected to the support body (8, 10-13) and distinct from the fixed detection electrodes (22, 23). The test structure (17) is capacitively coupled to the at least one movable mass (15) and is configured to apply electrostatic forces (FX, FY, FZ) to the at least one movable mass (15) in response to a voltage between the test structure (17) and the at least one movable mass (15).

公开(公告)号：EP4253909A2

公开(公告)日：2023-10-04

申请号：EP23163094.8

申请日：2023-03-21

Applicant: STMicroelectronics S.r.l.

Inventor： FALORNI, Luca Giuseppe ,  CARULLI, Paola ,  FEDELI, Patrick ,  GUERINONI, Luca

IPC: G01C19/574

Abstract: A MEMS angular rate sensor is presented with two pairs of suspended masses that are micromachined on a semiconductor layer. A first pair includes two masses opposite to and in mirror image of each other. The first pair of masses has driving structures to generate a mechanical oscillation in a linear direction. A second pair of masses includes two masses opposite to and in mirror image of each other. The second pair of masses is coupled to the first pair of driving masses with coupling elements. The two pairs of masses are coupled to a central bridge. The central bridge has a differential configuration to reject any external disturbances. Each of the masses of the two pairs of masses includes different portions to detect different linear and angular movements.

公开(公告)号：EP4098973A1

公开(公告)日：2022-12-07

申请号：EP22174570.6

申请日：2022-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： LANGFELDER, Giacomo ,  GAFFURI PAGANI, Leonardo ,  GUERINONI, Luca ,  FALORNI, Luca Giuseppe ,  FEDELI, Patrick ,  CARULLI, Paola

IPC: G01C19/5776

Abstract: A circuit (10) comprises an inertial measurement unit such as a MEMS gyroscope (12) configured to be oscillated via a driving signal ( D + , D - , Dsq ) produced by driving circuitry (14A, 14B, 16, 18, 20A, 20B, 22, 24, 26, 28, 30, 32) and a lock-in amplifier, LIA (38) receiving a sensing signal ( S + , S - , Ssq ) from the inertial measurement unit (12) as well as a reference demodulation signal which is a function of the driving signal ( D + , D - , Dsq ). The LIA amplifier (38) is configured to produce an inertial measurement signal ( Vout ) based on the sensing signal ( S + , S - , Ssq ) from the inertial measurement unit (12) and the reference demodulation signal, wherein the reference demodulation signal is affected by a variable phase error. Phase meter circuitry (40) configured to receive the driving signal ( D + , D - , Dsq ) and the sensing signal ( S + , S - , Ssq ) produces, as a function of the phase difference ( ΔΦds ) between the driving signal ( D + , D - , Dsq ) and the sensing signal ( S + , S - , Ssq ), a phase correction signal. The phase correction signal is applied (56) to the reference demodulation signal of the lock-in amplifier (38). In response to the phase correction signal being applied (56) to the reference demodulation signal of the lock-in amplifier (38) the phase error is maintained in the in the vicinity of a reference value ( Φer0 ), thus minimizing the effects of the variation of the phase error.

公开(公告)号：EP4239305A1

公开(公告)日：2023-09-06

申请号：EP23157007.8

申请日：2023-02-16

Applicant: STMicroelectronics S.r.l.

Inventor： DUQI, Enri ,  FEDELI, Patrick ,  MANCA, Nicolò ,  ADORNO, Silvia

IPC: G01L27/00 ,  H04W4/029 ,  G01C5/06 ,  G01C25/00

Abstract: Method (50) for determining a first (P 1 ') and a second (P 2 ') calibrated value of atmospheric pressure, performed by an electronic apparatus (10) comprising a fixed device (14) and a first (12a) and a second (12b) movable device comprising respectively a first (16a) and a second (16b) movable barometer. The method (50) comprises: determining (S10) whether the movable devices are being inductively charged by the fixed device; if so, acquiring (S12) respective measured values of atmospheric pressure (P 1 , P 2 ) through the movable barometers (16a, 16b), and a reference value of atmospheric pressure (P rif ) in a common reference point of the electronic apparatus (10), the movable barometers being at respective predefined height differences (Δh) with respect to the common reference point; calculating (S14) respective pressure differences (ΔP 1 , ΔP 2 ) as a function of the measured values of atmospheric pressure and of the reference value of atmospheric pressure; and when the movable devices are not being charged, acquiring (S20) new measured values of atmospheric pressure through the movable barometers, and determining (S20) the respective calibrated values of atmospheric pressure as a function of the new measured values of atmospheric pressure and of the pressure differences.

公开(公告)号：EP4212824A1

公开(公告)日：2023-07-19

申请号：EP23150057.0

申请日：2023-01-02

Applicant: STMicroelectronics S.r.l.

Inventor： FEDELI, Patrick ,  GUERINONI, Luca ,  CARULLI, Paola ,  FALORNI, Luca Giuseppe

IPC: G01C19/5712 ,  B81B7/00 ,  B81B7/02

Abstract: A microelectromechanical gyroscope (10) is provided with a detection structure (11) having: a substrate (14) with a top surface (14a) parallel to a horizontal plane (xy); a mobile mass (12), suspended above the substrate to perform, as a function of a first angular velocity (Ω x ) around a first axis (x) of the horizontal plane (xy), at least a first detection movement of rotation around a second axis (y) of the horizontal plane; and a first and a second stator elements (28a, 28b) integral with the substrate and arranged underneath the mobile mass to define a capacitive coupling, a capacitance value thereof is indicative of the first angular velocity (Ω x ). The detection structure has a single mechanical anchorage structure for anchoring both the mobile mass and the stator elements to the substrate, arranged internally with respect to the mobile mass, which is coupled to this single mechanical anchorage structure by coupling elastic elements (18) yielding to torsion around the second axis; the stator elements are integrally coupled to the single mechanical anchorage structure in an arrangement suspended above the top surface of the substrate.

公开(公告)号：EP4095484A1

公开(公告)日：2022-11-30

申请号：EP22174359.4

申请日：2022-05-19

Applicant: STMicroelectronics S.r.l.

Inventor： GUERINONI, Luca ,  FEDELI, Patrick ,  FALORNI, Luca Giuseppe

IPC: G01C19/5733 ,  B81B3/00 ,  G01P15/08

Abstract: A microelectromechanical device includes a substrate (21), a first structural layer (23), and a second structural layer (25) of semiconductor material. A sensing mass (32; 132) extends in the first structural layer (23) and is coupled to the substrate (21) by first elastic connections (35) that oscillate in a sensing direction (Z) perpendicular to the substrate (21), with a maximum elongation with respect to a resting position. An out-of-plane stopper structure (38) includes an anchorage (39) fixed to the substrate (21) and a mechanical end-of-travel structure (40), which extends in the second structural layer (25), faces the sensing mass (32), and is separated therefrom by a gap (41) having a width (W) smaller than the maximum elongation. The mechanical end-of-travel structure (40) is coupled to the anchorage (39) by second elastic connections (42) that enable shifts of the mechanical end-of-travel structure (40) with respect to the sensing direction (Z) in response to an impact of the sensing mass (32).