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    Integrated micro-electromechanical switches and a related method thereof
    6.
    发明授权
    Integrated micro-electromechanical switches and a related method thereof 有权
    集成微机电开关及其相关方法

    公开(公告)号：US09117610B2

    公开(公告)日：2015-08-25

    申请号：US14314344

    申请日：2014-06-25

    Applicant: General Electric Company

    Inventor： Marco Francesco Aimi ,  Dan Kenrick Spence

    IPC: H01H51/22 ,  H01H59/00 ,  B81B7/00

    CPC classification number: H01H59/0009 ,  B81B7/008 ,  B81B2201/00 ,  H01H2059/0018

    Abstract: A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor portion coupled to the beam electrode. The beam includes a first beam portion extending from the anchor portion along a first direction; and a second beam portion extending from the anchor portion along a second direction opposite to the first direction. A first control electrode and a first contact electrode are disposed on the substrate, facing the first beam portion. A second control electrode and a second contact electrode are disposed on the substrate, facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurality of micro-electromechanical switches is arranged in at least one of a series arrangement, parallel arrangement.

    Abstract translation: 一种系统包括多个彼此耦合的包括多个门的微机电开关。 每个微机电开关包括设置在基板上的束电极。 梁包括联接到梁电极的锚固部分。 梁包括从锚固部分沿着第一方向延伸的第一梁部分; 以及从所述锚固部分沿着与所述第一方向相反的第二方向延伸的第二梁部分。 第一控制电极和第一接触电极设置在基板上，面对第​​一光束部分。 第二控制电极和第二接触电极设置在基板上，面对第​​二光束部分。 第一控制电极和第二控制电极被耦合以在多个栅极之间形成栅极。 多个微电子机械开关被布置成串联布置，平行布置中的至少一个。

    MEMS PROCESS AND DEVICE
    7.
    发明申请
    MEMS PROCESS AND DEVICE 有权
    MEMS工艺和器件

    公开(公告)号：US20140191344A1

    公开(公告)日：2014-07-10

    申请号：US14203131

    申请日：2014-03-10

    Applicant: Wolfson Microelectronics plc

    Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk H. Hoekstra

    IPC: B81B3/00

    CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane . The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底上形成膜，并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤：形成第一后部体积部分和第二背部体积部分，第一后部体积部分与第二背部体积部分分离， 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积，从而能够增加后部体积，而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

    MAGNETOMETER USING MAGNETIC MATERIALS ON ACCELEROMETER
    9.
    发明申请
    MAGNETOMETER USING MAGNETIC MATERIALS ON ACCELEROMETER 审中-公开
    磁力计使用磁性材料加速度计

    公开(公告)号：WO2014151370A1

    公开(公告)日：2014-09-25

    申请号：PCT/US2014/025592

    申请日：2014-03-13

    Applicant: INVENSENSE, INC. ,  SEEGER, Joseph ,  QIU, Jin ,  THOMPSON, Matthew, Julian

    Inventor： SEEGER, Joseph ,  QIU, Jin ,  THOMPSON, Matthew, Julian

    IPC: G01P15/08

    CPC classification number: G01R33/02 ,  B81B2201/00 ,  G01P15/08 ,  G01R33/0286 ,  H01L21/00 ,  H01L2221/00

    Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field

    Abstract translation: 一种MEMS器件，包括第一检测质量体，部分地设置在第一检验质量体的表面上的第一磁化磁性材料，锚固到基板以支撑第一检测质量块的第一弹簧，以及耦合到第一检测质量块的第一感测元件 并且可操作以感测由环境加速度引起的第一检测质量块的运动。 MEMS器件还包括耦合到第一检验质量块的第二感测元件，并且可操作以感测由环境磁场引起的第一检验质量块的运动

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