Abstract:
PURPOSE: A method for forming a substrate for manufacturing an SiGe/Si HFET(Hetero-junction Field Effect Transistor) and the substrate thereof are provided to be capable of obtaining a thin buffer layer having good device characteristics by carrying out an in-situ heat treatment. CONSTITUTION: After forming the first silicon germanium layer(12) having an inhomogeneous germanium constitution on a silicon epitaxial layer(10), a heat treatment is carried out at the resultant structure by in-situ. Then, the second silicon germanium layer(14) having a homogeneous germanium, is formed on the resultant structure. A silicon cap layer(16) is formed on the second silicon germanium layer. At the time, the first and second silicon germanium layer are used as a buffer layer.
Abstract translation:目的:提供一种形成用于制造SiGe / Si HFET(异质结场效应晶体管)的衬底及其衬底的方法,其能够通过执行原位热获得具有良好器件特性的薄缓冲层 治疗。 构成:在硅外延层(10)上形成具有不均匀锗组成的第一硅锗层(12)之后,通过原位在所得结构上进行热处理。 然后,在所得结构上形成具有均匀锗的第二硅锗层(14)。 硅盖层(16)形成在第二硅锗层上。 此时,第一和第二硅锗层被用作缓冲层。
Abstract:
PURPOSE: A method for forming a silicon germanium layer using different kinds of sources according to a composition ratio of germanium is provided to improve a characteristic of the silicon germanium layer by changing easily the composition ratio of the germanium of silicon germanium layer. CONSTITUTION: A forming method of a silicon germanium layer includes a process for forming an Si1-xGex layer on a substrate within a process chamber having temperature of 150 to 400 degrees centigrade by using a unit atomic layer epitaxy method. In the forming process of the Si1-xGex layer, a silicon source is supplied to an upper surface of the substrate. The first purge gas is supplied to the upper surface of the substrate. A germanium source is supplied to the upper surface of the substrate. The second purge gas is supplied to the upper surface of the substrate. A hydrogen radical is supplied to the upper surface of the substrate. The different kinds of sources are supplied according to a value of x of the Si1-xGex layer.
Abstract:
본 발명은 박막 태양전지의 구조를 제공한다. 이 박막 태양전지의 구조는 제 1 기판; 상기 제 1 기판 상에 제공된 제 1 전극; 상기 제 1 전극 상에 제공된 p-형 반도체층; 상기 P-형 반도체층 상에 제공된 제 1 완충층; 상기 제 1 완충층 상에 제공된 광흡수 영역; 상기 광흡수 영역 상에 제공된 제 2 완충층; 상기 제 2 완충층 상에 제공된 n-형 반도체층; 상기 n-형 반도체층 상에 제공된 제 2 전극; 및 상기 제 2 전극 상에 제 2 기판을 포함하며, 상기 광흡수 영역은 실리콘층, 상기 실리콘층 상의 제 1 층, 및 상기 제 1 층 상의 제 2 층을 포함한다.
Abstract:
A solar cell according to an embodiment of the present invention may comprise: a semiconductor substrate including a silicon crystal; a first immobilization layer, a second immobilization layer, and a first semiconductor layer which are stacked in order on a first surface of the semiconductor substrate; a third immobilization layer, a fourth immobilization layer, and a second semiconductor layer which are stacked in order on a first electrode layer, a first electrode pattern, and a second surface of the semiconductor substrate; and a second electrode layer and a second electrode pattern. The first to fourth immobilization layer may contain intrinsic amorphous silicon. The second immobilization layer has a higher crystallinity than the first immobilization layer, and the fourth immobilization layer has a higher crystallinity than the third immobilization layer. The solar cell can improve the efficiency and lifetime.
Abstract:
A solar cell according to one embodiment of the present invention comprises a substrate; a first electrode on the substrate; a second electrode on the first electrode; a light absorption layer between the first electrode and the second electrode; and a copper-oxide thin film in contact with at least one surface of the first electrode and the second electrode. The present invention can make various and detailed color by controlling the thickness of the copper-oxide thin film and an oxygen ratio. Furthermore, the present invention improves the light efficiency of the solar cell by providing anti-reflection films at the same time according to the positions.
Abstract:
PURPOSE: A vacuum window including a solar cell and a manufacturing method thereof are provided to prevent the temperature of a solar cell plate from being increased using a glass including high infrared light reflectivity and by separating the solar cell plate from a plate glass. CONSTITUTION: A vacuum window including a solar cell comprises a first and a second plate glass(201,203), a vacuum layer(205), and a solar cell plate(207). The first plate glass and the second plate glass are connected in vacuum, and the solar cell plate is formed on a second plate glass surface. The solar cell plate is separated from the first plate glass. The first plate glass is formed with a low emissivity glass including high infrared light reflectivity. The solar cell plate is formed as a semi transmission type and is comprised of inorganic materials such as silicon, CIGS, and CdTe. The second plate glass comprises a second plate glass(209) in the opposite direction to the vacuum layer, and an inert gas is injected between the plate glasses.
Abstract:
태양 전지를 제공한다. 이 태양 전지는 p형 도펀트 영역 및 n형 도펀트 영역을 포함하는 광전 변환층, 및 광전 변환층의 제1 면 상에 배치된 파장 변환층을 포함한다. 파장 변환층은 태양광내 제1 파장을 갖는 입사 성분을 제2 파장을 갖는 투과 성분으로 변환시킨다.