Electrode assembly
    91.
    发明授权
    Electrode assembly 有权
    电极组件

    公开(公告)号:US09097654B2

    公开(公告)日:2015-08-04

    申请号:US13130878

    申请日:2009-11-30

    CPC classification number: G01N27/307 B81B2201/02 B81B2203/04 C25B11/02

    Abstract: The present invention relates to an electrode assembly having a laminate structure comprising: a first insulating capping layer; a first conducting layer capped by the first insulating capping layer and substantially sandwiched by at least the first insulating capping layer such as to leave exposed only an electrical contact lip of the first conducting layer; and an array of etched voids extending through at least the first insulating capping layer and the first conducting layer, wherein each void is partly bound by a surface of the first conducting layer which acts as an internal submicron electrode.

    Abstract translation: 本发明涉及具有层叠结构的电极组件,包括:第一绝缘覆盖层; 第一导电层被第一绝缘覆盖层覆盖,并且至少基本上被第一绝缘覆盖层夹持,以便仅露出第一导电层的电接触唇; 以及延伸穿过至少第一绝缘覆盖层和第一导电层的蚀刻空隙的阵列,其中每个空隙部分地由作为内部亚微米电极的第一导电层的表面结合。

    NANO SCALE RESONATOR, NANO SCALE SENSOR, AND FABRICATION METHOD THEREOF
    93.
    发明申请
    NANO SCALE RESONATOR, NANO SCALE SENSOR, AND FABRICATION METHOD THEREOF 有权
    纳米尺度谐振器,纳米尺度传感器及其制造方法

    公开(公告)号:US20130214876A1

    公开(公告)日:2013-08-22

    申请号:US13668760

    申请日:2012-11-05

    Abstract: A nano scale resonator, a nano scale sensor, and a fabrication method thereof are provided. The nano scale resonator includes a resonance unit of nano scale configured to resonate based on an applied signal, and an anchor on a substrate, the anchor being configured to support the resonance unit, the anchor having an air gap within boundaries of the anchor, the resonance unit, and the substrate, the air gap being configured to reflect a vertical wave occurring in the resonance unit.

    Abstract translation: 提供了纳米级谐振器,纳米级传感器及其制造方法。 所述纳米级谐振器包括纳米级的谐振单元,其被配置为基于所施加的信号而谐振,并且所述锚固件被构造成支撑所述谐振单元,所述锚固件在所述锚的边界内具有气隙, 谐振单元和基板,气隙被配置为反映在谐振单元中发生的垂直波。

    SENSING DEVICE
    99.
    发明申请
    SENSING DEVICE 审中-公开

    公开(公告)号:US20180127264A1

    公开(公告)日:2018-05-10

    申请号:US15668844

    申请日:2017-08-04

    Abstract: A sensing device includes a micro-electromechanical sensor, a source follower and an amplifier. The source follower includes a first output module including a first transistor and a second transistor. The micro-electromechanical sensor is configured to generate an input signal. A first terminal of the first transistor is configured to receive a first reference voltage. A second terminal and a control of the first transistor are electrically connected to the first output terminal and to a first current source respectively. A first terminal and a second terminal of the second transistor are electrically connected to the second terminal and the control terminal of the first transistor respectively. A control terminal of the second transistor is configured to receive the input signal. A first input terminal and a second input terminal of the amplifier are electrically connected to a first output terminal configured to receive a common-mode voltage respectively.

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