中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

260 records (took 0.019 seconds)

    Ionization gauge for high pressure operation
    99.
    发明授权
    Ionization gauge for high pressure operation 有权
    用于高压操作的电离计

    公开(公告)号：US09593996B2

    公开(公告)日：2017-03-14

    申请号：US14377449

    申请日：2013-02-07

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: H01J27/02 ,  B01D59/44 ,  G01L19/06 ,  G01L21/32 ,  H01J41/04 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

    Cold cathode ionization vacuum gauge and inner wall protection member
    100.
    发明授权
    Cold cathode ionization vacuum gauge and inner wall protection member 有权
    冷阴极电离真空计和内壁保护构件

    公开(公告)号：US09316555B2

    公开(公告)日：2016-04-19

    申请号：US14260545

    申请日：2014-04-24

    Applicant: CANON ANELVA CORPORATION

    Inventor： Itaru Enomoto ,  Hideo Mano

    IPC: G01L21/34 ,  G01L21/32 ,  G01L21/30 ,  H01J41/04 ,  H01J41/06

    CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J41/04 ,  H01J41/06

    Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.

    Abstract translation: 一种冷阴极电离真空计，包括：两个电极，其设置成使得一个电极被另一个电极包围，从而在它们之间形成放电空间; 以及电极保护部件，其设置在所述放电空间中并且被配置为保护所述另一电极的内壁表面，其中所述电极保护部件具有导电性并且沿着所述内壁表面的形状弹性变形以与其他电极电连接 电极。

Patent Agency Ranking