公开(公告)号：EP3279150B1

公开(公告)日：2019-07-03

申请号：EP16001699.4

申请日：2016-08-02

Applicant: Peschl Ultraviolet GmbH

Inventor： Peschl, Alexander ,  Peschl, Günther

IPC: C02F1/32 ,  H01J3/00 ,  A61L2/10 ,  H01J5/48 ,  H01J61/34 ,  B01J19/12

公开(公告)号：EP3279150A1

公开(公告)日：2018-02-07

申请号：EP16001699.4

申请日：2016-08-02

Applicant: Peschl Ultraviolet GmbH

Inventor： Peschl, Alexander ,  Peschl, Günther

IPC: C02F1/32 ,  H01J3/00 ,  A61L2/10 ,  H01J5/48 ,  H01J61/34 ,  B01J19/12

CPC classification number: A61L2/10 ,  B01J19/123 ,  H01J3/00 ,  H01J5/48 ,  H01J61/34

Abstract: Die vorliegende Erfindung stellt eine Strahlereinheit (100) mit Kopfteil (1) und Halterung für einen Strahler (10) bereit. Dabei weist das Kopfteil (1) einen strahlerfernen Grundkörper (1a) und einen strahlernahen Anschlusskörper (1 b) auf, die lösbar miteinander verbunden sind, und der Grundkörper (1a) weist eine elektrische Anschlusseinrichtung und eine Schutzgaszufuhreinrichtung auf. Der Anschlusskörper (1 b) hat parallel orientierte Durchtrittsöffnungen (15', 17') für eine Mehrzahl Rohre (9) und/oder Stangen und zumindest ein Rohr (9) aus einem elektrisch leitenden Material, die ein Gestänge (90) als Halterung für den Strahler (10) bilden und an dem Anschlusskörper (1b) lösbar befestigt sind Weiter weist der Grundkörper (1 a) Bohrungen (15,17) auf, die mit den Durchtriltsöffnungen (17') im Anschlusskörper (1b) fluchten. Dabei bestehen der Grund- und der Anschlusskörper (1a, 1b) aus einem elektrisch isolierenden Material. Die für den Strahler (10) erforderlichen elektrischen Anschlussleitungen werden durch das Gestänge (90) gebildet, wobei die jeweiligen Rohre und/oder Stange(n) einenends mit der elektrischen Anschlusseinrichtung in Kontakt stehen, wenn der Grundkörper (1 a) und der Anschlusskörper (1b) verbunden sind, und stellen an ihrem anderen Ende den elektrischen Anschluss des Strahlers (10) bereit. Das zumindest eine Rohr (9) steht einenends mit der Schutzgaszufuhreinrichtung in fluidischer Kommunikation, wenn der Grundkörper (1a) und der Anschlusskörper (1 b) verbunden sind, und anderenends die Schutzgaszufuhr zum Strahler (10) bereit.

Abstract translation: 本发明提供一种具有头部（1）和用于散热器（10）的支架的散热器单元（100）。 在这种情况下，（1 b）中，头部分（1）的散热器遥远基体（1a）和所述连接体附近的散热器，其是可拆卸地相互连接的，和基体（1A）具有电连接装置，和一个保护气体供给装置。 终端主体（1 b）中具有平行取向的通孔（15”，17' ），用于多个管（9）和/或杆和至少一个管（9）的导电材料的，连杆（90），其用于支撑 形成发射极（10）和在连接体（1B）可释放地固定接着，将基体（1）孔（15,17）在所述连接器主体（1b）的与所述Durchtriltsöffnungen（17“）连通的对准。 在这种情况下，基座和连接体（1a，1b）由电绝缘材料制成。 需要的是，散热器（10），电连接线通过联动装置（90），其中在一端设置有电连接的各配管和/或杆（一个或多个）形成的指触时的主体（1a）和所述终端主体（ 1b），另一端提供散热器（10）的电连接。 所述至少一个管（9）是在一个端部与所述保护气体供应装置流体连通的主体（1a）和所述连接器主体（1 b）的连接时，并且在另一中，保护气体供应到散热器（10）准备好。

公开(公告)号：EP1077463A4

公开(公告)日：2006-10-25

申请号：EP00906595

申请日：2000-03-01

Applicant: CANON KK

Inventor： ITO NOBUHIRO ,  MITHUTAKE HIDEAKI

IPC: H01J3/02 ,  H01J29/92 ,  H01J31/12 ,  H01J1/316 ,  H01J1/70 ,  H01J3/00 ,  H01J29/04 ,  H01J29/28 ,  H01J29/46

CPC classification number: H01J3/022 ,  H01J29/92 ,  H01J31/127 ,  H01J2201/3165

Abstract: An electron beam emitting device having a first plate provided with electron emitting elements (15) and an electrode (8) opposed to the first plate and given a potential for accelerating electrons emitted from the electron emitting elements (15). A potential regulating part (9) is provided on the electrode (8) side of the first plate, a first potential regulating part that constitutes the potential regulating part (9) is provided within the region of the potential regulating part (9) to which the electrode (8) is projected. The potential regulating part is further defined in a range of 0.83d from the end of the projection region in any direction parallel to the first plate, where d is the distance between the electrode (8) and the potential regulating section (9). Thereby, the path of electrons is stabilized, and a good image can be formed without displacement of light-emission position.

公开(公告)号：EP1408492A2

公开(公告)日：2004-04-14

申请号：EP03255978.3

申请日：2003-09-23

Applicant: Hewlett-Packard Development Company, L.P.

Inventor： Valley, Jeffrey M. ,  Liebeskind, John

IPC: G11B9/10 ,  G11C13/04 ,  H01J3/00

CPC classification number: G01J1/4257 ,  G11C7/005 ,  G11C13/00 ,  G11C13/04

Abstract: Determining a beam size of an emitter for a data storage medium is disclosed (400). The emitter, having an emitted beam, is moved across conductor of a detector (402). Current through the conductor, resulting from the emitted beam as the emitter moves across the detector, is measured (404).
The size of the emitted beam of the emitter is determined based on the position of the emitter and the measured current (406).

Abstract translation: 公开了确定用于数据存储介质的发射器的光束尺寸（400）。 具有发射束的发射器在检测器（402）的导体上移动。 测量通过导体的电流，（404）当发射器在检测器上移动时发射的光束产生的电流。 发射器的发射光束的大小基于发射器的位置和测量的电流来确定（406）。

公开(公告)号：EP1155431A1

公开(公告)日：2001-11-21

申请号：EP99966653.0

申请日：1999-12-22

Applicant: McData Corporation

Inventor： FREDERICKS, Kenneth, J. ,  O'DONNELL, Michael, E.

IPC: H01J3/00 ,  G06F15/16

CPC classification number: H04L49/357 ,  H04L49/351

Abstract: A method for implementing a link level service in a computer network having a first port device (107) and a second port device (109). Node identification data is stored in the second port device (109). A physical-layer communications coupling is provided between the first port device (107) and the second port device (109) which may be a point-to-point, loop, or switched circuit connection. The first port device (107) sends a request node identification (RNID) message addressed to the second port device (109). The second port device (109) creates an accept message and copies stored node identification data into the accept message. The second port device (109) sends the accept message to the first port device (107).

公开(公告)号：EP0028585B1

公开(公告)日：1985-02-27

申请号：EP80810330.3

申请日：1980-10-31

Applicant: Jenoptik Jena G.m.b.H. ,  VEB Carl Zeiss Jena

Inventor： Hahn, Eberhard, Dr.

IPC: H01J37/00 ,  H01J3/00 ,  H01L21/26

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3007 ,  H01J37/3174 ,  H01J2237/043 ,  H01J2237/31777

公开(公告)号：USRE49602E1

公开(公告)日：2023-08-08

申请号：US16896953

申请日：2020-09-02

Applicant: ASML NETHERLANDS B.V.

Inventor： Pieter Kruit ,  Erwin Slot ,  Tijs Frans Teepen ,  Marco Jan-Jaco Wieland ,  Stijn Willem Herman Karel Steenbrink

IPC: H01J3/00 ,  H01J37/317 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/304

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3045 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/30433 ,  H01J2237/31757

Abstract: Lithography system, sensor and method for measuring properties of a massive amount of charged particle beams of a charged particle beam system, in particular a direct write lithography system, in which



the charged particle beams are converted into light beams by using a converter element,
using an array of light sensitive detectors such as diodes, CCD or CMOS devices, located in line with said converter element, for detecting said light beams,
electronically reading out resulting signals from said detectors after exposure thereof by said light beams,
utilizing said signals for determining values for one or more beam properties, thereby using an automated electronic calculator, and
electronically adapting the charged particle system so as to correct for out of specification range values for all or a number of said charged particle beams, each for one or more properties, based on said calculated property values.

公开(公告)号：US10728923B2

公开(公告)日：2020-07-28

申请号：US16511219

申请日：2019-07-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yingyang Li ,  Chengjun Sun

IPC: H01J3/00 ,  H04W72/12 ,  H04W56/00 ,  H04L5/14 ,  H04W74/08

Abstract: The present disclosure is to provide a method of configuring timing of uplink (UL) transmission, comprising, receiving, by a user equipment (UE), configuration information on carrier aggregation (CA) of at least one frequency division duplex (FDD) cell and at least one time division duplex (TDD) cell; and adjusting, by the UE, starting timing of a UL subframe in a cell participating in the CA.

公开(公告)号：US09293315B2

公开(公告)日：2016-03-22

申请号：US14746753

申请日：2015-06-22

Applicant: Thermo Fisher Scientific (Bremen) GmbH

Inventor： Alexander Alekseevich Makarov

IPC: B01D59/44 ,  H01J49/00 ,  H01J49/26 ,  H01J3/00 ,  H01J49/10 ,  H01J49/06 ,  H01J49/42 ,  H01J49/04 ,  H01J49/40 ,  G01N27/62

CPC classification number: H01J49/10 ,  G01N27/622 ,  H01J49/0027 ,  H01J49/0031 ,  H01J49/0481 ,  H01J49/06 ,  H01J49/063 ,  H01J49/401 ,  H01J49/4215 ,  H01J49/423 ,  H01J49/425 ,  H01J49/426 ,  H01J49/427 ,  H01J49/4295

Abstract: An ion spectrometer is provided, comprising: an ion source, arranged to generate ions continuously with a first range of mass to charge ratios; and an ion trap, arranged to receive ions from the ion source along an axis, and to eject ions with a second range of mass to charge ratios orthogonally to that axis, the second range of mass to charge ratios being narrower than the first range of mass to charge ratios. In some embodiments, ions generated by the ion source continuously flow into the ion trap. Additionally or alternatively, ion optics receive ions ejected from the ion trap and cool the ions without substantial fragmentation. An ion analyzer receives ions ejected from the ion trap or ion optics and separates the ions in accordance with at least one characteristic of the ions.

公开(公告)号：US08022363B2

公开(公告)日：2011-09-20

申请号：US12595393

申请日：2008-03-28

Applicant: Shinichi Iwamoto ,  Kei Kodera ,  Sadanori Sekiya

Inventor： Shinichi Iwamoto ,  Kei Kodera ,  Sadanori Sekiya

IPC: H01J49/42 ,  H01J3/00

CPC classification number: H01J49/424 ,  H01J49/164 ,  H01J49/4295

Abstract: While applying a square wave voltage to the ion electrode (21) so that ions already captured in the ion trap (20) do not disperse, the frequency of the square wave voltage is temporarily increased at the timing when the ions generated in response to the short time irradiation of a laser light reach the ion inlet (25). This decreases the Mathieu parameter qz, and the potential well becomes shallow, which makes it easy for ions to enter the ion trap (20). Although the ions that have been already captured become more likely to disperse, the frequency of the square wave voltage is decreased before they deviate from the stable orbit. Thus, the dispersion of the ions can also be avoided. Accordingly, while the number of captured ions is not decreased, new ions are further added, and thereby the amount of ions can be increased. By performing a mass separation and detection after that, the signal intensity in one mass analysis can be increased. Thereby, the number of repetition of the mass analysis for summing up the mass profiles can be decreased, and the signal intensity can be increased while decreasing the measuring time.

Abstract translation: 当向离子电极（21）施加方波电压时，已经捕获在离子阱（20）中的离子不分散，在响应于该离子阱产生的离子的时刻，方波电压的频率暂时增加 激光的短时间照射到达离子入口（25）。 这降低了Mathieu参数qz，势阱变浅，这使离子容易进入离子阱（20）。 虽然已经被捕获的离子更容易分散，但是在它们偏离稳定轨道之前，方波电压的频率被降低。 因此，也可以避免离子的分散。 因此，虽然捕获离子的数量没有减少，但是进一步添加新离子，从而可以提高离子的量。 通过进行质量分离和检测，可以提高一次质量分析中的信号强度。 因此，可以减少用于求出质量曲线的质量分析的重复次数，并且可以在减少测量时间的同时增加信号强度。