公开(公告)号：US11692938B2

公开(公告)日：2023-07-04

申请号：US16905350

申请日：2020-06-18

Applicant: Quantum-Si Incorporated

Inventor： Ali Kabiri ,  Bing Shen ,  James Beach ,  Kyle Preston ,  Gerard Schmid

IPC: G01N21/64 ,  H01L27/146

CPC classification number: G01N21/6428 ,  G01N21/6402 ,  G01N21/6408 ,  H01L27/14625 ,  H01L27/14685 ,  G01N2021/6439 ,  G01N2201/063 ,  G01N2201/06113

Abstract: Apparatus and methods relating to photonic bandgap optical nanostructures are described. Such optical nanostructures may exhibit prohibited photonic bandgaps or allowed photonic bands, and may be used to reject (e.g., block or attenuate) radiation at a first wavelength while allowing transmission of radiation at a second wavelength. Examples of photonic bandgap optical nanostructures includes periodic and quasi-periodic structures, with periodicity or quasi-periodicity in one, two, or three dimensions and structural variations in at least two dimensions. Such photonic bandgap optical nanostructures may be formed in integrated devices that include photodiodes and CMOS circuitry arranged to analyze radiation received by the photodiodes.

公开(公告)号：US10082425B2

公开(公告)日：2018-09-25

申请号：US15282305

申请日：2016-09-30

Applicant: UNITY SEMICONDUCTOR

Inventor： Philippe Gastaldo

IPC: G01J3/02 ,  G01J3/453 ,  G01J3/18

CPC classification number: G01J3/0208 ,  G01B11/022 ,  G01B11/0608 ,  G01B11/22 ,  G01B11/245 ,  G01B2210/50 ,  G01B2210/56 ,  G01J3/0218 ,  G01J3/18 ,  G01J3/453 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/063 ,  G01N2201/0833 ,  G01N2201/105 ,  G02B21/0064 ,  H01L22/12

Abstract: A confocal chromatic device is provided, including at least one chromatic lens with an extended axial chromatism; at least one broadband light source; at least one optical detector; and at least one measurement channel with a planar Y-junction made with a planar waveguide optics technology, and arranged for transferring light from the at least one light source towards the at least one chromatic lens and for transferring light reflected back through the at least one chromatic lens towards the at least one optical detector.

公开(公告)号：US20180180530A1

公开(公告)日：2018-06-28

申请号：US15880014

申请日：2018-01-25

Applicant: MOBILEODT LTD.

Inventor： David Levitz ,  Ariel K. Beery

IPC: G01N21/21 ,  G01N21/956

CPC classification number: G01N21/21 ,  G01N21/956 ,  G01N2201/063

Abstract: A polarized light imaging apparatus for separating light from a superficial single-scattering layer of a sample and its deeper diffuse layer as a function of space is disclosed. The apparatus has a light source for producing light beams; an illumination optic coupled to the light source for guiding the light beams towards the sample; a linear polarizer coupled to the illumination optic; a non-total internal reflection (TIR) birefringent polarizing prism (BPP) communicatively coupled to the sample to maximize a refraction difference between ordinary waves and extraordinary waves of light returning from the sample; and a detection optic unit coupled to the non-TIR BPP for guiding the light waves returning from the sample towards a single polarization sensitive sensor element.

公开(公告)号：US20180136125A1

公开(公告)日：2018-05-17

申请号：US15539801

申请日：2016-10-24

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Hangman LAI ,  Zhigang ZHANG

IPC: G01N21/59

CPC classification number: G01N21/59 ,  G01M11/0264 ,  G01N21/5907 ,  G01N21/958 ,  G01N2021/5957 ,  G01N2201/063 ,  G01N2201/0635

Abstract: A method for detecting a clarity of a transparent display panel and a detecting apparatus thereof are provided. The detecting method includes: detecting directly a reference pattern sheet by a measuring device to obtain a without-panel measurement value of the reference pattern sheet; placing the transparent display panel between the measuring device and the reference pattern sheet; detecting the reference pattern sheet through the transparent display panel to obtain a with-panel measurement value of the reference pattern sheet; acquiring clarity of the transparent display panel according to the without-panel and with-panel measurement value; wherein, the reference pattern sheet includes a plurality of pattern groups sequentially arranged in a first direction, each of which includes a first region and a second region, and widths of the plurality of pattern groups in the first direction are different. The detecting method can better evaluate a transparent effect of the transparent display panel.

公开(公告)号：US20180120552A1

公开(公告)日：2018-05-03

申请号：US15799193

申请日：2017-10-31

Applicant: SHIMADZU CORPORATION

Inventor： Takeshi MAJI ,  Shunsuke ATSUMI

IPC: G02B21/36 ,  G01N21/35 ,  G02B5/00

CPC classification number: G02B21/362 ,  G01N21/35 ,  G01N2201/063 ,  G02B5/005

Abstract: Provided is an aperture-plate drive mechanism including an aperture-plate open-close mechanism and a rotation mechanism for rotating the open-close mechanism. The open-close mechanism includes: drive blocks 308 fixed to a pair of aperture plates 301; a linear motion guide 306 allowing the drive blocks to move along an axis; a feed screw 302 parallel to the axis, on which a pair of helical threads proceedimg in opposite directions formed; nut members 305 each of which is provided in a manner to be engaged with one of the pair of helical threads and is prevented from rotating due to a rotation of the feed screw; an urging member 309 for pressing the drive blocks onto the nut members, respectively; and a distance adjustment member 310 placed between one drive block and the corresponding nut member, for adjusting the distance between them. With this mechanism, a discrepancy between the open-close center of the aperture plates from the rotation center can be cancelled even after the mechanism is assembled.

公开(公告)号：US09759669B2

公开(公告)日：2017-09-12

申请号：US14416752

申请日：2013-07-03

Applicant: Hitachi High-Technologies Corporation

Inventor： Takahiro Jingu

IPC: G01N21/01 ,  G01N21/88 ,  H01L21/67 ,  G01N21/95 ,  G01N21/94

CPC classification number: G01N21/9501 ,  G01N21/01 ,  G01N21/88 ,  G01N21/94 ,  G01N2201/063 ,  H01L21/67288

Abstract: In an inspection apparatus, inspection is carried out by linearly moving a wafer while rotating the wafer with respect to light. In a case where the wafer is rotated, the velocity of flow of air in outer regions of the wafer is increased, and there is a possibility that the flow of the air in the outer regions cause particles contained in an atmosphere in the vicinity of the wafer to be adhered to the wafer. In a case where such particles are adhered to the wafer, the particles are also detected as a defect, and therefore yields and cleanliness in a semiconductor production process cannot be correctly evaluated. Therefore, it is desirable that adhesion of the particles contained in the atmosphere in the vicinity of the wafer to the wafer be reduced as much as possible. Further, it is expected that, when, for example, rotation speed of the wafer is increased or a diameter of the wafer is increased, such particles are adhered further remarkably. This point has not been satisfactorily considered in the conventional arts. The invention has a feature that a conductor such as a draft to outer regions is supplied from above a substrate while the substrate is being rotated and the supplied conductor is exhausted on outside of the substrate.

公开(公告)号：US20170242343A1

公开(公告)日：2017-08-24

申请号：US15435593

申请日：2017-02-17

Applicant: ASML Netherlands B.V.

Inventor： Nitesh PANDEY ,  Arie Jeffrey DEN BOEF ,  Marinus Johannes Maria VAN DAM

IPC: G03F7/20 ,  G02B5/22 ,  G01N21/47

CPC classification number: G03F7/70191 ,  G01N21/4788 ,  G01N2021/4711 ,  G01N2201/063 ,  G02B5/22 ,  G03F7/70133 ,  G03F7/70616 ,  G03F7/70625

Abstract: A scatterometer performs diffraction based measurements of one or more parameters of a target structure. To make two-color measurements in parallel, the structure is illuminated simultaneously with first radiation (302) having a first wavelength and a first angular distribution and with second radiation (304) having a second wavelength and a second angular distribution. The collection path (CP) includes a segmented wavelength-selective filter (21, 310) arranged to transmit wanted higher order portions of the diffracted first radiation (302X, 302Y) and of the diffracted second radiation (304X, 304Y), while simultaneously blocking zero order portions (302″, 304″) of both the first radiation and second radiation. The illumination path (IP) in one embodiment includes a matching segmented wavelength-selective filter (13, 300), oriented such that a zero order ray passing through the illumination optical system and the collection optical system will be blocked by one of said filters or the other, depending on its wavelength.

公开(公告)号：US20170234795A1

公开(公告)日：2017-08-17

申请号：US15503592

申请日：2015-08-14

Applicant: The Trustees of the University of Pennsylvania

Inventor： David Issadore ,  Melaku Muluneh Woldemariam

IPC: G01N21/64 ,  B01L3/00

CPC classification number: G01N21/6428 ,  B01L3/502715 ,  B01L3/502784 ,  B01L2300/0627 ,  B01L2300/0654 ,  B01L2300/0861 ,  G01N2201/063

Abstract: Microfluidic devices for analyzing droplets are disclosed. A described microfluidic device includes a substrate and a microfluidic channel formed on the substrate. The microfluidic channel includes passages where each passage has a mask pattern configured to modulate a signal of a droplet passing through that passage, such that droplets passing through the passages produce signals. The microfluidic device also includes a detector configured to detect the signals. Methods of analyzing droplets with a microfluidic device having a microfluidic channel formed on a substrate are disclosed. A described method includes passing droplets through the passages, modulating signals from the droplets using mask patterns, formed on the passages; and detecting the signals.

公开(公告)号：US09568430B2

公开(公告)日：2017-02-14

申请号：US14983933

申请日：2015-12-30

Applicant: SciAps, Inc.

Inventor： David Day

IPC: G01J3/02 ,  G01N21/71 ,  G01J3/28 ,  G01J3/443 ,  G01N21/65

CPC classification number: G01N21/718 ,  G01J3/0272 ,  G01J3/2823 ,  G01J3/443 ,  G01N21/65 ,  G01N2201/0221 ,  G01N2201/06113 ,  G01N2201/063

Abstract: An analysis system includes a moveable focusing lens, a laser (typically an eye safe laser) having an output directed at the focusing lens, and a spectrometer outputting intensity data from a sample. A controller system is responsive to the spectrometer and is configured to energize the laser, process the output of the spectrometer, and adjust the position of the focusing lens relative to the sample until the spectrometer output indicates a maximum or near maximum intensity resulting from a laser output focused to a spot on the sample.

Abstract translation: 分析系统包括可移动聚焦透镜，具有指向聚焦透镜的输出的激光器（通常是眼睛安全激光器）以及从样本输出强度数据的光谱仪。 控制器系统响应于光谱仪并且被配置为激励激光器，处理光谱仪的输出，并且调整聚焦透镜相对于样品的位置，直到光谱仪输出指示由激光产生的最大或接近最大强度 输出集中在样品上的一个点。

公开(公告)号：US20160363538A1

公开(公告)日：2016-12-15

申请号：US15121632

申请日：2015-02-24

Applicant: HORIBA JOBIN YVON SAS

Inventor： Bertrand DUTERTRE ,  Denis CATTELAN ,  Emmanuel FRETEL

IPC: G01N21/65 ,  G01J3/02 ,  G02B27/00 ,  G02B21/00 ,  G02B21/16 ,  G01J3/44 ,  G02B21/02

CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/44 ,  G01N2021/656 ,  G01N2201/06113 ,  G01N2201/063 ,  G01N2201/068 ,  G02B21/0048 ,  G02B21/0064 ,  G02B21/0076 ,  G02B21/02 ,  G02B21/16 ,  G02B27/0025

Abstract: An optical apparatus for Raman scattering microscopy, includes a laser source (10) suitable for emitting a laser beam (11) at an excitation wavelength λ, a microscope objective (14) suitable for receiving the laser beam (11) and focusing the laser beam in an image plane of the microscope objective (14), the focused laser beam (21) being intended to illuminate a sample (20), an optical system suitable for collecting a Raman scattering optical beam (22), and detection elements (16, 17) suitable for detecting the Raman scattering beam (22) collected. More particularly, the Raman scattering microscopy apparatus further includes an adaptive optics system (31, 32, 33) positioned on an optical path of the excitation laser beam (11), on an optical path of the Raman scattering beam (22) or on an optical path common to the excitation laser beam (11) and the Raman scattering beam (22).

Abstract translation: 一种用于拉曼散射显微镜的光学装置，包括适于发射激发波长λ的激光束（11）的激光源（10），适于接收激光束（11）并将激光束聚焦的显微镜物镜（14） 在显微镜物镜（14）的像平面中，聚焦激光束（21）旨在照射样品（20），适于收集拉曼散射光束（22）的光学系统和检测元件（16， 17）适用于检测所收集的拉曼散射光束（22）。 更具体地，拉曼散射显微镜装置还包括位于激光激光束（11）的光路上的自适应光学系统（31,32,33），在拉曼散射光束（22）的光路上，或者在 激光激光束（11）和拉曼散射光束（22）共用的光路。