Diode structure flat panel display
    102.
    发明授权
    Diode structure flat panel display 失效
    二极管结构平板显示

    公开(公告)号:US5612712A

    公开(公告)日:1997-03-18

    申请号:US479270

    申请日:1995-06-07

    Abstract: A matrix-addressed diode flat panel display of field emission type is described, utilizing a diode (two terminal) pixel structure. The flat panel display comprises a cathode assembly having a plurality of cathodes, each cathode including a layer of cathode conductive material and a layer of a low effective work-function material deposited over the cathode conductive material and an anode assembly having a plurality of anodes, each anode including a layer of anode conductive material and a layer of cathodoluminescent material deposited over the anode conductive material, the anode assembly located proximate the cathode assembly to thereby receive charged particle emissions from the cathode assembly, the cathodoluminescent material emitting light in response to the charged particle emissions. The flat panel display further comprises means for selectively varying field emission between the plurality of corresponding light-emitting anodes and field-emission cathodes to thereby effect an addressable grey-scale operation of the flat panel display.

    Abstract translation: 利用二极管(二端)像素结构描述场发射型矩阵寻址二极管平板显示器。 平板显示器包括具有多个阴极的阴极组件,每个阴极包括阴极导电材料层和沉积在阴极导电材料上的低有效功函数材料层和具有多个阳极的阳极组件, 每个阳极包括阳极导电材料层和沉积在阳极导电材料上的阴极发光材料层,阳极组件位于阴极组件附近,从而接收来自阴极组件的带电粒子发射,阴极发光材料响应于 带电粒子排放。 平板显示器还包括用于选择性地改变多个对应的发光阳极和场发射阴极之间的场发射的装置,从而实现平板显示器的可寻址的灰度级操作。

    Diode structure flat panel display
    103.
    发明授权
    Diode structure flat panel display 失效
    二极管结构平板显示

    公开(公告)号:US5449970A

    公开(公告)日:1995-09-12

    申请号:US995846

    申请日:1992-12-23

    Abstract: A matrix-addressed diode flat panel display of field emission type is described, utilizing a diode (two terminal) pixel structure. The flat panel display includes a cathode assembly having a plurality of cathodes, each cathode including a layer of cathode conductive material and a layer of a low effective work-function material deposited over the cathode conductive material and an anode assembly having a plurality of anodes, each anode including a layer of anode conductive material and a layer of cathodoluminescent material deposited over the anode conductive material, the anode assembly located proximate the cathode assembly to thereby receive charged particle emissions from the cathode assembly, the cathodoluminescent material emitting light in response to the charged particle emissions. The flat panel display further includes the capability for selectively varying field emission between the plurality of corresponding light-emitting anodes and field-emission cathodes to thereby effect an addressable grey-scale operation of the flat panel display.

    Abstract translation: 利用二极管(二端)像素结构描述场发射型矩阵寻址二极管平板显示器。 平板显示器包括具有多个阴极的阴极组件,每个阴极包括阴极导电材料层和沉积在阴极导电材料上的低有效功函数材料层和具有多个阳极的阳极组件, 每个阳极包括阳极导电材料层和沉积在阳极导电材料上的阴极发光材料层,阳极组件位于阴极组件附近,从而接收来自阴极组件的带电粒子发射,阴极发光材料响应于 带电粒子排放。 平板显示器还包括用于选择性地改变多个对应的发光阳极和场致发射阴极之间的场发射的能力,从而实现平板显示器的可寻址的灰度级操作。

    Self-aligned process for gated field emitters
    105.
    发明授权
    Self-aligned process for gated field emitters 失效
    门控场发射器的自对准过程

    公开(公告)号:US5378182A

    公开(公告)日:1995-01-03

    申请号:US94691

    申请日:1993-07-22

    CPC classification number: H01J9/025 H01J2201/30426

    Abstract: A method of forming a self-aligned gated field emitter with substantial manufacturing advantages is described. There is provided a substrate having at its surface a conductive layer. A first dielectric layer is deposited over the substrate. A conducting layer is deposited over the dielectric layer. Lithography and etching are used to form an opening through the conducting layer and the dielectric layer down to the surface of the substrate wherein there is formed an overhang of the conducting layer over the etched dielectric layer in the opening. Material is vertically deposited through the opening and over the conducting layer until the field emitter is formed and the opening is closed by build up of the depositing material over the conducting layer. At least a portion of the build up of the depositing material over the conducting layer is oxidized down to the desired opening size to form an oxide layer of the material. The oxide layer is removed by etching to expose the desired opening, thereby completing formation of the self-aligned gated field emitter.

    Abstract translation: 描述了一种形成具有显着制造优点的自对准门控场发射器的方法。 提供了一种在其表面具有导电层的衬底。 在衬底上沉积第一介电层。 在电介质层上沉积导电层。 使用光刻和蚀刻来形成穿过导电层和电介质层的开口,直到衬底的表面,其中在开口中在蚀刻的电介质层上形成导电层的突出端。 材料通过开口和导电层上方垂直沉积,直到形成场发射体,并且通过在导电层上形成沉积材料来封闭开口。 在导电层上沉积材料的堆积的至少一部分被氧化到所需的开口尺寸以形成材料的氧化物层。 通过蚀刻去除氧化物层以暴露所需的开口,从而完成自对准门控场致发射体的形成。

    Method for formation of a trench accessible cold-cathode field emission
device
    106.
    发明授权
    Method for formation of a trench accessible cold-cathode field emission device 失效
    用于形成沟槽可访问的冷阴极场致发射器件的方法

    公开(公告)号:US5374868A

    公开(公告)日:1994-12-20

    申请号:US943966

    申请日:1992-09-11

    CPC classification number: H01J9/025 H01J1/3042 H01J2201/30426 H01J2329/8625

    Abstract: A field emitter structure is formed, having trench accessible cold cathode tips is fabricated by forming trenches in a substrate. The trenches are subsequently filled with a conformal insulating layer, a highly conductive layer, and a polysilicon layer. The layers are etched to form emitter tips which are disposed contiguous with the trenches. Electrical signals are propagated through the trenches permitting increased performance of the emitter structure.

    Abstract translation: 形成场致发射结构,通过在衬底中形成沟槽来制造具有沟槽可访问的冷阴极尖端。 随后用保形绝缘层,高导电层和多晶硅层填充沟槽。 蚀刻这些层以形成与沟槽邻接设置的发射极尖端。 电信号通过沟槽传播,允许发射器结构的性能提高。

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