Abstract:
A method of reactive ion etching a substrate 46 to form at least a first and a second etched feature (42, 44) is disclosed. The first etched feature (42) has a greater aspect ratio (depth:width) than the second etched feature (44). In a first etching stage the substrate (46) is etched so as to etch only said first feature (42) to a predetermined depth. Thereafter in a second etching stage, the substrate (46) is etched so as to etch both said first and said second features (42, 44) to a respective depth. A mask (40) may be applied to define apertures corresponding in shape to the features (42, 44). The region of the substrate (46) in which the second etched feature (44) is to be produced is selectively masked with a second maskant (50) during the first etching stage. The second maskant (50) is then removed prior to the second etching stage.
Abstract:
A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.
Abstract:
A gap closing actuator (GCA) device (200) is provided. The GCA device includes at least one device drive comb structure (202a, 202b), at least one input/output (I/O) comb structure (216a, 216b) defining an output of the GCA device, and at least one device truss comb structure (204) interdigitating the device drive comb structure and the I/O comb structure, the truss comb structure configured to move along a first motion axis (205) between a plurality of interdigitated positions based on a first bias voltage (V BIAS ) applied between the truss comb structure and the device drive comb structure. The GCA device also includes a brake portion (230) configured for selectively physically engaging the device truss comb structure to fix a position of the device truss comb structure along the first motion axis.
Abstract:
An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.
Abstract:
The invention relates to a method for producing a micromechanical component (300) that comprises providing a first substrate (100), forming a microstructure (150) on the first substrate (100), wherein the microstructure (150) comprises a moving function element (151), providing a second substrate (200), and forming in the second substrate (200) an electrode (251) for capacitively measuring a deflection of the function element (151). The method further comprises connecting the first and the second substrates (100; 200), wherein a closed cavity which encloses the function element (151) is formed, and wherein the electrode (251) adjoins the cavity in an area of the function element (151).
Abstract:
The invention mainly concerns a capacitive device comprising at least first (2) and second (4) combs, respectively provided with interdigital fingers, adapted to be mobile relative to each other depending on the closing-spacing apart of the axes of the fingers, at least one finger of the first comb (2) including a surface opposite a surface of a finger of the second comb (4). The invention is characterized in that the axis of the finger of the first comb and the axis of the finger of the second comb are inclined relative to a plane orthogonal to the first direction (X) of displacement of the combs, the plane being defined by second (Y) and third (Z) directions perpendicular to the direction (X), and mutually perpendicular.
Abstract:
A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.
Abstract:
A hybrid electro-static actuator for rotating a two-dimensional micro-electromechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.