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    Reactive ion etching
    111.
    发明公开
    Reactive ion etching 有权
    ReaktivesIonenätzen

    公开(公告)号：EP2829512A1

    公开(公告)日：2015-01-28

    申请号：EP14177859.7

    申请日：2014-07-21

    Applicant: Atlantic Inertial Systems Limited

    Inventor： Hawke, Tracey ,  Venables, Mark ,  Sturland, Ian ,  Eley, Rebecka

    IPC: B81C1/00

    CPC classification number: B81C1/00531 ,  B81B3/0064 ,  B81B2201/033 ,  B81B2203/033 ,  B81C1/00388 ,  B81C1/00619 ,  B81C2201/0112 ,  H01L21/3065 ,  H01L21/308

    Abstract: A method of reactive ion etching a substrate 46 to form at least a first and a second etched feature (42, 44) is disclosed. The first etched feature (42) has a greater aspect ratio (depth:width) than the second etched feature (44). In a first etching stage the substrate (46) is etched so as to etch only said first feature (42) to a predetermined depth. Thereafter in a second etching stage, the substrate (46) is etched so as to etch both said first and said second features (42, 44) to a respective depth. A mask (40) may be applied to define apertures corresponding in shape to the features (42, 44). The region of the substrate (46) in which the second etched feature (44) is to be produced is selectively masked with a second maskant (50) during the first etching stage. The second maskant (50) is then removed prior to the second etching stage.

    Abstract translation: 公开了一种反应离子蚀刻衬底46以形成至少第一和第二蚀刻特征（42,44）的方法。 第一蚀刻特征（42）具有比第二蚀刻特征（44）更大的纵横比（深度：宽度）。 在第一蚀刻阶段中，蚀刻衬底（46）以仅将所述第一特征（42）仅蚀刻到预定深度。 此后，在第二蚀刻阶段中，蚀刻衬底（46）以便将所述第一和第二特征（42,44）都蚀刻到相应的深度。 可以施加掩模（40）以限定形状对应于特征（42,44）的孔。 在第一蚀刻阶段期间，用第二掩模（50）选择性地掩蔽其中要产生第二蚀刻特征（44）的衬底（46）的区域。 然后在第二蚀刻阶段之前去除第二掩模（50）。

    MEMS-BASED ULTRA-LOW POWER DEVICES
    114.
    发明公开
    MEMS-BASED ULTRA-LOW POWER DEVICES 审中-公开
    基于MEMS的极低功率器件

    公开(公告)号：EP2536657A2

    公开(公告)日：2012-12-26

    申请号：EP11704885.0

    申请日：2011-02-01

    Applicant: Harris Corporation

    Inventor： ROGERS, John E.

    IPC: B81B3/00

    CPC classification number: B81B3/0056 ,  B81B3/0054 ,  B81B2201/033

    Abstract: A gap closing actuator (GCA) device (200) is provided. The GCA device includes at least one device drive comb structure (202a, 202b), at least one input/output (I/O) comb structure (216a, 216b) defining an output of the GCA device, and at least one device truss comb structure (204) interdigitating the device drive comb structure and the I/O comb structure, the truss comb structure configured to move along a first motion axis (205) between a plurality of interdigitated positions based on a first bias voltage (V
    BIAS ) applied between the truss comb structure and the device drive comb structure. The GCA device also includes a brake portion (230) configured for selectively physically engaging the device truss comb structure to fix a position of the device truss comb structure along the first motion axis.

    LONG TRAVEL RANGE MEMS ACTUATOR
    116.
    发明公开
    LONG TRAVEL RANGE MEMS ACTUATOR 有权
    MEMS-AKTUATOR MIT LANGEM HUBWEG

    公开(公告)号：EP2419370A2

    公开(公告)日：2012-02-22

    申请号：EP10716949.2

    申请日：2010-04-16

    Applicant: SI-Ware Systems

    Inventor： MEDHAT, Mostafa ,  NADA, Yasseen ,  MORTADA, Bassem ,  SAADANY, Bassam, A.

    IPC: B81B3/00

    CPC classification number: B81B3/0051 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/051 ,  H02N1/008 ,  Y10T74/20558

    Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

    Abstract translation: 用于MEMS器件的静电梳驱动致动器包括挠曲弹簧组件和第一和第二梳子驱动组件，每个组合驱动组件在其相对侧上与弯曲弹簧组件连接。 第一和第二梳组件中的每一个包括固定梳状驱动指状物和可移动的梳子驱动指状物，其联接到挠曲弹簧组件并朝着固定梳状驱动指状物延伸。 梳齿驱动指状物在第一和第二梳状驱动组件之间被平均分配，并且围绕挠曲弹簧组件的对称轴线对称地放置。 当电通电时，第一和第二梳状驱动组件的可移动梳状驱动指状物同时朝向第一和第二梳状驱动组件的固定梳状驱动指状物移动。

    MIKROMECHANISCHES BAUELEMENT UND VERFAHREN ZU DESSEN HERSTELLUNG
    117.
    发明公开
    MIKROMECHANISCHES BAUELEMENT UND VERFAHREN ZU DESSEN HERSTELLUNG 有权
    与贯通电极和方法微机械结构ITS

    公开(公告)号：EP2331453A2

    公开(公告)日：2011-06-15

    申请号：EP09781417.2

    申请日：2009-08-03

    Applicant: Robert Bosch GmbH

    Inventor： FEYH, Ando

    IPC: B81C1/00

    CPC classification number: B81B7/007 ,  B81B2201/033 ,  B81B2207/095 ,  B81C2203/0118 ,  B81C2203/036 ,  Y10T29/49126

    Abstract: The invention relates to a method for producing a micromechanical component (300) that comprises providing a first substrate (100), forming a microstructure (150) on the first substrate (100), wherein the microstructure (150) comprises a moving function element (151), providing a second substrate (200), and forming in the second substrate (200) an electrode (251) for capacitively measuring a deflection of the function element (151). The method further comprises connecting the first and the second substrates (100; 200), wherein a closed cavity which encloses the function element (151) is formed, and wherein the electrode (251) adjoins the cavity in an area of the function element (151).

    Micro oscillating device and mircro oscillating device array
    119.
    发明公开
    Micro oscillating device and mircro oscillating device array 有权
    微振荡器件和微振荡器件阵列

    公开(公告)号：EP1975674A3

    公开(公告)日：2010-01-20

    申请号：EP08103114.8

    申请日：2008-03-28

    Applicant: Fujitsu Limited

    Inventor： Tsuboi, Osamu ,  Mizuno, Yoshihiro ,  Soneda, Hiromitsu ,  Okuda, Hisao ,  Matsumoto, Tsuyoshi ,  Kouma, Norinao

    IPC: G02B26/08

    CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/047

    Abstract: A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.

    Abstract translation: 微振荡装置包括框架，包括用于施加参考电势的第一驱动电极的振荡部分以及用于将框架和振荡部分彼此连接的连接部分，其中连接部分限定振荡的轴线 摆动部分的运动。 第二驱动电极固定在框架上以与第一驱动电极配合以产生用于摆动运动的驱动力。 第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端延伸部和第二端延伸部。 第二驱动电极在第一和第二端部延伸部之间的分隔距离内。

    Micromirror device with a hybrid parallel plate and comb drive actuator
    120.
    发明公开
    Micromirror device with a hybrid parallel plate and comb drive actuator 审中-公开
    Mikrospiegelvorrichtung mit hybridem Parallelplatten und Kammelektroden Aktuator

    公开(公告)号：EP1927873A1

    公开(公告)日：2008-06-04

    申请号：EP07254587.4

    申请日：2007-11-26

    Applicant: JDS Uniphase Corporation

    Inventor： Moidu, Abdul Jaleel K.

    IPC: G02B6/35 ,  G02B26/08 ,  B81B3/00

    CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058

    Abstract: A hybrid electro-static actuator for rotating a two-dimensional micro-electromechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.

    Abstract translation: 用于围绕两个垂直轴旋转二维微机电微镜装置的混合静电致动器包括用于围绕倾斜轴旋转微镜的垂直梳齿驱动器和用于旋转微镜的平行板驱动器 关于辊轴。 梳子驱动器的转子梳齿从微镜的子框架延伸，微镜的子框架仅可围绕倾斜轴线旋转，而平行板电极中的一个安装在主平台的下侧，主平台大致围绕 子帧。 垂直梳齿驱动器使副框架和主平台围绕倾斜轴线旋转，而平行板驱动器仅使主平台围绕辊轴线旋转。

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