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    SELECTIVE STEP COVERAGE FOR MICRO-FABRICATED STRUCTURES
    1.
    发明申请
    SELECTIVE STEP COVERAGE FOR MICRO-FABRICATED STRUCTURES 审中-公开
    微结构的选择步骤覆盖

    公开(公告)号：WO2016134329A1

    公开(公告)日：2016-08-25

    申请号：PCT/US2016/018802

    申请日：2016-02-19

    Applicant: SI-WARE SYSTEMS

    Inventor： MEDHAT, Mostafa ,  MORTADA, Bassem ,  SABRY, Yasser ,  NAZEER, Sebastian ,  NADA, Yasseen ,  SADEK, Mohamed ,  SAADANY, Bassam, A.

    IPC: B81C1/00 ,  C23C14/04

    CPC classification number: G02B6/3692 ,  B05B12/20 ,  B05D5/061 ,  B81C1/00373 ,  C23C14/042 ,  C23C14/046 ,  C23C30/00

    Abstract: A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.

    Abstract translation: 具有两个或多个开口级别的荫罩使得可以在微型光学台装置内的微结构的选择性阶梯覆盖。 荫罩包括在荫罩的顶表面内的第一开口和荫罩的底表面内的第二开口。 第二开口与第一开口对准并且具有小于第一开口的第一宽度的第二宽度。 第一开口和第二开口之间的重叠在荫罩内形成一个孔，通过该孔可以发生微光学工作台装置内的微结构的选择性涂层。

    SELF CALIBRATION FOR MIRROR POSITIONING IN OPTICAL MEMS INTERFEROMETERS
    3.
    发明申请
    SELF CALIBRATION FOR MIRROR POSITIONING IN OPTICAL MEMS INTERFEROMETERS 审中-公开
    光学MEMS干涉仪中镜面定位的自校准

    公开(公告)号：WO2017105539A1

    公开(公告)日：2017-06-22

    申请号：PCT/US2016/028144

    申请日：2016-04-18

    Applicant: SI-WARE SYSTEMS

    Inventor： ANWAR, Momen ,  MEDHAT, Mostafa ,  MORTADA, Bassem ,  EL SHATER, Ahmed, Othman ,  GAD SEIF, Mina ,  NAGY, Muhammed ,  SAADANY, Bassam, A. ,  HAFEZ, Amr, N.

    IPC: G01J3/06 ,  G01B9/02 ,  G01J3/453

    CPC classification number: G01J3/4532 ,  G01B9/02051 ,  G01B9/02068 ,  G01J3/06 ,  G01J3/4535 ,  G01J2003/2879

    Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self- calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.

    Abstract translation: 微电子机械系统（MEMS）装置提供干涉仪的可移动反射镜的反射镜定位的自校准。 MEMS设备中的至少一个反射镜包括非平面表面。 可移动反射镜耦合到具有可变电容的MEMS致动器。 所述MEMS装置包括电容式感测电路，用于确定所述可移动反射镜的多个参考位置处的所述MEMS致动器的电容，所述多个参考位置对应于由所述干涉仪基于所述非平坦表面产生的干涉图产生的干涉图的中心脉冲串和一个或多个次要脉冲串。 校准模块使用参考位置处的执行器电容来补偿电容式传感电路中的任何漂移。

    MICRO-OPTICAL BENCH DEVICE WITH HIGHLY/SELECTIVELY-CONTROLLED OPTICAL SURFACES
    5.
    发明申请
    MICRO-OPTICAL BENCH DEVICE WITH HIGHLY/SELECTIVELY-CONTROLLED OPTICAL SURFACES 审中-公开
    具有高/可选光控表面的微光学设备

    公开(公告)号：WO2016134334A1

    公开(公告)日：2016-08-25

    申请号：PCT/US2016/018810

    申请日：2016-02-19

    Applicant: SI-WARE SYSTEMS

    Inventor： SAADANY, Bassam, A. ,  SABRY, Yasser, M. ,  MEDHAT, Mostafa ,  MORTADA, Bassem ,  NAGI, Muhammed ,  SADEK, Mohamed ,  NADA, Yasseen ,  HASSAN, Khaled

    IPC: B81C1/00 ,  G01B9/02 ,  G01J3/02 ,  G01J3/453

    CPC classification number: G02B6/136 ,  B81B2201/047 ,  B81C1/00833 ,  G01B9/02051 ,  G01J3/0259 ,  G01J3/453 ,  G02B6/3692

    Abstract: A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro- optical bench device.

    Abstract translation: 通过提供对微型光学台装置的一个或多个特性的控制和/或微型光学台装置中的光学表面的一个或多个特性的方法制造微型光学台装置。 该方法包括蚀刻衬底以形成包括光学元件和临时结构的永久结构。 临时结构的形状和临时结构和永久结构之间的间隙便于控制微光学台和/或其中的光学表面的性质。 该方法还包括从微型光学平台装置的光路中去除临时结构。

    ON-LINE COMPENSATION OF INSTRUMENTAL RESPONSE DRIFT IN MINIATURIZED SPECTROMETERS
    8.
    发明申请
    ON-LINE COMPENSATION OF INSTRUMENTAL RESPONSE DRIFT IN MINIATURIZED SPECTROMETERS 审中-公开

    公开(公告)号：WO2023091709A2

    公开(公告)日：2023-05-25

    申请号：PCT/US2022/050469

    申请日：2022-11-18

    Applicant: SI-WARE SYSTEMS

    Inventor： MORTADA, Bassem ,  SABRY, Yasser M. ,  ABOZYD, Samir

    IPC: G01J3/02 ,  G01N21/27

    Abstract: Aspects relate to on-line compensation of instrumental drifts in miniaturized spectrometers due to variations in environmental conditions and due to other sources of instrumental drift. The spectrometer may include a light modulator, a detector, and a processor. The spectrometer may further include a sensor configured to obtain a value of a condition contributing to instrumental drifts in the spectrometer. The processor may be configured to extract a set of correction parameters from a correction matrix associating a plurality of sets of correction parameters with sensor values based on the value and to apply the set of correction parameters to an output of the detector to produce a corrected spectrum of a sample under test. The correction matrix may be generated for the spectrometer or may be based on a global correction matrix fitted to the spectrometer.

    INCREASED SPECTROMETER FIELD OF VIEW
    9.
    发明申请
    INCREASED SPECTROMETER FIELD OF VIEW 审中-公开

    公开(公告)号：WO2021011820A1

    公开(公告)日：2021-01-21

    申请号：PCT/US2020/042410

    申请日：2020-07-16

    Applicant: SI-WARE SYSTEMS

    Inventor： SADEK, Mohamed Ahmed ,  LABIB, Shady ,  MEDHAT, Mostafa ,  MORTADA, Bassem

    IPC: G01J3/02 ,  G01J3/10

    Abstract: Aspects relate to mechanisms for increasing the field of view of a spectrometer. An optical device may be configured to simultaneously couple light from different locations (spots) on a sample to the spectrometer to effectively increase the spectrometer field of view. The optical device can include a beam combiner and at least one reflector to reflect light beams from respective spots on the sample towards the beam combiner. The beam combiner can combine the received light beams from the different spots to produce a combined light beam that may be input to the spectrometer.

    SELF-REFERENCED SPECTROMETER
    10.
    发明申请
    SELF-REFERENCED SPECTROMETER 审中-公开

    公开(公告)号：WO2019191698A2

    公开(公告)日：2019-10-03

    申请号：PCT/US2019/025021

    申请日：2019-03-29

    Applicant: SI-WARE SYSTEMS

    Inventor： MEDHAT, Mostafa ,  MORTADA, Bassem ,  SABRY, Yasser, M. ,  HOSSAM, Mohamed ,  ANWAR, Momen ,  SHEBL, Ahmed ,  HADDARA, Hisham ,  SAADANY, Bassam, A.

    IPC: G01J3/02 ,  G01J3/10 ,  G01J3/45 ,  G01J3/26 ,  G01J3/453

    Abstract: Aspects of the disclosure relate to a self-referenced spectrometer for providing simultaneous measurement of a background or reference spectral density and a sample or other spectral density. The self-referenced spectrometer includes an interferometer optically coupled to receive an input beam and to direct the input beam along a first optical path to produce a first interfering beam and a second optical path to produce a second interfering beam, where each interfering beam is produced prior to an output of the interferometer. The spectrometer further includes a detector optically coupled to simultaneously detect a first interference signal produced from the first interfering beam and a second interference signal produced from the second interfering beam, and a processor configured to process the first interference signal and the second interference signal and to utilize the second interference signal as a reference signal in processing the first interference signal.

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