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公开(公告)号：KR20070097731A
公开(公告)日：2007-10-05
申请号：KR20060028359
申请日：2006-03-29
CPC classification number: G02B26/0808 , B81B2201/04 , G02B26/0841 , G02B26/0858
Abstract: 멤스를 이용한 디스플레이 장치가 개시된다. 픽셀 당 다수개의 멤스 소자들을 갖는 멤스 패널 및 멤스 패널에 의해 회절된 광을 영상으로서 투사하는 투사 광학계를 갖는 멤스를 이용한 이 장치는, 영상을 이루는 픽셀들 각각의 밝기 레벨에 따라 멤스 소자들의 변위를 제어하는 제어 신호를 발생하는 제어부 및 어두운 영상을 나타낼 각 픽셀에서, 제어 신호에 응답하여 변위되어 평행 입사광을 회절하는 서로 이웃한 다수개의 멤스 소자들을 갖는 멤스 패널을 구비하는 것을 특징으로 한다.
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公开(公告)号：KR100759106B1
公开(公告)日：2007-09-19
申请号：KR1020070015157
申请日：2007-02-14
Applicant: 이화여자대학교 산학협력단
CPC classification number: G02B26/0841 , B81B7/0048 , B81B7/02 , B81B2201/04 , G02B6/357
Abstract: A method for bonding a mirror plate with an electrostatic driving unit in a MEMS(Micro-Electro-Mechanical System) mirror is provided to decrease breakage of the electrostatic driving unit by safely bonding the mirror plate with the electrostatic driving unit through a supporting post and then etching the mirror plate over an area larger than that of the supporting post. In an MEMS mirror having a mirror plate, a driving unit(310) actuating the mirror plate by electrostatic force, and a substrate, which are aligned in order, a method for bonding the mirror plate with the electrostatic driving unit in the MEMS mirror comprises the steps of: leaving a supporting post(320) of a first area in the center of the mirror in order to contact the driving unit to the substrate, during an etching process of the driving unit; patterning a pedestal of a second area wider than the first area, on the bottom surface of the mirror plate; bonding the mirror plate to the driving unit by using the pedestal; and etching the mirror plate in a third area wider than the first area and smaller than the second area, to remove the supporting post.
Abstract translation: 提供了一种用于在MEMS（微电子机械系统）镜中将静电驱动单元结合的方法，以通过支撑柱将静电驱动单元安全地粘贴在一起，以减少静电驱动单元的损坏， 然后在比支撑柱大的区域上蚀刻镜板。 在具有镜板的MEMS反射镜中，通过静电力驱动镜板的驱动单元（310）和依次对准的基板在MEMS反射镜中将镜板与静电驱动单元接合的方法包括： 步骤：在驱动单元的蚀刻过程期间，将第一区域的支撑柱（320）留在反射镜的中心，以便将驱动单元接触到基板; 在所述镜板的底表面上形成比所述第一区域宽的第二区域的基座; 通过使用底座将镜板连接到驱动单元; 并且在比第一区域宽并且小于第二区域的第三区域中蚀刻镜板，以移除支撑柱。
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公开(公告)号：KR1020070026827A
公开(公告)日：2007-03-08
申请号：KR1020077001238
申请日：2005-06-15
Applicant: 스테레오 디스플레이, 인크. , 주식회사 옹스트롱
CPC classification number: G02B26/0841 , B81B3/0051 , B81B2201/04 , G02B26/105
Abstract: A DCM(Discretely Controlled Micromirror) with multiple height levels is provided to keep a wide displacement range and favorable displacement precision and to have low driving voltage compatible with an IC(Integrated Circuit) element. A DCM with multiple height levels is composed of micromirrors(2,5) and a plurality of variable support members(1,3,4) on which the micromirrors are placed. The variable support members are controlled by attractive force(6), such as electrostatic force controlled by the digital and/or discrete operation of voltage. The position of the micromirror is controlled by changing the height of each variable support members. The positions of the variable support members on a plane can be changed.
Abstract translation: 提供具有多个高度级别的DCM（离散控制微镜），以保持宽的位移范围和有利的位移精度，并具有与IC（集成电路）元件兼容的低驱动电压。 具有多个高度级的DCM由微镜（2,5）和多个可变支撑构件（1,3,4）组成，微反射镜放置在其上。 可变支撑构件由吸力（6）控制，例如通过电压的数字和/或离散操作控制的静电力。 通过改变每个可变支撑构件的高度来控制微镜的位置。 可以改变平面上的可变支撑构件的位置。
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公开(公告)号：KR1020060014434A
公开(公告)日：2006-02-15
申请号：KR1020057023135
申请日：2004-02-12
Applicant: 미라디아 인크.
CPC classification number: G02B26/0841 , B81B7/02 , B81B2201/04 , G02B26/02
Abstract: A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mirror plate, the reflective surface concealing the hinge and the mirror plate. The micro mirror array fabricated from a single material.
Abstract translation: 具有隐藏铰链的微反射镜阵列，其例如在反射空间光调制器中是有用的。 在一个实施例中，微反射镜阵列包括在镜板的上表面上的间隔支撑壁，铰链，镜板和反射表面，反射表面隐藏铰链和镜板。 微镜阵列由单一材料制成。
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