公开(公告)号：KR100888080B1

公开(公告)日：2009-03-11

申请号：KR1020080037474

申请日：2008-04-22

Applicant: 이화여자대학교 산학협력단

Inventor： 박일흥 ,  박재형 ,  김민수 ,  전진아 ,  서정은

IPC: G02B26/08 ,  H01L21/77

CPC classification number: G02B26/0841 ,  B81B2201/04 ,  G02B6/357 ,  G02B17/002 ,  H01L21/77

Abstract: A method for manufacturing a micro-mirror array is provided to joint a mirror plate and a driving unit and form the driving unit while the driving unit and the mirror plate are joined, so a crack is not generated on the mirror plate. A micromirror array manufacturing method is comprised of the steps: forming a comb electrode(S10), a forming a mirror plate(S20), bonding a wafer(S30), finishing the comb electrode formation(S40), and separating the mirror plate(S50). The comb electrode is formed by using the multi-step etch height and the comb-electrode for the driving part is formed on the first wafer. The mirror plate is formed on the second wafer, and the first wafer and the second wafer are joined. The comb electrode is formed while first wafer and the second wafer are joined.

Abstract translation: 提供一种制造微反射镜阵列的方法，用于连接镜板和驱动单元，并在驱动单元和镜板接合的同时形成驱动单元，从而在镜板上不产生裂纹。 微镜阵列制造方法包括以下步骤：形成梳状电极（S10），形成镜板（S20），接合晶片（S30），完成梳状电极形成（S40），以及分离镜板（ S50）。 通过使用多步蚀刻高度形成梳状电极，并且用于驱动部分的梳状电极形成在第一晶片上。 镜板形成在第二晶片上，第一晶片和第二晶片接合。 在第一晶片和第二晶片接合时形成梳状电极。

公开(公告)号：KR100759106B1

公开(公告)日：2007-09-19

申请号：KR1020070015157

申请日：2007-02-14

Applicant: 이화여자대학교 산학협력단

Inventor： 박일흥 ,  박재형 ,  유병욱 ,  전진아 ,  김민수

IPC: G02B26/08 ,  B81B7/02

CPC classification number: G02B26/0841 ,  B81B7/0048 ,  B81B7/02 ,  B81B2201/04 ,  G02B6/357

Abstract: A method for bonding a mirror plate with an electrostatic driving unit in a MEMS(Micro-Electro-Mechanical System) mirror is provided to decrease breakage of the electrostatic driving unit by safely bonding the mirror plate with the electrostatic driving unit through a supporting post and then etching the mirror plate over an area larger than that of the supporting post. In an MEMS mirror having a mirror plate, a driving unit(310) actuating the mirror plate by electrostatic force, and a substrate, which are aligned in order, a method for bonding the mirror plate with the electrostatic driving unit in the MEMS mirror comprises the steps of: leaving a supporting post(320) of a first area in the center of the mirror in order to contact the driving unit to the substrate, during an etching process of the driving unit; patterning a pedestal of a second area wider than the first area, on the bottom surface of the mirror plate; bonding the mirror plate to the driving unit by using the pedestal; and etching the mirror plate in a third area wider than the first area and smaller than the second area, to remove the supporting post.

Abstract translation: 提供了一种用于在MEMS（微电子机械系统）镜中将静电驱动单元结合的方法，以通过支撑柱将静电驱动单元安全地粘贴在一起，以减少静电驱动单元的损坏， 然后在比支撑柱大的区域上蚀刻镜板。 在具有镜板的MEMS反射镜中，通过静电力驱动镜板的驱动单元（310）和依次对准的基板在MEMS反射镜中将镜板与静电驱动单元接合的方法包括： 步骤：在驱动单元的蚀刻过程期间，将第一区域的支撑柱（320）留在反射镜的中心，以便将驱动单元接触到基板; 在所述镜板的底表面上形成比所述第一区域宽的第二区域的基座; 通过使用底座将镜板连接到驱动单元; 并且在比第一区域宽并且小于第二区域的第三区域中蚀刻镜板，以移除支撑柱。