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    Self-Limited, Anisotropic Wet Etching of Transverse Vias in Microfluidic Chips
    114.
    发明申请
    Self-Limited, Anisotropic Wet Etching of Transverse Vias in Microfluidic Chips 有权
    微流控芯片中横向气道的自限，各向异性湿蚀刻

    公开(公告)号：US20160133517A1

    公开(公告)日：2016-05-12

    申请号：US14933958

    申请日：2015-11-05

    Applicant: International Business Machines Corporation

    Inventor： Emmanuel Delamarche ,  Bilge Eker ,  Yuksel Temiz

    IPC: H01L21/768 ,  H01L21/56 ,  H01L21/306 ,  H01L29/04 ,  H01L23/31 ,  H01L29/16 ,  H01L21/311 ,  H01L23/538

    CPC classification number: H01L29/045 ,  B01L3/502707 ,  B01L2300/0816 ,  B01L2300/0874 ,  B01L2300/0887 ,  B81B2201/051 ,  B81B2203/0338 ,  B81B2203/0353 ,  B81C1/00087 ,  B81C2201/0133 ,  F16K99/0001 ,  F16K2099/0074 ,  H01L29/04 ,  H01L29/16

    Abstract: The present invention is notably directed to a method of fabrication of a microfluidic chip (1). comprising: providing (S10-S20) a wafer (10, 12) of semiconductor material having a diamond cubic crystal structure, exhibiting two opposite main surfaces (S1, S2), one on each side of the wafer, and having, each, a normal in the or direction; and performing (S30) self-limited, anisotropic wet etching steps on each of the two main surfaces on each side of the wafer, to create a via (20, 20a) extending transversely through the thickness of the wafer, at a location such that the resulting via connects an in-plane microchannel (31) on a first one (51) of the two main surfaces to a second one (S2) of the two main surfaces, the via exhibiting slanted sidewalls (20s) as a result of the self-limited wet etching. The invention further concerns microfluidic chips accordingly obtained.

    Abstract translation: 本发明特别涉及一种微流控芯片（1）的制造方法。 包括：提供（S10-S20）具有菱形立方晶体结构的半导体材料的晶片（10,12），具有两个相对的主表面（S1，S2），每个晶片的每一侧上具有一个 在<100>或<110>方向正常; 并且在晶片的每一侧上的两个主表面中的每一个上执行（S30）自限制的各向异性湿蚀刻步骤，以形成横向延伸穿过晶片的厚度的通路（20,20a），位于使得 所得到的通孔将两个主表面中的第一个（51）上的平面内微通道（31）连接到两个主表面的第二个（S2），由于这些主表面的结果，通孔呈现倾斜的侧壁（20s） 自限湿法蚀刻。 本发明还涉及由此获得的微流控芯片。

    Microfluidic device
    115.
    发明授权
    Microfluidic device 有权
    微流控装置

    公开(公告)号：US09205396B2

    公开(公告)日：2015-12-08

    申请号：US13131356

    申请日：2009-11-26

    Applicant: Susumu Arai

    Inventor： Susumu Arai

    IPC: B01L3/00 ,  B81B1/00 ,  B01F5/06 ,  B01J19/00 ,  B01F13/00 ,  B01F15/02

    CPC classification number: B01J19/0093 ,  B01F5/0646 ,  B01F5/0647 ,  B01F13/0059 ,  B01F15/0203 ,  B01F15/0234 ,  B01J2219/0086 ,  B01J2219/00907 ,  B01J2219/00984 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502776 ,  B01L2200/0636 ,  B01L2200/10 ,  B01L2300/0867 ,  B01L2300/0874 ,  B01L2300/0883 ,  B01L2300/161 ,  B01L2400/0406 ,  B01L2400/0457 ,  B81B1/00 ,  B81B2201/051 ,  Y10T137/0318

    Abstract: The present invention is to provide a microfluidic device capable of allowing a fluid to stably flow in a microchannel without using an external source such as a pump or a suction device, and the microfluidic device, provided with a microchannel to which a sample liquid is transported, includes: an inlet reservoir which reserves a sample liquid to be introduced into said microchannel; an inlet which is provided on a sample-introduced side of the microchannel, and communicates with the inlet reservoir; an outlet provided on a sample-discharged side of the microchannel; and an open channel which is provided as communicating with the outlet, and part of at least one surface of which is opened to the outside atmosphere, wherein the inlet is provided at a higher position in a gravity direction than the outlet.

    Abstract translation: 本发明提供一种微流体装置，其能够允许流体在微通道内稳定地流动而不使用诸如泵或抽吸装置的外部源，以及微流体装置，其设置有运送样品液体的微通道 包括：入口储存器，其保留待引入所述微通道的样品液体; 入口，设置在所述微通道的样品导入侧，并与所述入口容器连通; 设置在微通道的样品排出侧的出口; 以及开口通道，其设置为与所述出口连通，并且其至少一个表面的一部分向外部大气开放，其中所述入口设置在比所述出口在重力方向更高的位置。

    MICRO-DEVICE ON GLASS
    119.
    发明申请
    MICRO-DEVICE ON GLASS 有权
    玻璃上的MICRO-DEVICE

    公开(公告)号：US20140054261A1

    公开(公告)日：2014-02-27

    申请号：US14040698

    申请日：2013-09-29

    Applicant: Viswanadam Gautham

    Inventor： Viswanadam Gautham

    IPC: B81C1/00

    CPC classification number: B81C1/00341 ,  B81B2201/051 ,  B81B2203/0315 ,  B81B2203/0338 ,  B81C1/00476 ,  B81C2201/0107 ,  B81C2203/036 ,  H01L21/00

    Abstract: A method of fabricating a micro-device having micro-features on glass is presented. The method includes the steps of preparing a first glass substrate, fabricating a metallic pattern on the first glass substrate, preparing a second glass substrate and providing one or more apertures on the second glass substrate, heating the first glass substrate and the second glass substrate with a controlled temperature raise, bonding the first glass substrate and the second glass substrate by applying pressure to form a bonded substrate, wherein the metallic pattern is embedded within the bonded substrate, cooling the bonded substrate with a controlled temperature drop and thereafter maintaining the bonded substrate at a temperature suitable for etching, etching the metallic pattern within the bonded substrate, wherein an etchant has access to the metallic pattern via the apertures, forming a void within the bonded substrate, wherein the void comprises micro-features.

    Abstract translation: 提出了一种在玻璃上制造具有微特征的微器件的方法。 该方法包括以下步骤：制备第一玻璃基板，在第一玻璃基板上制造金属图案，制备第二玻璃基板并在第二玻璃基板上提供一个或多个孔，加热第一玻璃基板和第二玻璃基板， 控制温度升高，通过施加压力来接合第一玻璃基板和第二玻璃基板以形成接合基板，其中金属图案嵌入在接合基板内，以受控的温度下降冷却接合基板，然后保持接合基板 在适于蚀刻的温度下蚀刻所述键合衬底内的所述金属图案，其中所述蚀刻剂经由所述孔进入所述金属图案，在所述键合衬底内形成空隙，其中所述空隙包括微特征。

    MICROFLUIDIC COMPONENT, REACTOR COMPRISING A PLURALITY OF SUCH COMPONENTS, AND METHOD FOR PRODUCING SAME
    120.
    发明申请
    MICROFLUIDIC COMPONENT, REACTOR COMPRISING A PLURALITY OF SUCH COMPONENTS, AND METHOD FOR PRODUCING SAME 审中-公开
    微流控组件，包含这些组分的多样性的反应器及其生产方法

    公开(公告)号：US20130255822A1

    公开(公告)日：2013-10-03

    申请号：US13992938

    申请日：2011-12-14

    Applicant: Martin Wichert ,  Silvio Kraus

    Inventor： Martin Wichert ,  Silvio Kraus

    IPC: F16L9/02

    CPC classification number: F16L9/02 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00806 ,  B01J2219/00822 ,  B01J2219/00835 ,  B01J2219/00855 ,  B01J2219/0086 ,  B01J2219/00869 ,  B01J2219/00873 ,  B01J2219/00889 ,  B01J2219/00898 ,  B81B2201/051 ,  B81C1/00119 ,  F28D9/0037 ,  F28F3/046 ,  F28F2260/00

    Abstract: A microfluidic component made of a metal sheet having a structure which includes a closed fluid line and which is formed of a structured surface of a first section of the metal sheet and an adjoining structured or unstructured surface of a second section of the metal sheet, wherein the metal sheet is folded such that the sections integrally connected to each other are located on top of each other in a surface-parallel manner. The metal sheet further includes at least one third section having a contoured edge and is moreover folded such that the third section is also supported in a surface-parallel manner and the contoured edge forms a first wall section and the adjoining structured or unstructured surface of the first or second section forms a second wall section of an open fluid line. A microfluidic reactor comprising a plurality of such microfluidic components and a method for producing such components.

    Abstract translation: 由金属片制成的微流体部件，其具有包括封闭流体管线的结构，并且由金属片材的第一部分的结构化表面和金属片材的第二部分的相邻的结构化或非结构化表面形成，其中 金属片被折叠成使得彼此一体地连接的部分以表面平行的方式位于彼此的顶部。 金属片还包括具有轮廓边缘的至少一个第三部分，并且还被折叠，使得第三部分也以表面平行的方式支撑，并且成形边缘形成第一壁部分，并且邻接的结构化或非结构化的表面 第一或第二部分形成开放流体管线的第二壁部分。 包含多个这种微流体组分的微流体反应器和用于生产这些组分的方法。

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