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    OPTICAL FIBER, IN PARTICULAR A LASER FIBER CONTAINING A DOPED GLASS FIBER CORE AND CLADDING AROUND THE FIBERGLASS CORE
    111.
    发明申请
    OPTICAL FIBER, IN PARTICULAR A LASER FIBER CONTAINING A DOPED GLASS FIBER CORE AND CLADDING AROUND THE FIBERGLASS CORE 有权
    光纤，特别是包含玻璃纤维核心的激光光纤和光纤核心附近的光纤

    公开(公告)号：US20120063733A1

    公开(公告)日：2012-03-15

    申请号：US13320440

    申请日：2010-06-09

    Applicant: Wolfgang Hämmerle ,  Lothar Brehm ,  Matthias Auth ,  Elke Poppotz

    Inventor： Wolfgang Hämmerle ,  Lothar Brehm ,  Matthias Auth ,  Elke Poppotz

    IPC: G02B6/02 ,  C03C17/02

    CPC classification number: C03B37/01861 ,  C03B37/01838 ,  C03B37/01869 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/28 ,  C03B2201/36 ,  C03B2201/40 ,  G02B6/03633 ,  G02B6/03638 ,  G02B6/03694 ,  H01S3/06708

    Abstract: The invention relates to an optical fiber, in particular a laser fiber, containing a doped glass fiber core (1) and cladding (2) around the latter with a refraction index profile which decreases outwards from the fiber core. The optical fiber is distinguished by at least one intermediate layer (3, 4, 5) being disposed between the glass fiber core and the cladding to reduce the mechanical tension therebetween. In one advantageous embodiment, the intermediate layer is doped in such a way as to ensure a stepped mechanical tension distribution between the glass fiber core and the cladding, and is co-doped in such a way as to reduce the refractive index and counteract the refraction index-increasing effect of the intermediate layer doping. The invention further relates to an application of at least one doped barrier layer to a core region during preparation of the preform to avoid diffusion of special core dopants from the core during the collapse process, and to allow the diffusion of special dopants between the barrier layer and the core layer.

    Abstract translation: 本发明涉及一种光纤，特别是激光光纤，其中包含掺杂的玻璃纤维芯（1）和包层（2），后者具有从光纤芯向外减小的折射率分布。 光纤的特征在于至少一个中间层（3,4,5）设置在玻璃纤维芯和包层之间以减小它们之间的机械张力。 在一个有利的实施例中，中间层以这样的方式被掺杂，以确保玻璃纤维芯和包层之间的阶梯式机械张力分布，并且以减少折射率并抵消折射的方式共掺杂 指数增加效应的中间层掺杂。 本发明还涉及在制备预制棒期间将至少一个掺杂的阻挡层应用于核心区域，以避免在塌陷过程中特殊的核掺杂剂从核心扩散，并且允许特殊掺杂剂在阻挡层 和核心层。

    QUARTZ GLASS MEMBER FOR PLASMA ETCHING
    112.
    发明申请
    QUARTZ GLASS MEMBER FOR PLASMA ETCHING 审中-公开
    用于等离子体蚀刻的QUARTZ玻璃成员

    公开(公告)号：US20110232847A1

    公开(公告)日：2011-09-29

    申请号：US12671903

    申请日：2008-07-24

    Applicant: Tatsuhiro Sato ,  Kyoichi Inaki

    Inventor： Tatsuhiro Sato ,  Kyoichi Inaki

    IPC: H01L21/683 ,  C23F1/08

    CPC classification number: C03B19/01 ,  C03B2201/30 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/40 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/36 ,  H01L21/67069 ,  H01L21/68757 ,  Y02P40/57

    Abstract: Provided is a doped quartz glass member for plasma etching, which is used in a plasma etching process and is free from any problematic fluoride accumulation during use. The quartz glass member for plasma etching is used as a jig for semiconductor production in a plasma etching process, and includes at least two or more kinds of metal elements in a total amount of 0.01 wt % or more to less than 0.1 wt %, in which the metal elements are formed of at least one kind of a first metal element selected from metal elements belonging to Group 3B of the periodic table and at least one kind of a second metal element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids.

    Abstract translation: 提供了用于等离子体蚀刻的掺杂石英玻璃构件，其用于等离子体蚀刻工艺中，并且在使用期间没有任何有问题的氟化物积聚。 用于等离子体蚀刻的石英玻璃构件用作等离子体蚀刻工艺中的半导体制造的夹具，并且包括总量为0.01重量％以上至小于0.1重量％的至少两种以上的金属元素， 金属元素由选自属于周期表第3B族的金属元素中的至少一种第一金属元素和选自Mg，Ca，Sr等的至少一种第二金属元素形成， Ba，Sc，Y，Ti，Zr，Hf，镧系元素和锕系元素。

    Method for manufacturing GRIN lens
    113.
    发明授权
    Method for manufacturing GRIN lens 有权
    制作GRIN镜片的方法

    公开(公告)号：US07921672B2

    公开(公告)日：2011-04-12

    申请号：US10569280

    申请日：2005-04-12

    Applicant: Hiroyoshi Matsumura ,  Taro Suzuki ,  Toru Achiwa

    Inventor： Hiroyoshi Matsumura ,  Taro Suzuki ,  Toru Achiwa

    IPC: C03B8/00

    CPC classification number: G02B3/0087 ,  C03B19/12 ,  C03B23/047 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2203/26

    Abstract: A method for manufacturing a GRIN lens includes the steps of forming a wet gel provided with a concentration distribution having a different concentration of a refractive index distribution imparting metal that differs in concentration in a radial direction, drying the wet gel to form a dry gel having a bulk specific gravity ρ (g/cm3), sintering the dry gel to form a GRIN lens base material and stretching the GRIN lens base material while heating. The method is characterized in that, in the step of sintering the dry gel, partial pressures of oxygen during sintering at 800° C. or higher are 10−1 Pa or lower and also the relation between a rate of temperature increase v (° C./hr) and a bulk density ρ of the dry gel during sintering at 1,000 to 1,150° C. is defined by v≦105*EXP (−12ρ). As a result of this, the GRIN lens, which has a large numerical aperture and a small diameter, can stably and easily be manufactured.

    Abstract translation: 制造GRIN透镜的方法包括以下步骤：形成具有浓度分布的湿凝胶，所述浓缩分布具有不同浓度的在径向上浓度不同的折射率分布赋予金属，干燥湿凝胶以形成具有 体积比重 （g / cm3），烧结干凝胶以形成GRIN透镜基材并在加热时拉伸GRIN透镜基材。 该方法的特征在于，在烧结干凝胶的步骤中，800℃以上的烧结时的氧分压为10〜1Pa以下，温度升高之间的关系v（℃ ./hr）和堆积密度 在1000至1150℃的烧结期间的干凝胶由v＆nlE; 105 * EXP（-12）定义。 作为其结果，可以稳定且容易地制造具有大数值孔径和小直径的GRIN透镜。

    Method for manufacturing grin lens and grin lens
    116.
    发明申请
    Method for manufacturing grin lens and grin lens 有权
    制造咧嘴透镜和笑脸镜片的方法

    公开(公告)号：US20070160854A1

    公开(公告)日：2007-07-12

    申请号：US10569280

    申请日：2005-04-12

    Applicant: Hiroyoshi Matsumura ,  Taro Suzuki ,  Toru Achiwa

    Inventor： Hiroyoshi Matsumura ,  Taro Suzuki ,  Toru Achiwa

    IPC: C03B8/00 ,  B32B17/06 ,  B32B9/00

    CPC classification number: G02B3/0087 ,  C03B19/12 ,  C03B23/047 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2203/26

    Abstract: A method for manufacturing a GRIN lens includes the steps of forming a wet gel provided with a concentration distribution having a different concentration of a refractive index distribution imparting metal that differs in concentration in a radial direction, drying the wet gel to form a dry gel having a bulk specific gravity ρ (g/cm3), sintering the dry gel to form a GRIN lens base material and stretching the GRIN lens base material while heating. The method is characterized in that, in the step of sintering the dry gel, partial pressures of oxygen during sintering at 800° C. or higher are 10−1 Pa or lower and also the relation between a rate of temperature increase ν (° C./hr) and a bulk density ρ of the dry gel during sintering at 1,000 to 1,150° C. is defined by ν≦105*EXP (−12ρ). As a result of this, the GRIN lens, which has a large numerical aperture and a small diameter, can stably and easily be manufactured.

    Abstract translation: 制造GRIN透镜的方法包括以下步骤：形成具有浓度分布的湿凝胶，所述浓缩分布具有不同浓度的在径向上浓度不同的折射率分布赋予金属，干燥湿凝胶以形成具有 堆积比重rho（g / cm 3），烧结干凝胶以形成GRIN透镜基材并在加热时拉伸GRIN透镜基材。 该方法的特征在于，在烧结干凝胶的步骤中，800℃以上的烧结时的氧分压为10〜PaPa以下， 的温度上升nu（℃/小时），在1000至1150℃的烧结期间的干凝胶的体积密度rho由nu <10×5×EXP（-12rho） 。 作为其结果，可以稳定且容易地制造具有大数值孔径和小直径的GRIN透镜。

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