Abstract:
A system and method for detecting an endpoint during a chemical mechanical polishing process is disclosed that includes illuminating a first portion of a surface of a wafer (300) with a first broad beam of light (132). A first reflected spectrum data is received. The first reflected spectrum of data (308) corresponds to a first spectra of light reflected from the first illuminated portion of the surface of the wafer. The second reflected spectrum of data corresponds to a second spectra of light reflected from the second illuminated portion of the surface of the wafer. Endpoint is determined based on a difference between the normalized first spectrum data and the normalized second spectrum data.
Abstract:
A method and apparatus for measuring spectral information of light from at least one object (15); said apparatus comprising at least one light detecting means (34); and at least one transparent body (31) having a front side (F) including: an entrance surface (311) having positioned in or near thereof an entrance aperture means (30), and at least one reflecting surface (312); and said transparent body further having a back side (B) including: at least one reflecting surface (313) for reflecting light received from said entrance aperture means, and an exit surface (314); said detecting means being positioned in or near said exit surface; said first reflecting surface, said second reflecting surface, or both, having at least one diffractive optical element (32) and/or at least one focusing means (33). Such apparatus comprising more spectral channels, and such apparatus comprising distance sensing means.
Abstract:
Es wird ein differentieller Meßkopf für photoakustische Messungen zur Verfügung gestellt, der zwei oder mehrere Meßzellen enthält und wobei intensitätsmoduliertes Licht gleicher Wellenlängen in jeweils zwei benachbarten Meßzellen eingestrahlt wird. Die Vorteile der Erfindung liegen in einer höheren Empfindlichkeit für die zu messende Größe bei gleichzeitiger Immunität gegen Störungen von außen, in der Festellung und Kompensation von Inhomogenitäten in der Probenoberfläche z.B. in der Haut des Menschen und in einem vergrößerten Dynamikbereich.
Abstract:
An apparatus (100) for estimating bio-information, includes: a sensor (110) configured to detect at least one first light signal and at least one second light signal, each of the at least one first light signal having a first light path from an object and each of the at least one second light signal having a second light path from the object that is different from the first light path; and a processor (120) configured to: obtain a first absorbance based on the at least one first light signal, obtain a second absorbance based on the at least one second light signal, and estimate bio-information based on a difference between the first absorbance and the second absorbance.
Abstract:
The quality inspection method for inspecting a horticultural product comprises the following steps: -providing optical reconstruction means including multispectral illuminating means (2) and multispectral sensor means (3); -gathering loose units (6) of said horticultural product in a container (5); -illuminating with the multispectral illuminating means (2) the mass of product present in the container (5) by emitting a sequence of light radiations with different bandwidths; -capturing multispectral (3) images (10', 10") of the product mass present in the container (5) illuminated in this way; - identifying multispectral images (11, 11', 11") of individual units (6) of product by processing the multispectral images (10, 10', 10") of the product mass present in the container (5); - classifying individual (6) bulk units with quality indices associated with the spectrum of their multispectral images (11, 11', 11") thus identified; where the process of identifying the multispectral images (11, 11', 11") of the individual units (6) of product bulk is carried out by means of an artificial neural network trained to segment the images (10, 10', 10") of the product bulk in the container (5).
Abstract:
Embodiments of the present invention disclose an ambient light acquisition method, an ambient light analysis method and corresponding devices. An acquired ambient light parameter is sent to the ambient light analysis device through a wired communication route, so that transmission stability of the ambient light parameter can be guaranteed regardless of a surrounding electromagnetic environment; and meanwhile, a cost of the wired communication route is low, and a production cost of relevant devices can be reduced.
Abstract:
An optical analysis tool includes an integrated computational element (ICE). The ICE includes a first hollow-core fiber. The first hollow-core fiber has a structure configured such that a spectrum of light guided by the first hollow-core fiber is related, over a wavelength range, to a characteristic of the sample.
Abstract:
An optical analysis tool includes an integrated computational element (ICE). The ICE includes a plurality of layers stacked along a first axis. Constitutive materials of the layers are electrically conductive and patterned with corresponding patterns. An arrangement of the patterns with respect to each other is related to a characteristic of a sample.
Abstract:
A system includes a computational system to receive a design of an integrated computational element (ICE) including specification of a substrate and a plurality of layers, their respective target thicknesses and complex indices, such that a notional ICE fabricated based on the ICE design is related to a characteristic of a sample. Additionally, the system includes a deposition chamber including a deposition source to provide a deposition plume having a plume spatial profile, and a support to support a plurality of instances of the substrate during fabrication of a plurality of instances of the ICE. The support is spaced apart from the deposition source and has a shape that corresponds to the plume spatial profile, such that when the supported instances of the substrate are distributed over the support, thicknesses of instances of each of the deposited layers are substantially uniform across the plurality of instances of the ICE.