SYSTEM AND METHOD OF BROAD BAND OPTICAL END POINT DETECTION FOR FILM CHANGE INDICATION
    111.
    发明公开
    SYSTEM AND METHOD OF BROAD BAND OPTICAL END POINT DETECTION FOR FILM CHANGE INDICATION 审中-公开
    系统和方法宽带光终点检测电影更改显示

    公开(公告)号:EP1490898A2

    公开(公告)日:2004-12-29

    申请号:EP03716897.8

    申请日:2003-03-26

    Abstract: A system and method for detecting an endpoint during a chemical mechanical polishing process is disclosed that includes illuminating a first portion of a surface of a wafer (300) with a first broad beam of light (132). A first reflected spectrum data is received. The first reflected spectrum of data (308) corresponds to a first spectra of light reflected from the first illuminated portion of the surface of the wafer. The second reflected spectrum of data corresponds to a second spectra of light reflected from the second illuminated portion of the surface of the wafer. Endpoint is determined based on a difference between the normalized first spectrum data and the normalized second spectrum data.

    SPECTROMETER
    112.
    发明公开
    SPECTROMETER 有权
    光谱仪

    公开(公告)号:EP1144965A1

    公开(公告)日:2001-10-17

    申请号:EP00900491.2

    申请日:2000-01-07

    Abstract: A method and apparatus for measuring spectral information of light from at least one object (15); said apparatus comprising at least one light detecting means (34); and at least one transparent body (31) having a front side (F) including: an entrance surface (311) having positioned in or near thereof an entrance aperture means (30), and at least one reflecting surface (312); and said transparent body further having a back side (B) including: at least one reflecting surface (313) for reflecting light received from said entrance aperture means, and an exit surface (314); said detecting means being positioned in or near said exit surface; said first reflecting surface, said second reflecting surface, or both, having at least one diffractive optical element (32) and/or at least one focusing means (33). Such apparatus comprising more spectral channels, and such apparatus comprising distance sensing means.

    QUALITY INSPECTION METHOD FOR INSPECTING A HORTICULTURAL PRODUCT

    公开(公告)号:EP4390374A1

    公开(公告)日:2024-06-26

    申请号:EP23189120.1

    申请日:2023-08-02

    Abstract: The quality inspection method for inspecting a horticultural product comprises the following steps:
    -providing optical reconstruction means including multispectral illuminating means (2) and multispectral sensor means (3);
    -gathering loose units (6) of said horticultural product in a container (5);
    -illuminating with the multispectral illuminating means (2) the mass of product present in the container (5) by emitting a sequence of light radiations with different bandwidths;
    -capturing multispectral (3) images (10', 10") of the product mass present in the container (5) illuminated in this way;
    - identifying multispectral images (11, 11', 11") of individual units (6) of product by processing the multispectral images (10, 10', 10") of the product mass present in the container (5);
    - classifying individual (6) bulk units with quality indices associated with the spectrum of their multispectral images (11, 11', 11") thus identified;
    where the process of identifying the multispectral images (11, 11', 11") of the individual units (6) of product bulk is carried out by means of an artificial neural network trained to segment the images (10, 10', 10") of the product bulk in the container (5).

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