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    SPECTROSCOPIC ANALYZING DEVICE AND SPECTROSCOPIC ANALYZING METHOD
    113.
    发明公开
    SPECTROSCOPIC ANALYZING DEVICE AND SPECTROSCOPIC ANALYZING METHOD 有权
    VORRICHTUNG UND VERFAHREN ZUR SPEKTROSKOPISCHEN ANALYZE

    公开(公告)号：EP2112498A1

    公开(公告)日：2009-10-28

    申请号：EP07859657.4

    申请日：2007-12-21

    Applicant: Tokyo Institute of Technology

    Inventor： HASEGAWA, Takeshi

    IPC: G01N21/21 ,  G01J3/447

    CPC classification number: G01N21/21 ,  G01J3/447 ,  G01N21/31 ,  G01N21/8422

    Abstract: A spectrometric analyzing device is capable of analyzing a thin film with high accuracy by using light having an arbitrary wavelength, such as not only infrared light but also visible light, ultraviolet light and X-ray, and using whatever refractive index of a supporting member of the thin film. A spectrometric analyzing device comprises a light source (1), a polarizing filter (2), a detection unit (3), a regression operation unit (4) and an absorbance spectrum calculation unit (5). The light source (1) emits light at n different angles of incidence (θ n ) to a measurement portion. The polarizing filter (2) shields an s-polarized component. The detection unit (3) detects transmitted spectra (S). The regression operation unit (4) uses the transmitted spectra (S) and a mixing ratio (R) to obtain an in-plane mode spectrum (s ip ) and an out-of-plane mode spectrum (s op ) through a regression analysis. The absorbance spectrum calculation unit (5) calculates an in-plane mode absorbance spectrum (A ip ) and an out-of-plane mode absorbance spectrum (A op ) of the thin film, based on the results from a state in which the thin film is on the supporting member and a state in which no thin film is on the supporting member.

    Abstract translation: 光谱分析装置能够通过使用具有任意波长的光，例如不仅具有红外光，还包括可见光，紫外线和X射线，并且使用任何波长的支撑构件的折射率，能够高精度地分析薄膜 薄膜。 光谱分析装置包括光源（1），偏振滤光器（2），检测单元（3），回归运算单元（4）和吸收光谱计算单元（5）。 光源（1）将n个不同入射角（¸n）的光发射到测量部分。 偏振滤光器（2）屏蔽s偏振分量。 检测单元（3）检测发射光谱（S）。 回归运算单元（4）使用透射光谱（S）和混合比（R）通过回归分析获得平面内模式谱（s ip）和平面外模式谱（s op） 。 吸收光谱计算单元（5）根据薄膜状态的结果，计算出薄膜的面内模式吸收光谱（A ip）和平面外模式吸收光谱（A op） 膜处于支撑构件上，并且在支撑构件上没有薄膜的状态。

    OPTICAL SPECTRUM ANALYZER
    117.
    发明公开
    OPTICAL SPECTRUM ANALYZER 有权
    光谱分析仪

    公开(公告)号：EP1252489A2

    公开(公告)日：2002-10-30

    申请号：EP01900347.4

    申请日：2001-01-04

    Applicant: EXFO ELECTRO-OPTICAL ENGINEERING INC.

    Inventor： HE, Gang ,  GARIEPY, Daniel ,  SCHINN, Gregory, Walter

    IPC: G01J3/12 ,  G01J4/02 ,  G01J3/447

    CPC classification number: G01J3/12 ,  G01J3/447 ,  G01J4/02

    Abstract: An optical spectrum analyzer comprises a diffraction grating (DG), a polarization decomposing unit (PDM) for decomposing the input light beam into first and second light beams having mutually-perpendicular linear states of polarization, and two output ports (FP2/1, FP2/2) each for receiving from the grating, substantially exclusively, a respective one of the polarized light beams (LT, LR) after diffraction by the diffraction grating (DG). Each of the linearly-polarized light beams is directed onto the diffraction grating with its linear state of polarization at any prescribed angle to a corresponding plane of diffraction of the diffraction grating. The arrangement is such that the state of polarization of the light beams, at any particular wavelength within an operating band of the analyzer remains substantially unchanged with respect to time. The analyzer also may have a reflector (RAM) for reflecting the light beams leaving the diffraction grating after diffraction a first time so as to return them to the diffraction grating for diffraction a second time.

    Polarisation monitoring methods and apparatus
    119.
    发明公开
    Polarisation monitoring methods and apparatus 失效
    Verfahren und Vorrichtung zur Messung der Polarization

    公开(公告)号：EP0737856A3

    公开(公告)日：1999-03-10

    申请号：EP96301670.4

    申请日：1996-03-12

    Applicant: J.A. WOOLLAM CO. INC.

    Inventor： Green, Steven E. ,  Woollam, John A. ,  Herzinger, Craig M. ,  Ducharme, Stephen P. ,  Johs, Blaine D.

    IPC: G01N21/21 ,  G01J3/447

    CPC classification number: G01J4/00 ,  G01J3/447 ,  G01N21/211

    Abstract: A system and method for controlling polarisation state determining parameters of a polarised beam of light in an ellipsometer or polarimeter and the like system, so that they are in ranges wherein the sensitivity, of a sample system characterising PSI and DELTA value monitoring detector (DET) used to measure changes in said polarisation state resulting from interaction with a "composite sample system," comprised of a sample system per se. (SS) and a beam polarisation state determining variable retarder, to noise and measurement errors etc. therein), is reduced. This allows determining sample system per se.
    characterising PSI and DELTA values, from Composite Sample System characterising PSI and DELTA values, by compensating for the presence of components, (VR1) and/or (VR2), added to an ellipsometer or polarimeter and the like system. The arrangement also improves the ability of an ellipsometer or polarimeter and the like system fitted with components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterising PSI and DELTA determining data values, wherein a sample system per se. investigating polarised beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. The arrangement also allows determination of the "Handedness" of a polarised beam of light, and of sample system Jones or Mueller Matrix component values; and provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter and the like system.

    Abstract translation: 用于控制椭偏仪或偏振计等偏振光束的偏振态确定参数的系统和方法，使得它们处于表征PSI和DELTA值监视检测器（DET）的样本系统的灵敏度的范围内， 用于测量由与样品系统本身组成的“复合样品系统”的相互作用产生的所述极化状态的变化。 （SS）和光束偏振状态确定可变延迟器，其中的噪声和测量误差等）降低。 这允许确定样品系统本身。 通过补偿添加到椭偏仪或偏振计等的组件（VR1）和/或（VR2）的存在来表征PSI和DELTA值的复合样品系统的PSI和DELTA值的表征。 该装置还提高了配有组件（VR1）和/或（VR2）的椭偏仪或偏振计等的系统能够提供表征PSI和DELTA确定数据值的可用的精确和精确的采样系统的能力，其中采样系统本身。 调查偏振光束的方向是除了Principal或Brewster入射角之外，否则使用哪个角度的发生角度将是困难的，甚至是不可能的。 该布置还允许确定偏振光束和样本系统Jones或Mueller Matrix分量值的“Handedness”; 并且提供用于将系统组件（VR1）和/或（VR2）添加到椭偏仪或偏振计等的系统，基本上终端用户在需要时是透明的，而不从所述椭偏仪或偏振计等偏移仪中去除。

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