公开(公告)号：WO2009105506A1

公开(公告)日：2009-08-27

申请号：PCT/US2009/034460

申请日：2009-02-19

Applicant: BROOKS AUTOMATION, INC. ,  BRUCKER, Gerardo, A.

Inventor： BRUCKER, Gerardo, A.

IPC: G01L21/32 ,  G01L21/34 ,  G01N27/62 ,  H01J37/05 ,  H01J41/04

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

公开(公告)号：WO2008129929A1

公开(公告)日：2008-10-30

申请号：PCT/JP2008/056591

申请日：2008-04-02

Applicant: 株式会社堀場エステック ,  青木 潤次 ,  北浦 宏和 ,  サイード ブームセレク

Inventor： 青木 潤次 ,  北浦 宏和 ,  サイード ブームセレク

IPC: G01N27/62

CPC classification number: H01J49/0009 ,  G01L21/30 ,  H01J41/02 ,  H01J41/10 ,  H01J49/0027

Abstract: 　試料ガスをイオン化するイオン化部２１１と、前記イオン化部２１１からの距離が互いに異なるように、前記イオン化部２１１を挟んで設けられ、前記イオン化部２１１からのイオンを検出する第１イオン検出部２１２及び第２イオン検出部２１３と、前記イオン化部２１１及び前記第１イオン検出部２１２の間に設けられ、前記イオン化部２１１からのイオンを選択的に通過させるフィルタ部２１４と、前記第１イオン検出部２１２により得られる試料ガスの第１の全圧ＴＰ １ 、及び前記第２イオン検出部２１３により得られる試料ガスの第２の全圧ＴＰ ２ を用いて、前記第１イオン検出部２１２により得られる前記フィルタ極部２１４により選択された特定成分の分圧ＰＰ １ を補正する演算装置３と、を備え、四重極質量分析法等を用いたガス分析計において、分解能を維持しながら、測定値が雰囲気圧力の変化に追従しなくなった領域においても補正可能にする。

Abstract translation: 使用四极质谱法的气体分析装置设置有离子化部分（211），其离子化气体样品，第一离子检测部分（212）和第二离子检测部分（213），它们跨越电离部分 （211），用于将它们中的每一个与离子化部分（211）之间的距离彼此区分开，并且从电离部分（211）检测离子;滤波器部分（214），设置在电离部分（211）和第一 离子检测部（212），用于选择性地过滤来自离子化部分（211）的离子;以及运算单元（3），其校正由第一部分（211）获得的特定成分的分压（PP＆lt; 1＆gt; 离子检测部件（212），并且通过使用由第一离子检测部件（212）获得的气体样品的第一总压力（TP <1> 1）和由过滤器部件（214）选择的第一总压力 由第二离子检测部（213）获得的气体样品的第二总压（TP <2> 2 ）。 即使在保持分辨率的情况下测量值不再跟随大气压力的变化的区域，气体分析仪也可以校正分压。

公开(公告)号：WO2008043201A1

公开(公告)日：2008-04-17

申请号：PCT/CN2006/002609

申请日：2006-10-08

Applicant: 华瑞科学仪器 ,  钱永彪 ,  苏爱民 ,  刘晓军 ,  奚庆中

Inventor： 钱永彪 ,  苏爱民 ,  刘晓军 ,  奚庆中

IPC: G01N27/66

CPC classification number: G01N27/66 ,  H01J41/02

Abstract: A photo-ionization detector for detecting gas concentration and method thereof. Said detector includes a first bias electrode and a first measurement electrode. The first bias electrode is connected with a first bias circuit for absorbing one type of charge ion. The first measurement electrode is connected with a measurement circuit for absorbing one type of reverse charge ion. The constituent of inert gases in said ultraviolet lamp, the material of optical window and the material of low potential electrode, which is the material of said first measurement electrode or said first bias electrode, are selected that the ultraviolet light created by the ultraviolet lamp and transmitted through said optical window incident upon the surface of said low potential electrode can create the photoelectric effect and that said driver electrodes can apply an high voltage AC signal on said ultraviolet lamp, which is high enough so that the number of discharged electrons overflow from the surface of said low potential electrode are enough to neutralize the positive ions, which are deposited near the three-dimensional space range of said low potential electrode, so that the saturated phenomenon of concentration measurement caused by the deposition of positive ions can be eliminated.

公开(公告)号：WO2006012777A1

公开(公告)日：2006-02-09

申请号：PCT/CN2004/000905

申请日：2004-08-06

IPC: G01N27/66

CPC classification number: G01N27/66 ,  H01J41/02

Abstract: The invention provides an integrated photoionization sensor (10), which includes not only an ionization chamber (36), an ultraviolet (UV) lamp (32), driving electrodes (40, 42), and an ionization detector (48), but also general circuits, such as a lamp driving circuit (44) and a bias circuit (54). Said photoionization sensor of present invention includes a support element (230), which separates the space within a sensor housing into two parts. Said ionization chamber (36), said ultraviolet (UV) lamp (32), said driving electrodes (40, 42), and said ionization detector (48) are disposed in one of the two parts, and the general circuits are integrated in a circuit board (95) disposed in the other part. The space where the circuit board (95) lies is filled with a sealing adhesive to avoid contacting with the outwards. The top cover of he sensor housing is provided with a single big hole or fence or net shape ventilating window, so the sensor (10) fits both for a gas pumping mode, and for a diffusion mode. In the case that the sensor (10) s not taken apart, Said ventilating window permits the optical window (34) of UV lamp (32) being leaned without using an air pump. Said circuit board is also integrated with a photosensor (20), so the UV lamp's working states can be known without dismounting the sensor (10).

公开(公告)号：EP2252869B1

公开(公告)日：2018-12-12

申请号：EP09713559.4

申请日：2009-02-19

Applicant: MKS Instruments, Inc.

Inventor： BRUCKER, Gerardo, A.

IPC: G01L21/32 ,  G01L21/34 ,  G01N27/62 ,  H01J37/05 ,  H01J41/04

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

公开(公告)号：EP2800960B1

公开(公告)日：2018-10-31

申请号：EP13746239.6

申请日：2013-02-07

Applicant: MKS Instruments, Inc.

Inventor： BRUCKER, Gerardo, A.

IPC: G01L19/06 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

公开(公告)号：EP2929340A2

公开(公告)日：2015-10-14

申请号：EP13853589.3

申请日：2013-11-12

Applicant: Northeastern University

Inventor： LI, Bo ,  HAO, Ji ,  JUNG, Hyun, Young ,  JUNG, Yung, Joon ,  KAR, Swastik

IPC: G01N27/70

CPC classification number: G01N27/70 ,  G01N27/62 ,  H01J41/02 ,  H01J47/02 ,  H01J49/025

Abstract: An ion detection device has a strip of carbon-based nanomaterial (CNM) film and a chamber enclosing the CNM film. A low bias voltage is applied at the ends of the CNM film strip, and ions present in the chamber are detected by a change in the magnitude of current flowing through the CNM film under the bias. Also provided are methods for fabricating the device, methods for measuring pressure of a gas, and methods for monitoring or quantifying an ionizing radiation using the device.

公开(公告)号：EP2326931A1

公开(公告)日：2011-06-01

申请号：EP09815009.7

申请日：2009-09-11

Applicant: Brooks Automation, Inc.

Inventor： CARMICHAEL, Larry, K. ,  WEBER, Jesse, A. ,  HENRY, John, H. ,  SCHOTT, Michael, N. ,  BRUCKER, Gerardo, A. ,  VAN ANTWERP, Kenneth, D.

IPC: G01L21/30

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01N27/60 ,  G01N27/62 ,  H01J41/02

Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.

Abstract translation: 测量压力的电离计具有发射电子的电子源和限定电离空间的阳极。 该量表还包括收集电极以收集由电子和气体之间的碰撞形成的离子并基于收集的离子测量压力。 电子源在依赖于压力的多个发射电平和除压力之外的第二参数之间的发射电流中动态变化。 根据存储在非易失性存储器中并由用户选择的参数，电离计还可以改变量表部件的各种操作参数。

公开(公告)号：EP2252869A1

公开(公告)日：2010-11-24

申请号：EP09713559.4

申请日：2009-02-19

Applicant: Brooks Automation, Inc.

Inventor： BRUCKER, Gerardo, A.

IPC: G01L21/32 ,  G01L21/34 ,  G01N27/62 ,  H01J37/05 ,  H01J41/04

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

公开(公告)号：EP2141494A1

公开(公告)日：2010-01-06

申请号：EP08739702.2

申请日：2008-04-02

Applicant: Horiba Stec, Co., Ltd.

Inventor： AOKI, Junji ,  KITAURA, Hirokazu ,  SAID, Boumsellek

IPC: G01N27/62

CPC classification number: H01J49/0009 ,  G01L21/30 ,  H01J41/02 ,  H01J41/10 ,  H01J49/0027

Abstract: A gas analyzer using a quadrupole mass spectrometric method etc. is provided with an ionizer 211 to ionize a sample gas, a first ion detector 212 and a second ion detector 213 each configured to detect a respective ion from ionizer 211, and each being disposed a respective distance from the ionizer 211 on an opposite side of the ionizer 211, the respective distances being different from each other, a filter 214 interposed between the ionizer 211 and the first ion detector 212 to selectively allow ions from the ionizer 211 to pass therethrough, and an arithmetic device 3 to correct a partial pressure PP 1 of a specific component obtained from the first ion detector 212 and selected by the filter 214 by using a first total pressure TP 1 of the sample gas obtained from the first ion detector 212 and a second total pressure TP 2 of the sample gas obtained from the second ion detector 213.

Abstract translation: 使用四极质量分析法等的气体分析仪设置有用于离子化样品气体的离子发生器211，第一离子检测器212和第二离子检测器213，第一离子检测器212和第二离子检测器213均被配置为检测来自离子发生器211的各个离子， 在离子发生器211的相对侧上的离子发生器211的相应距离，各个距离彼此不同;过滤器214，置于离子发生器211和第一离子检测器212之间以选择性地允许离子发生器211的离子通过， 以及运算装置3，其使用从第一离子检测器212获得的样本气体的第一总压力TP1和从第一离子检测器212获得的第二总和来校正从第一离子检测器212获得并由过滤器214选择的特定成分的分压PP1 从第二离子检测器213获得的样本气体的压力TP2。