公开(公告)号：US09285575B2

公开(公告)日：2016-03-15

申请号：US12690579

申请日：2010-01-20

Applicant: Xiaoliang Sunney Xie ,  Christian Freudiger ,  Wei Min

Inventor： Xiaoliang Sunney Xie ,  Christian Freudiger ,  Wei Min

IPC: G02B21/00 ,  G01J3/10 ,  G01J3/44 ,  G01N21/65 ,  G02B21/08 ,  G01J3/12

CPC classification number: G02B21/002 ,  G01J3/10 ,  G01J3/44 ,  G01J2003/1282 ,  G01N21/65 ,  G01N2021/653 ,  G01N2021/655 ,  G01N2201/0675 ,  G02B21/082

Abstract: A microscopy imaging system is disclosed that includes a light source system, a spectral shaper, a modulator system, an optics system, an optical detector and a processor. The light source system is for providing a first train of pulses and a second train of pulses. The spectral shaper is for spectrally modifying an optical property of at least some frequency components of the broadband range of frequency components such that the broadband range of frequency components is shaped producing a shaped first train of pulses to specifically probe a spectral feature of interest from a sample, and to reduce information from features that are not of interest from the sample. The modulator system is for modulating a property of at least one of the shaped first train of pulses and the second train of pulses at a modulation frequency. The optical detector is for detecting an integrated intensity of substantially all optical frequency components of a train of pulses of interest transmitted or reflected through the common focal volume. The processor is for detecting a modulation at the modulation frequency of the integrated intensity of substantially all of the optical frequency components of the train of pulses of interest due to the non-linear interaction of the shaped first train of pulses with the second train of pulses as modulated in the common focal volume, and for providing an output signal for a pixel of an image for the microscopy imaging system.

Abstract translation: 公开了一种显微镜成像系统，其包括光源系统，光谱整形器，调制器系统，光学系统，光学检测器和处理器。 光源系统用于提供第一脉冲串和第二脉冲串。 频谱整形器用于频谱修改频率分量的宽带范围的至少一些频率分量的光学特性，使得频率分量的宽带范围成形，产生成形的第一脉冲串，从而特别地探测来自 样本，并从样本中不感兴趣的特征中减少信息。 调制器系统用于以调制频率调制成形的第一脉冲序列和第二脉冲串中的至少一个的性质。 光学检测器用于检测通过公共焦点体积传输或反射的感兴趣的脉冲串的基本上所有的光学频率分量的积分强度。 处理器用于检测由于成形的第一脉冲序列与第二脉冲串的非线性相互作用而导致的感兴趣的脉冲串的基本上所有的光学频率分量的积分强度的调制频率的调制 在公共焦点体积中调制，并且为显微镜成像系统提供用于图像的像素的输出信号。

公开(公告)号：US20150177502A1

公开(公告)日：2015-06-25

申请号：US14580133

申请日：2014-12-22

Applicant: OLYMPUS CORPORATION

Inventor： Yasunari MATSUKAWA

IPC: G02B21/00 ,  G02F1/13 ,  G02F1/11 ,  G01N21/64 ,  G02F1/133

CPC classification number: G02B21/0032 ,  G01N21/6458 ,  G01N2021/6471 ,  G01N2201/0675 ,  G02B21/0076 ,  G02B21/16

Abstract: To avoid unstable light radiation during switching of a phase modulation amount and stimulate desired stimulation points simultaneously, provided is a photo-stimulator which includes an AOM switching on/off of radiation of stimulation light to a specimen S; an LCOS-SLM being capable of modulating a phase of stimulation light once radiation to the specimen S has been turned on by the AOM; and a controller controlling the LCOS-SLM to switch a phase modulation amount of stimulation light and controlling the AOM to switch on/off of radiation of stimulation light, wherein the controller causes the AOM to turn off radiation of stimulation light before the LCOS-SLM starts switching a phase modulation amount, and causes the AOM to turn on radiation of stimulation light after the LCOS-SLM completes switching a phase modulation amount.

Abstract translation: 为了在切换相位调制量期间避免不稳定的光辐射并且同时刺激所需的刺激点，提供了一种光刺激器，其包括AOM将刺激光的辐射切换到样本S; 能够通过AOM打开辐射至样本S的能够调制刺激光的相位的LCOS-SLM; 以及控制器，控制LCOS-SLM以切换刺激光的相位调制量并控制AOM以打开/关闭刺激光的辐射，其中控制器使AOM在LCOS-SLM之前关闭刺激光的辐射 开始切换相位调制量，并且在LCOS-SLM完成切换相位调制量之后使得AOM打开刺激光的辐射。

公开(公告)号：US09019503B2

公开(公告)日：2015-04-28

申请号：US14021822

申请日：2013-09-09

Applicant: Bing Ouyang ,  Fraser Dalgleish ,  Anni Dalgleish

Inventor： Bing Ouyang ,  Fraser Dalgleish ,  Anni Dalgleish

IPC: G01N21/00 ,  G01N21/55 ,  G01N21/47 ,  G01N21/17

CPC classification number: G01N21/55 ,  G01N21/47 ,  G01N21/49 ,  G01N2021/1793 ,  G01N2201/0675

Abstract: A sensing system is provided that includes a transmitter assembly with a light source and a microdisplay device, wherein the transmitter assembly defines an optical beam transmission path to provide illumination of a substantially one-dimensional (1D) region of a target area, the microdisplay device comprising a plurality of controllable elements for causing the illumination to be a substantially 1D pattern of light along the 1D region. The system further includes a receiver assembly for defining a return optical signal transmission path from the 1D region and collecting return optical signals from the 1D region. The system also includes a processing component for generating sensor information associated with the 1D region by processing the return optical signals from the 1D region with return optical signals from adjacent 1D regions using a distributed compressive sensing (DCS) technique.

Abstract translation: 提供了一种感测系统，其包括具有光源和微型显示装置的发射器组件，其中发射器组件限定光束传输路径以提供目标区域的基本上一维（1D）区域的照明，微显示器件 包括多个可控元件，用于使得照明是沿1D区域的大致1D图案的光。 该系统还包括用于从1D区域定义返回光信号传输路径并收集来自1D区域的返回光信号的接收器组件。 该系统还包括用于通过使用分布式压缩感测（DCS）技术处理来自1D区域的返回光信号和来自相邻1D区域的返回光信号来产生与1D区域相关联的传感器信息的处理部件。

公开(公告)号：US08976433B2

公开(公告)日：2015-03-10

申请号：US13328255

申请日：2011-12-16

Applicant: Takahiro Masumura

Inventor： Takahiro Masumura

IPC: G03H1/12 ,  G03H1/04 ,  G01N21/00 ,  G01N21/47 ,  G01N21/64 ,  G02B21/00 ,  G02B26/06 ,  G03H1/00

CPC classification number: G03H1/0443 ,  G01N21/00 ,  G01N21/4795 ,  G01N21/6456 ,  G01N2201/0675 ,  G02B21/0032 ,  G02B21/0052 ,  G02B21/0056 ,  G02B26/06 ,  G03H2001/0072 ,  G03H2001/0083 ,  G03H2001/0447 ,  G03H2001/0458 ,  G03H2001/0467

Abstract: An apparatus includes a low-coherent light source configured to emit an electromagnetic wave; a spatial light modulator configured to modulate a wavefront of the electromagnetic wave; an interferometer including a movable mirror to set a depth of a medium to be irradiated by the electromagnetic wave and a beam splitter configured to the electromagnetic wave into a reference beam and an object beam; a detector to detect information about an interference pattern formed by the object beam coming from the medium via the beam splitter and the reference beam reflected by the movable mirror; and a controller configured to control the spatial light modulator, based on the information, to form a modulated wavefront for irradiating the medium.

Abstract translation: 一种装置，包括配置成发射电磁波的低相干光源; 配置为调制所述电磁波的波前的空间光调制器; 干涉仪，包括可移动反射镜，用于设置要被电磁波照射的介质的深度;以及分配器，其配置成电磁波到参考光束和物体光束中; 检测器，用于检测由通过分束器的来自介质的物体束形成的干涉图案和由可移动镜反射的参考光束的信息; 以及控制器，其被配置为基于所述信息来控制所述空间光调制器，以形成用于照射所述介质的调制波阵面。

公开(公告)号：US20140204385A1

公开(公告)日：2014-07-24

申请号：US14021822

申请日：2013-09-09

Applicant: Bing OUYANG ,  Fraser DALGLEISH ,  Anni DALGLEISH

Inventor： Bing OUYANG ,  Fraser DALGLEISH ,  Anni DALGLEISH

IPC: G01N21/55

CPC classification number: G01N21/55 ,  G01N21/47 ,  G01N21/49 ,  G01N2021/1793 ,  G01N2201/0675

Abstract: A sensing system is provided that includes a transmitter assembly with a light source and a microdisplay device, wherein the transmitter assembly defines an optical beam transmission path to provide illumination of a substantially one-dimensional (1D) region of a target area, the microdisplay device comprising a plurality of controllable elements for causing the illumination to be a substantially 1D pattern of light along the 1D region. The system further includes a receiver assembly for defining a return optical signal transmission path from the 1D region and collecting return optical signals from the 1D region. The system also includes a processing component for generating sensor information associated with the 1D region by processing the return optical signals from the 1D region with return optical signals from adjacent 1D regions using a distributed compressive sensing (DCS) technique.

Abstract translation: 提供了一种感测系统，其包括具有光源和微型显示装置的发射器组件，其中发射器组件限定光束传输路径以提供目标区域的基本上一维（1D）区域的照明，微显示器件 包括多个可控元件，用于使得照明是沿1D区域的大致1D图案的光。 该系统还包括用于从1D区域定义返回光信号传输路径并收集来自1D区域的返回光信号的接收器组件。 该系统还包括用于通过使用分布式压缩感测（DCS）技术处理来自1D区域的返回光信号和来自相邻1D区域的返回光信号来产生与1D区域相关联的传感器信息的处理部件。

公开(公告)号：US08451450B2

公开(公告)日：2013-05-28

申请号：US12880543

申请日：2010-09-13

Applicant: Xin Heng

Inventor： Xin Heng

IPC: G01B9/021

CPC classification number: A61B18/203 ,  A61B2018/00452 ,  A61B2018/00642 ,  A61B2018/00779 ,  G01N21/4795 ,  G01N2201/0675 ,  G02B26/06 ,  G03H1/0443 ,  G03H1/2294 ,  G03H2001/0072

Abstract: An optical system and associated method enable near real time optical phase conjugation. In the method, a translucent medium is illuminated by a sample illumination beam. Light scattered by the medium is directed to an electronic image sensor while a reference beam is also directed to the electronic image sensor. The scattered light and the reference beam form an interference pattern at the electronic image sensor. A digital representation of the interference pattern is recorded using the electronic image sensor, and the characteristics of a conjugate of the sample beam are computed from the numerical representation. A conjugate beam having the computed characteristics is generated using a configurable optical element and directed back to the translucent medium. The generation of the conjugate beam may be accomplished using a spatial light modulator.

Abstract translation: 光学系统和相关联的方法实现近实时光学相位共轭。 在该方法中，半透明介质由样本照明光束照射。 由介质散射的光被引导到电子图像传感器，而参考光束也被引导到电子图像传感器。 散射光和参考光束在电子图像传感器处形成干涉图案。 使用电子图像传感器记录干涉图案的数字表示，并且从数字表示计算样本波束的共轭的特征。 使用可配置光学元件产生具有计算特性的共轭光束并且被引导回到半透明介质。 可以使用空间光调制器来实现共轭光的产生。

公开(公告)号：US20120307257A1

公开(公告)日：2012-12-06

申请号：US13577883

申请日：2011-01-27

Applicant: Minoru Yoshii ,  Eiichi Fujii

Inventor： Minoru Yoshii ,  Eiichi Fujii

IPC: G02F1/11 ,  G02B26/00 ,  G02B26/02 ,  G01B9/02 ,  H01S3/13

CPC classification number: H01S3/1055 ,  A61B5/0066 ,  G01J3/10 ,  G01N21/4795 ,  G01N2201/0675 ,  H01S3/08009 ,  H01S3/08013 ,  H01S3/0805 ,  H01S3/0812 ,  H01S3/105 ,  H01S3/1068 ,  H01S5/141 ,  H01S5/146

Abstract: The present invention provides a light source apparatus capable of producing stable oscillation and performing high-speed wavelength sweeping over a desired wavelength range.A swept light source apparatus in which oscillation wavelength is continuously changeable is provided. The apparatus includes, inside a resonator, an optical amplification medium that amplifies light, a first device configured to disperse light emitted from the optical amplification medium and thus produce beams having different wavelengths, a second device functioning as a non-focusing optical element and configured to collimate the beams having different wavelengths resulting from the dispersion by the first device, and a selecting device configured to select a beam having a specific wavelength from among the beams collimated by the second device. The beam having the specific wavelength selected by the selecting device is fed back to the optical amplification medium.

Abstract translation: 本发明提供能够产生稳定振荡并且在期望的波长范围内执行高速波长扫描的光源装置。 提供振荡波长连续变化的扫掠光源装置。 该装置在谐振器内包括放大光的光放大介质，配置成分散从光放大介质发射的光并因此产生具有不同波长的光束的第一器件，用作非聚焦光学元件的第二器件， 准直由第一装置的色散产生的具有不同波长的光束;以及选择装置，被配置为从由第二装置准直的光束中选择具有特定波长的光束。 具有由选择装置选择的特定波长的光束被反馈到光放大介质。

公开(公告)号：US20110222068A1

公开(公告)日：2011-09-15

申请号：US12880543

申请日：2010-09-13

Applicant: Xin Heng

Inventor： Xin Heng

IPC: G01B9/021

CPC classification number: A61B18/203 ,  A61B2018/00452 ,  A61B2018/00642 ,  A61B2018/00779 ,  G01N21/4795 ,  G01N2201/0675 ,  G02B26/06 ,  G03H1/0443 ,  G03H1/2294 ,  G03H2001/0072

Abstract: An optical system and associated method enable near real time optical phase conjugation. In the method, a translucent medium is illuminated by a sample illumination beam. Light scattered by the medium is directed to an electronic image sensor while a reference beam is also directed to the electronic image sensor. The scattered light and the reference beam form an interference pattern at the electronic image sensor. A digital representation of the interference pattern is recorded using the electronic image sensor, and the characteristics of a conjugate of the sample beam are computed from the numerical representation. A conjugate beam having the computed characteristics is generated using a configurable optical element and directed back to the translucent medium. The generation of the conjugate beam may be accomplished using a spatial light modulator.

Abstract translation: 光学系统和相关联的方法实现近实时光学相位共轭。 在该方法中，半透明介质由样本照明光束照射。 由介质散射的光被引导到电子图像传感器，而参考光束也被引导到电子图像传感器。 散射光和参考光束在电子图像传感器处形成干涉图案。 使用电子图像传感器记录干涉图案的数字表示，并且从数字表示计算样本波束的共轭的特征。 使用可配置光学元件产生具有计算特性的共轭光束并且被引导回到半透明介质。 可以使用空间光调制器来实现共轭光的产生。

公开(公告)号：US07973921B2

公开(公告)日：2011-07-05

申请号：US12145708

申请日：2008-06-25

Applicant: Shai Silberstein ,  Tsafrir Avni

Inventor： Shai Silberstein ,  Tsafrir Avni

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/9503 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8825 ,  G01N2201/067 ,  G01N2201/0675 ,  G01N2201/0697 ,  G01N2201/1241

Abstract: An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be increased or decreased as the tool inspects areas of memory and periphery features in a wafer die. In some embodiments, the adjustment can be based on data obtained during a pre-inspection setup sequence in which images taken based on illumination with varying characteristics are evaluated for suitability in the remainder of the inspection process.

Abstract translation: 光学检查系统或工具可以被配置为使用动态照明来检查物体，其中调整照明的一个或多个特征以满足不同区域的检查需要。 例如，当工具检查晶片管芯中的存储器区域和外围特征时，可以增加或减小照明强度。 在一些实施例中，调整可以基于在预检查设置顺序期间获得的数据，其中基于具有变化特性的照明拍摄的图像被评估为在检查过程的其余部分中的适用性。

公开(公告)号：US20110122404A1

公开(公告)日：2011-05-26

申请号：US13003725

申请日：2009-07-21

Applicant: David Fisch ,  Yigal Katzir

Inventor： David Fisch ,  Yigal Katzir

IPC: G01N21/00

CPC classification number: G01N21/8806 ,  G01N2021/8825 ,  G01N2021/9513 ,  G01N2021/95638 ,  G01N2201/062 ,  G01N2201/0675

Abstract: A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction.

Abstract translation: 描述了一种使用区域传感器（或线传感器）的机器视觉系统的新架构，其具有远心成像光学复合物与远心照明模块。 照明模块可以包括明场照明源和/或暗场照明源。 远心成像光学器件包括具有孔径光阑的上成像模块和位于上成像模块和物体之间的下成像模块，使得光源和孔径光阑位于下成像模块的后焦平面中。 下部成像模块将照明源成像到上部成像模块的孔径光阑的平面内。 上成像模块的光轴相对于下成像模块偏移。 远心照明模块的光轴相对于下成像模块的轴线在相反方向上偏移。