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    141.
    发明专利
    未知

    公开(公告)号：DE602004004898T9

    公开(公告)日：2007-10-18

    申请号：DE602004004898

    申请日：2004-06-14

    Applicant: MEMSCAP INC

    Inventor： GLUKH KONSTANTIN ,  WOOD ROBERT L ,  AGRAWAL VIVEK

    IPC: H01H1/00 ,  H01H36/00 ,  H01H50/00

    Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

    142.
    发明专利
    未知

    公开(公告)号：DE602004004898T2

    公开(公告)日：2007-06-28

    申请号：DE602004004898

    申请日：2004-06-14

    Applicant: MEMSCAP INC

    Inventor： GLUKH KONSTANTIN ,  WOOD ROBERT L ,  AGRAWAL VIVEK

    IPC: H01H1/00 ,  H01H36/00 ,  H01H50/00

    Abstract: A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.

    144.
    发明专利
    未知

    公开(公告)号：FR2837624B1

    公开(公告)日：2005-03-25

    申请号：FR0203445

    申请日：2002-03-20

    Applicant: MEMSCAP

    Inventor： GIRARDIE LIONEL

    IPC: C23C16/40 ,  C23C16/44 ,  C23C16/455 ,  H01L21/28 ,  H01L21/316 ,  H01L29/51 ,  H01L29/92 ,  H01G4/002

    Abstract: A multilayer structure with strong relative permittivity is made up of a number of distinct layers each with a thickness of less than 500 Angstrom and made from a base of hafnium dioxide, zirconium dioxide and alumina. The hafnium dioxide, zirconium dioxide and alumina are formed from alloys with the formula HfxZrtAly)z and their stoichiometry varies from layer to layer. The structure is made up of at least five layers and at least one of the outer layers is made up of alumina. The layers are deposited by atomic layer deposition.

    145.
    发明专利
    未知

    公开(公告)号：FR2842830B1

    公开(公告)日：2004-08-27

    申请号：FR0209459

    申请日：2002-07-25

    Applicant: MEMSCAP

    Inventor： GIRARDIE LIONEL

    IPC: H01L21/02 ,  H01L21/28 ,  H01L21/316 ,  H01L29/51 ,  C23C16/40 ,  B32B18/00

    Abstract: High permittivity multilayer structure comprises a number of superposed layers, each of thickness less than 500 Å. The layer structure includes two layers based on a mixed oxide derived from titanium oxide (TiO 2) and tantalum pentoxide (Ta 2O 5) separated by a layer based on a mixed oxide derived from at least hafnium dioxide (HfO 2) and alumina (Al 2O 3). Preferred Features: The mixed oxide derived from at least hafnium dioxide (HfO2) and alumina (Al2O3) can also include zirconium dioxide (ZrO 2) in its composition. At least one layer situated between the layers of mixed oxide derived from titanium oxide and tantalum pentoxide and the outer part of the structure comprises a mixed oxide derived from at least two materials selected from hafnium dioxide (HfO 2), alumina (Al 2O 3), zirconium oxide (ZrO 2), titanium dioxide (TiO 2), and tantalum pentoxide (Ta 2O 5). The thickness of each layer is 1-200 Å, preferably 1-100 Å, and most preferably 1-50 Å. At least one of the external layers is alumina (Al 2O 3). Each layer is deposited by atomic layer deposition (ALD).

    148.
    发明专利
    未知

    公开(公告)号：DE60101110D1

    公开(公告)日：2003-12-11

    申请号：DE60101110

    申请日：2001-03-19

    Applicant: MEMSCAP CROLLES

    Inventor： WOOD ROBERT L

    IPC: B81B7/02 ,  H01H1/00 ,  H01H61/02 ,  H01H37/76

    Abstract: Lockable microelectromechanical actuators include a microelectromechanical actuator, a thermoplastic material that is coupled to the microelectromechanical actuator to lock the microelectromechanical actuator, and a heater that melts the thermoplastic material to allow movement of the microelectromechanical actuator. When the thermoplastic material solidifies, movement of the microelectromechanical actuator can be locked, without the need to maintain power, in the form of electrical, magnetic and/or electrostatic energy, to the microelectromechanical actuator, and without the need to rely on mechanical friction to hold the microelectromechanical actuator in place. Thus, the thermoplastic material can act as a glue to hold structures in a particular position without the need for continuous power application. Moreover, it has been found unexpectedly, that the thermoplastic material can solidify rapidly enough to lock the microelectromechanical actuator at or near its most recent position.

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