公开(公告)号：EP2281299B1

公开(公告)日：2014-12-10

申请号：EP09721942.2

申请日：2009-03-03

Applicant: Micron Technology, Inc.

Inventor： MILLWARD, Dan, B. ,  QUICK, Timothy

IPC: H01L21/033 ,  B81C1/00 ,  B82Y30/00

CPC classification number: H01L21/76828 ,  B81C1/00031 ,  B81C2201/013 ,  B81C2201/0149 ,  B81C2201/0198 ,  B82Y30/00 ,  C08F299/02 ,  C08F299/0492 ,  G03F7/0002 ,  H01L21/0337 ,  H01L21/0338 ,  H01L21/31133 ,  H01L21/76802 ,  H01L21/76877

公开(公告)号：EP2627605A2

公开(公告)日：2013-08-21

申请号：EP11769797.9

申请日：2011-10-12

Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. ,  Fachhochschule Jena

Inventor： MORHARD, Christoph ,  PACHOLSKI, Claudia ,  SPATZ, Joachim P. ,  BRUNNER, Robert

IPC: B81C1/00

CPC classification number: B29C59/002 ,  B81C99/009 ,  B81C2201/0149 ,  B82Y30/00 ,  G03F7/0002

Abstract: The present invention relates to an improved process for producing highly ordered nanopillar or nanohole structures, in particular on large areas, which can be used as masters in NIL, hot embossing or injection molding processes. In a preferred embodiment, said process comprises at least the following steps: a) providing a primary substrate that is decorated on at least one surface with an ordered array of metal nanoparticles produced by means of a micellar block-copolymer nanolithography process; b) etching the primary substrate of step a) in a predetermined depth, preferably in the range from 50 to 500 nm, wherein the nanoparticles act as a mask and an ordered array of nanopillars or nanocones corresponding to the positions of the nanoparticles is produced; c) using the nanostructured substrate obtained in step b) as a master or stamp in nanoimprint lithographic (NIL), hot embossing or injection molding processes. In another preferred embodiment, said process comprises the steps a) and b) above and additionally c) coating the nanostructured substrate surface obtained in step b) with a continuous metal layer; d) selective etching of the product of step c) using an etching agent, e.g. HF, which removes the primary substrate but not the metal layer, resulting in a metal substrate comprising an ordered array of nanoholes which is a negative of the original array of nanopillars or nanocones.

Abstract translation: 本发明涉及到改进的方法用于在大面积上，其可被用作NIL主人，热压印或注塑方法生产高度有序的纳米柱或纳米孔结构，特别是。 该方法涉及在由胶束的嵌段共聚物的纳米光刻工艺来制造的金属纳米颗粒的有序阵列装饰用表面; 蚀刻所述主基板至50至500纳米，其中所述纳米颗粒充当掩模和在纳米柱或纳米锥对应于纳米颗粒如此产生的位置的有序阵列的深度; 使用该纳米结构化主站或在邮票的结构化过程。 所以成品纳米结构化基底表面可以被用作牺牲主所有的涂有连续的金属层，然后将主被刻蚀掉，留下具有纳米孔的所有有序阵列，其是负纳米柱或的原始阵列的金属邮票 纳米锥。

公开(公告)号：EP2276690A2

公开(公告)日：2011-01-26

申请号：EP09739437.3

申请日：2009-04-20

Applicant: Micron Technology, Inc.

Inventor： MILLWARD, Dan, B. ,  WESTMORELAND, Donald

IPC: B81C1/00

CPC classification number: H01L29/0657 ,  B81C1/00031 ,  B81C2201/0149 ,  B81C2201/0198 ,  B82Y30/00 ,  G03F7/0002 ,  H01L21/02118 ,  H01L21/0223 ,  H01L29/06 ,  Y10S438/947 ,  Y10S977/888 ,  Y10S977/895 ,  Y10S977/90 ,  Y10T428/24182 ,  Y10T428/24521 ,  Y10T428/2462 ,  Y10T428/249921

Abstract: Methods for fabricating sublithographic, nanoscale microslructures in line arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.

公开(公告)号：EP2268404A1

公开(公告)日：2011-01-05

申请号：EP09733747.1

申请日：2009-04-23

Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Inventor： FOUILLET, Yves

IPC: B01L3/00 ,  B81C1/00

CPC classification number: B82Y30/00 ,  B01L3/502707 ,  B01L3/50273 ,  B01L2200/12 ,  B01L2300/0887 ,  B01L2400/0415 ,  B81B2201/051 ,  B81C1/00071 ,  B81C2201/0149

Abstract: The invention relates to a microfluidic device, comprising a microfluidic array, comprising: a) two parallel plates (2, 4) each equipped with one or more electrodes (3, 13), b) at least one channel (9), positioned between the two plates, made from a material obtained by solidification or hardening of the material of a first fluid (6), c) means for varying a physical parameter of the constituent material of the walls of the channel in order to change it at least from the liquid state to the solid state.

Abstract translation: 一种包括微流体网络的微流体装置，包括：a）两个平行板，每个平行板包括一个或多个电极，b）布置在两个板之间的至少一个通道，由通过固化或硬化材料获得的材料制成 第一流体，以及c）改变通道材料构成壁的物理参数以使材料至少从液态通过至固态的机构。

公开(公告)号：EP2254827A2

公开(公告)日：2010-12-01

申请号：EP09721280.7

申请日：2009-03-03

Applicant: Micron Technology, Inc.

Inventor： REGNER, Jennifer, Kahl

IPC: B81C1/00

CPC classification number: B81C1/00031 ,  B05D1/34 ,  B05D3/0254 ,  B05D5/00 ,  B05D5/12 ,  B81C2201/0149 ,  B82Y30/00 ,  C08L53/00 ,  C08L53/005 ,  G03F7/0002 ,  H01L21/0337 ,  H01L21/0338 ,  H01L21/3086 ,  H01L21/3088 ,  H01L21/31144 ,  Y10T428/24182 ,  C08L2666/02

Abstract: Methods for fabricating arrays of nanoscaled alternating lamellae or cylinders in a polymer matrix having improved long range order utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.

公开(公告)号：EP2110360A3

公开(公告)日：2010-08-11

申请号：EP09157933.4

申请日：2009-04-15

Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Inventor： Landis, Stéfan

IPC: B81C1/00

CPC classification number: B81C1/00111 ,  B81C2201/0149 ,  B81C2201/0153 ,  B82Y30/00

Abstract: L'invention a trait à un procédé de préparation d'un film polymérique présentant en surface des motifs nanométriques et étant microstructuré dans son épaisseur sur tout ou partie de celui-ci selon un système particulier comprenant les étapes suivantes :
- une étape de choix d'au moins un copolymère bloc apte à se microstructurer selon le système particulier susmentionné à une température et selon au moins une épaisseur prédéterminée, ladite épaisseur prédéterminée correspondant à l'épaisseur du film pour tout ou partie duquel on souhaite la microstructuration selon le système particulier susmentionné ;
- une étape de choix d'au moins un moule apte à conférer, après application sur un film comprenant ledit copolymère bloc, l'épaisseur prédéterminée et lesdits motifs nanométriques; et
- une étape d'application dudit moule sur un film comprenant ledit copolymère bloc tout en chauffant à ladite température prédéterminée, moyennant quoi l'on obtient ledit film défini en objet.

公开(公告)号：EP2003091A2

公开(公告)日：2008-12-17

申请号：EP07741001.7

申请日：2007-04-04

Applicant: Japan Science and Technology Agency

Inventor： WATANABE, Shigeru ,  LI, Jingze

IPC: B82B3/00 ,  B82B1/00 ,  B32B3/14

CPC classification number: B82Y30/00 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y20/00 ,  B82Y40/00

Abstract: The objective is to present a metal nanostructure having metal masses with zero valence aligned on a substrate surface wherein the size and shape of the metal masses are controlled and a manufacturing process thereof.
A micro phase separation membrane comprising an amphiphilic block copolymer assumes a state that contains numerous micro diameter hydrophilic cylinders inside the membrane in the direction perpendicular to the membrane surface. The membrane is prepared using a solution containing an amphiphilic block copolymer and desired metal ions or by bringing a micro phase separation membrane of an amphiphilic block copolymer in contact with a solution containing metal ions after the membrane is formed to localize the metal ions in the hydrophilic micro diameter cylinders. A substrate containing numerous zero valence metal masses in approximately pillar shapes, approximately dot shapes or combinations of these at set intervals can be obtained by conducting a reduction treatment and a treatment to remove organic materials on the micro phase separation membrane. As the treatment, ultraviolet light irradiation or electron beam irradiation, plasma treatments, chemical reduction processes or electrochemical reduction processes may be used.

Abstract translation: 的目标是提出一种具有金属纳米结构金属块与零价上worin群众被控制的金属的大小和形状以及它们的制造工艺的表面的衬底对准。 的微相分离膜，包括两亲性嵌段共聚物的übernimmt的状态确实包含垂直于膜表面的方向上的亲水性膜的内部的许多微直径的圆柱体。 该膜用含有两亲性嵌段共聚物和所期望的金属离子的或通过使两亲性嵌段共聚物的微相分离膜与含有金属离子的溶液接触的溶液中的膜形成来定位所述金属离子在所述亲水性后制备 微直径的圆柱体。 在大约支柱形状包含大量零价金属块A底，大约点形状或论文以设定的间隔的组合可以通过进行还原处理和处理以除去在微相分离膜的有机材料来获得。 通过该处理，紫外线照射或电子束照射，等离子处理，化学还原法或电化学还原法可被使用。

公开(公告)号：EP1827717A2

公开(公告)日：2007-09-05

申请号：EP05857837.8

申请日：2005-11-22

Applicant: WISCONSIN ALUMNI RESEARCH FOUNDATION

Inventor： NEALEY, Paul F. ,  KIM, SangOuk ,  EDWARDS, Erik, W. ,  STOYKOVICH, Mark, P. ,  DE PABLO, Juan, J.

IPC: B05D1/38 ,  B32B9/04 ,  B05D3/06

CPC classification number: G03F7/40 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y30/00 ,  G03F7/265

Abstract: Replicating substrate patterns containing irregular features by method (800) comprising: providing a patterned substrate with irregular feature(s) (801); depositing block copolymer materials on the patterned substrate (802); and ordering the block copolymer material in accordance with the underlying pattern (803). In some embodiments, ordering is facilitated through use of blends of the copolymer material and/or configuring substrate patterns so that regions of the substrate pattern interact in a highly preferential manner with at least one of the components in the copolymer material. Method (800) yields a substrate pattern with irregular features replicated in a block copolymer material.

公开(公告)号：EP3214102A4

公开(公告)日：2018-07-25

申请号：EP15845665

申请日：2015-09-30

Applicant: LG CHEMICAL LTD

Inventor： KIM JUNG KEUN ,  LEE JE GWON ,  LEE JEONG KYU ,  KU SE JIN ,  PARK NO JIN ,  LEE MI SOOK ,  CHOI EUN YOUNG ,  YOON SUNG SOO ,  RYU HYUNG JU

IPC: C08F293/00 ,  C08J5/18 ,  G03F7/00

CPC classification number: C08L53/005 ,  B05D1/005 ,  B05D3/007 ,  B81C1/00428 ,  B81C2201/0149 ,  B82Y40/00 ,  C01P2002/70 ,  C07B2200/00 ,  C08F2/14 ,  C08F32/06 ,  C08F212/08 ,  C08F216/12 ,  C08F220/10 ,  C08F220/26 ,  C08F220/30 ,  C08F293/00 ,  C08F293/005 ,  C08F299/024 ,  C08F2220/301 ,  C08F2438/03 ,  C08G61/08 ,  C08G61/128 ,  C08G2261/1424 ,  C08G2261/1426 ,  C08G2261/332 ,  C08G2261/3324 ,  C08G2261/40 ,  C08G2261/418 ,  C08J5/18 ,  C08J7/123 ,  C08J2353/00 ,  C08L53/00 ,  C08L53/02 ,  C09D153/00 ,  G03F7/0002 ,  G03F7/0046 ,  G03F7/039 ,  G03F7/091 ,  G03F7/16 ,  G03F7/162 ,  G03F7/2004 ,  G03F7/30 ,  C08F214/182

Abstract: The present application relates to a block copolymer and uses thereof. The present application can provide a block copolymer - which exhibits an excellent self-assembling property and thus can be used effectively in a variety of applications - and uses thereof.

公开(公告)号：EP2627605B1

公开(公告)日：2017-12-20

申请号：EP11769797.9

申请日：2011-10-12

Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. ,  Ernst-Abbe-Hochschule Jena

Inventor： MORHARD, Christoph ,  PACHOLSKI, Claudia ,  SPATZ, Joachim P. ,  BRUNNER, Robert

IPC: B81C99/00

CPC classification number: B29C59/002 ,  B81C99/009 ,  B81C2201/0149 ,  B82Y30/00 ,  G03F7/0002