公开(公告)号：US06832493B2

公开(公告)日：2004-12-21

申请号：US10086231

申请日：2002-02-27

Applicant: Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  Chunzhe C. Yu

Inventor： Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  Chunzhe C. Yu

IPC: C03B1902

CPC classification number: C03B19/06 ,  C03C3/06 ,  C03C2201/42 ,  C03C2203/34

Abstract: The present invention relates to a method for forming an optical device. The method includes providing a glass aggregate. Typically, the glass aggregate is a mixture of fine glass soot particles and coarser ground or milled glass powder. The glass particles are mixed with a liquid to form a slurry which is cast in a mold to form a porous pre-form. Subsequently, the porous pre-form is consolidated into a glass object by heating the pre-form at a relatively high temperature. The method of the present invention produces optical components having substantially no striae. As a result, scattering is substantially reduced when EUV light is reflected from a component produced from the optical blank.

Abstract translation: 本发明涉及一种形成光学元件的方法。 该方法包括提供玻璃聚集体。 通常，玻璃聚集体是细玻璃烟灰颗粒和较粗糙的研磨或研磨玻璃粉末的混合物。 将玻璃颗粒与液体混合以形成在模具中铸造以形成多孔预成型体的浆料。 随后，通过在相对高的温度下加热预成型件将多孔预成型件固结成玻璃制品。 本发明的方法产生基本上没有条纹的光学部件。 结果，当EUV光从由光学坯料产生的组分反射时，散射显着降低。

公开(公告)号：US20030226377A1

公开(公告)日：2003-12-11

申请号：US10378390

申请日：2003-03-03

Inventor： W. Tim Barrett ,  Bradley F. Bowden ,  Claude L. Davis ,  Kenneth E. Hrdina ,  Michael MR. Robinson ,  Michael H. Wasilewski ,  John F. Wight

IPC: C03B019/00

CPC classification number: C03B32/005 ,  C03B19/01 ,  C03B2201/42 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/42 ,  C03C2203/10

Abstract: Methods and apparatus for manufacturing titania-containing fused silica bodies are disclosed. The titania-containing fused silica bodies are subsequently processed to make extreme ultraviolet soft x-ray masks. The methods and apparatus involve providing powders external to a furnace cavity and depositing the powders in the furnace cavity to form a titania-containing fused silica body.

Abstract translation: 公开了制造含二氧化钛的熔融石英体的方法和装置。 随后处理含二氧化钛的熔融二氧化硅体以制造极紫外线软X射线掩模。 所述方法和装置包括在炉腔外部提供粉末并将粉末沉积在炉腔中以形成含二氧化钛的熔融二氧化硅体。

公开(公告)号：US06542690B1

公开(公告)日：2003-04-01

申请号：US09566542

申请日：2000-05-08

Applicant: Adam J. G. Ellison ,  Rostislav R. Khrapko

Inventor： Adam J. G. Ellison ,  Rostislav R. Khrapko

IPC: G02B600

CPC classification number: G02B6/02114 ,  C03B19/1415 ,  C03B19/1423 ,  C03B37/01807 ,  C03B37/0183 ,  C03B2201/20 ,  C03B2201/58 ,  C03B2203/18 ,  C03C3/06 ,  C03C3/076 ,  C03C13/045 ,  C03C13/046 ,  C03C2201/10 ,  C03C2201/28 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/3417 ,  C03C2201/42 ,  C03C2201/58 ,  C03C2203/40 ,  C03C2203/44 ,  G02B6/02 ,  G02B6/021 ,  G02B6/02138 ,  G02B6/0219

Abstract: The present invention relates to a glass article for use as an optical waveguide fiber and more particularly to an optical waveguide fiber, the core of which is doped with a chalcogenide element to significantly increase the refractive index of the core. The subject of this invention is novel doped silica core compositions wherein a portion of the oxygen in the silica is replaced with either sulfur, selenium or tellurium using plasma enhanced chemical vapor deposition (PECVD). These compositions are designed to have higher refractive indices than silica, low coefficients of expansion, high optical transparency, and appropriate viscosity and softening points to make them ideal candidates for use as optical waveguide fibers.

Abstract translation: 本发明涉及一种用作光波导光纤的玻璃制品，更具体地说，涉及一种光纤光纤，其光纤掺杂有硫属元素元素以显着提高芯的折射率。 本发明的主题是新型掺杂二氧化硅芯组合物，其中使用等离子体增强化学气相沉积（PECVD）将二氧化硅中的氧的一部分用硫，硒或碲代替。 这些组合物被设计为具有比二氧化硅更高的折射率，低膨胀系数，高光学透明度和适当的粘度和软化点，以使其成为用作光波导纤维的理想候选物。

公开(公告)号：US20020157421A1

公开(公告)日：2002-10-31

申请号：US09844947

申请日：2001-04-27

Inventor： Bradford G. Ackerman ,  Kenneth E. Hrdina ,  Lisa A. Moore ,  Nikki J. Russo ,  C. Charles Yu

IPC: C03B019/00

CPC classification number: C03C4/0085 ,  C03B19/1415 ,  C03B19/1453 ,  C03B19/1484 ,  C03B2201/12 ,  C03B2201/42 ,  C03B2207/32 ,  C03B2207/62 ,  C03B2207/70 ,  C03C3/06 ,  C03C3/076 ,  C03C2201/12 ,  C03C2201/42 ,  C03C2203/40 ,  Y02P40/57

Abstract: A method for producing a fused silica glass containing titania includes synthesizing particles of silica and titania by delivering a mixture of a silica precursor and a titania precursor to a burner, growing a porous preform by successively depositing the particles on a deposition surface while rotating and translating the deposition surface relative to the burner, and consolidating the porous preform into a dense glass.

Abstract translation: 一种制备含有二氧化钛的熔融石英玻璃的方法包括通过将二氧化硅前体和二氧化钛前体的混合物输送到燃烧器来合成二氧化硅和二氧化钛的颗粒，通过将颗粒依次沉积在沉积表面上同时旋转和平移来生长多孔预型体 沉积表面相对于燃烧器，并将多孔预成型件固结成致密的玻璃。

公开(公告)号：US5851253A

公开(公告)日：1998-12-22

申请号：US734008

申请日：1996-10-18

Applicant: Robert J. Pet ,  Josephus J. Timmermans

Inventor： Robert J. Pet ,  Josephus J. Timmermans

IPC: C03B20/00 ,  C03C3/06 ,  H01K1/28 ,  H01K1/32 ,  C03B5/00

CPC classification number: H01K1/32 ,  C03C3/06 ,  C03C2201/36 ,  C03C2201/42

Abstract: The electric incandescent lamp has a quartz glass lamp vessel (1) or envelope (4') around the lamp vessel, which has a red coloured dope in the area at the side of the incandescent body (3). The quartz glass with red dope contains samarium.sup.II oxide, aluminium oxide, titanium dioxide, and silicon dioxide, the analysis of the glass in its oxidized form being Sm.sub.2 O.sub.3 1 to 3% by weight, Al.sub.2 O.sub.3 up to 3% by weight, TiO.sub.2, rest SiO.sub.2, the molar ratio Al/Sm being at least about 2 and the molar ratio Sm/Ti being from 2 to 8.

Abstract translation: 电白炽灯具有在灯泡周围的石英玻璃灯容器（1）或外壳（4'），其在白炽体（3）一侧的区域中具有红色涂料。 具有红色涂料的石英玻璃含有钐II氧化物，氧化铝，二氧化钛和二氧化硅，其氧化形式的玻璃分析为1至3重量％的Sm 2 O 3，3重量％的Al 2 O 3，TiO 2，其余为SiO 2 ，摩尔比Al / Sm为至少约2，摩尔比Sm / Ti为2至8。

公开(公告)号：US5547482A

公开(公告)日：1996-08-20

申请号：US270423

申请日：1994-07-05

Applicant: Julie B. Chalk ,  Jonathan C. Rowe ,  Paul M. Schermerhorn ,  Robert D. Shoup

Inventor： Julie B. Chalk ,  Jonathan C. Rowe ,  Paul M. Schermerhorn ,  Robert D. Shoup

IPC: C03B8/00 ,  C03B8/02 ,  C03B19/00 ,  C03B19/06 ,  C03B19/12 ,  C03B20/00 ,  C03B32/00 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/08 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C2201/06 ,  C03C2201/42 ,  C03C2203/26 ,  C03C2203/27 ,  C03C2203/50 ,  Y02P40/57

Abstract: This invention is directed to the production of essentially defect-free high purity fused silica glass articles, the method comprising the following steps: (a) forming a green body from silica particulates or a porous body of amorphous silica; (b) sintering said body in a chamber by raising the temperature of the chamber to above 1720.degree. C., while purging the chamber with helium or applying a vacuum to the chamber; and (c) consolidating the sintered body in a chamber by raising the temperature within the chamber to at least 1750.degree. C., introducing an inert gas into the chamber at a pressure less than about 6.9 MPa (1000 psig), and cooling the chamber while maintaining the pressurized atmosphere to a temperature at least below the annealing point of the glass. In the most preferred practice, a green body of silica particulates will be prepared via a sol-gel process.

Abstract translation: 本发明涉及生产基本上无缺陷的高纯度熔融石英玻璃制品，该方法包括以下步骤：（a）由二氧化硅微粒或无定形二氧化硅的多孔体形成生坯; （b）通过将腔室的温度升高到1720℃以上，同时用氦气吹扫腔室或向室内施加真空来在室内烧结所述主体; 和（c）通过将室内的温度升高至至少1750℃将烧结体固化在室中，在小于约6.9MPa（1000psig）的压力下将惰性气体引入室中，并冷却室 同时将加压气氛保持在至少低于玻璃退火点的温度。 在最优选的实践中，将通过溶胶 - 凝胶法制备生物体的二氧化硅颗粒。

公开(公告)号：US5248637A

公开(公告)日：1993-09-28

申请号：US873206

申请日：1992-04-24

Applicant: Naoki Taneda ,  Kouichi Numata ,  Takashi Mukaiyama

Inventor： Naoki Taneda ,  Kouichi Numata ,  Takashi Mukaiyama

IPC: C03B37/01 ,  C03C1/00 ,  C03C3/06 ,  C03C13/00 ,  C03C13/02 ,  C30B35/00

CPC classification number: C03C13/00 ,  C03B37/011 ,  C03C1/006 ,  C03C3/06 ,  C30B35/00 ,  C03C2201/32 ,  C03C2201/42 ,  C03C2203/26

Abstract: Highly heat resistant glass fiber which comprises from 0.1 to 2.0 wt % of Al.sub.2 O.sub.3, from 0.1 to 2.0 wt % of TiO.sub.2, from 96 to 99.8 wt % of SiO.sub.2 and not more than 0.03 wt % of the sum of alkali metal oxides and alkaline earth metal oxides.

公开(公告)号：US5154744A

公开(公告)日：1992-10-13

申请号：US750616

申请日：1991-08-26

Applicant: Jeffery L. Blackwell ,  Carlton M. Truesdale

Inventor： Jeffery L. Blackwell ,  Carlton M. Truesdale

IPC: C03C13/04 ,  C03B37/014 ,  C03B37/018 ,  C03C1/00 ,  C03C3/06 ,  G02B6/00

CPC classification number: C03B37/01413 ,  C03C1/00 ,  C03C3/06 ,  C03B2201/42 ,  C03B2207/32 ,  C03B2207/81 ,  C03B2207/85 ,  C03B2207/87 ,  C03C2201/42 ,  C03C2203/40 ,  Y02P40/57 ,  Y10S65/901

Abstract: This invention relates to production of high purity fused silica glass doped with titania through oxidation or flame hydrolysis of a gaseous mixture and containing rutile crystals comprising a vaporizable, silicon-containing compound. Titanium-2-ethylhexyloxide, titanium cyclopentyloxide, and a titanium amide, or a combination thereof, constitute the operable titanium-containing compounds.

公开(公告)号：US4786618A

公开(公告)日：1988-11-22

申请号：US55632

申请日：1987-05-29

Applicant: Robert D. Shoup

Inventor： Robert D. Shoup

IPC: C03B8/02 ,  C03B19/12 ,  C03C3/06 ,  C03C3/076

CPC classification number: C03B19/12 ,  C03C3/06 ,  C03C3/076 ,  C03B2201/42 ,  C03C2201/42 ,  C03C2203/24

Abstract: Ultra-low thermal expansion TiO.sub.2 --SiO.sub.2 glasses are prepared using a sol-gel process wherein a stable alkali silicate solution comprising colloidal TiO.sub.2 and having a pH above 9 is gelled to form a semisolid silicate gel, the gel comprising homogeneously dispersed colloidal TiO.sub.2 but being essentially free of agglomerated TiO.sub.2 particles, washing the gel with aqueous media to remove alkali therefrom, and finally drying and consolidating the gel to a clear, void-free TiO.sub.2 --SiO.sub.2 glass which is substantially free of compositional inhomogeneities and has a thermal expansion coefficient below that of pure fused silica.

公开(公告)号：US3859073A

公开(公告)日：1975-01-07

申请号：US40791873

申请日：1973-10-19

Applicant: CORNING GLASS WORKS

Inventor： SCHULTZ PETER C

IPC: C03B8/04 ,  C03B37/014 ,  C03B37/018 ,  C03C3/06 ,  C03C13/04 ,  C03C23/00 ,  C04B41/86 ,  G02B6/00 ,  C03C25/02

CPC classification number: C03B37/01433 ,  C03B2201/10 ,  C03B2201/28 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/40 ,  C03B2201/42 ,  C03C3/06 ,  C03C23/0095 ,  C03C2201/34 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/44 ,  C03C2203/50

Abstract: A method of incorporating an additive or dopant oxide in a glass body produced by the flame hydrolysis technique. Particles of the primary glass former are produced by flame hydrolysis and deposited to form a porous body which is impregnated, in part at least, with a dopant which may be dissolved or suspended in a vehicle. The body is then thermally consolidated with the dopant dispersed therein.

Abstract translation: 通过火焰水解技术在玻璃体中掺入添加剂或掺杂剂氧化物的方法。 初级玻璃形成器的颗粒通过火焰水解产生并沉积以形成多孔体，该多孔体部分至少浸渍有可溶解或悬浮在载体中的掺杂剂。 然后将体与其中分散的掺杂剂热固化。