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    Nanoelectromechanical bistable cantilever device
    152.
    发明授权
    Nanoelectromechanical bistable cantilever device 有权
    纳米机电双稳悬臂装置

    公开(公告)号：US07612424B1

    公开(公告)日：2009-11-03

    申请号：US11385970

    申请日：2006-03-21

    Applicant: Horacio D. Espinosa ,  Changhong Ke

    Inventor： Horacio D. Espinosa ,  Changhong Ke

    IPC: H01L29/84 ,  H01L31/109

    CPC classification number: B81B3/0054 ,  B81B2201/038 ,  B81B2201/07 ,  B81B2201/12 ,  B81B2203/0118 ,  B82Y10/00 ,  B82Y15/00 ,  G11B9/1445 ,  G11C13/025 ,  G11C23/00 ,  H01H1/0094 ,  H01H59/0009

    Abstract: Nano-electromechanical device having an electrically conductive nano-cantilever wherein the nano-cantilever has a free end that is movable relative to an electrically conductive substrate such as an electrode of a circuit. The circuit includes a power source connected to the electrode and to the nano-cantilever for providing a pull-in or pull-out voltage therebetween to effect bending movement of the nano-cantilever relative to the electrode. Feedback control is provided for varying the voltage between the electrode and the nano-cantilever in response to the position of the cantilever relative to the electrode. The device provides two stable positions of the nano-cantilever and a hysteresis loop in the current-voltage space between the pull-in voltage and the pull-out voltage. A first stable position of the nano-cantilever is provided at sub-nanometer gap between the free end of the nano-cantilever and the electrode with a pull-in voltage applied and with a stable tunneling electrical current present in the circuit. A second stable position of the nano-cantilever is provided with a pull-out voltage between the cantilever and the electrode with little or no tunneling electrical current present in the circuit. The nano-electromechanical device can be used in a scanning probe microscope, ultrasonic wave detection sensor, NEMS switch, random access memory element, gap sensor, logic device, and a bio-sensor when the nano-cantilever is functionalized with biomolecules that interact with species present in the ambient environment be them in air or aqueous solutions. In the latest case, the NEMS needs to be integrated with a microfluidic system.

    Abstract translation: 具有导电纳米悬臂的纳米机电装置，其中纳米悬臂具有可相对于例如电路的电极的导电基底移动的自由端。 电路包括连接到电极和纳米悬臂的电源，用于在其间提供拉入或拉出电压，以实现纳米悬臂相对于电极的弯曲运动。 提供反馈控制以响应于悬臂相对于电极的位置来改变电极和纳米悬臂之间的电压。 该器件在引入电压和拉出电压之间的电流 - 电压空间中提供了纳米悬臂的两个稳定位置和滞后回路。 在纳米悬臂的自由端和电极之间的亚纳米间隙处提供纳米悬臂的第一稳定位置，其中施加了拉入电压并且在电路中存在稳定的隧道电流。 纳米悬臂的第二稳定位置在悬臂和电极之间提供拉出电压，电路中存在很少或没有隧道电流。 纳米机电装置可用于扫描探针显微镜，超声波检测传感器，NEMS开关，随机存取存储元件，间隙传感器，逻辑器件和生物传感器，当纳米悬臂用与生物分子相互作用的功能化 在环境环境中存在的物质是它们在空气或水溶液中。 在最新的情况下，NEMS需要与微流体系统集成。

    6-axis electromagnetically-actuated meso-scale nanopositioner
    154.
    发明授权
    6-axis electromagnetically-actuated meso-scale nanopositioner 有权
    6轴电磁致动中尺度纳米定位器

    公开(公告)号：US07557470B2

    公开(公告)日：2009-07-07

    申请号：US11709596

    申请日：2007-02-22

    Applicant: Martin L. Culpepper ,  Dariusz Golda

    Inventor： Martin L. Culpepper ,  Dariusz Golda

    IPC: H02K41/00 ,  H02K33/00

    CPC classification number: B81B3/0062 ,  B81B2201/038 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/058 ,  Y10T74/20348

    Abstract: A MEMS actuator includes a coil stack in the form of microfabricated, electrically conductive first and second superposed layers. A magnet array is superposed in magnetic communication with the coil stack, with first and second coils being selectively, electrically actuatable to generate relative movement between the coil stack and the magnet array both in-plane and out-of-plane. In various embodiments, a plurality of the actuators are integrally coupled to a microfabricated compliant mechanism to provide a high bandwidth, six degree of freedom nanopositioner.

    Abstract translation: MEMS致动器包括呈微加工，导电的第一和第二叠置层的形式的线圈堆叠。 磁体阵列叠加成与线圈堆叠磁连通，其中第一和第二线圈被选择性地电致动以在线圈堆叠和磁体阵列之间在平面内和平面外产生相对运动。 在各种实施例中，多个致动器整体地耦合到微制造的柔性机构以提供高带宽六自由度的纳米定位器。

    Method of fabricating micro actuator having media stage
    155.
    发明授权
    Method of fabricating micro actuator having media stage 失效
    具有介质载物台的微型致动器的制造方法

    公开(公告)号：US07520998B2

    公开(公告)日：2009-04-21

    申请号：US11595876

    申请日：2006-11-13

    Applicant: Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    Inventor： Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    IPC: C23F1/00

    CPC classification number: H02K41/0354 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1436 ,  H02K2201/18

    Abstract: A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

    Abstract translation: 提供了一种制造微型致动器的方法，包括：介质台，其具有介质装载表面和用于驱动介质载物台的线圈，其形成在介质载台的相对表面上至介质装载表面。 该方法包括在第一基板的第一表面上形成凹槽，在第二基板的第一表面上形成线圈，将第一基板的第一表面接合到第二基板的第一表面，并且形成介质装载表面 在第二基板的与第二基板的第一表面相对的第二表面上。

    Micro actuator
    156.
    发明申请
    Micro actuator 审中-公开
    微型执行器

    公开(公告)号：US20090051243A1

    公开(公告)日：2009-02-26

    申请号：US11902218

    申请日：2007-09-20

    Applicant: Alex Horng ,  I-Yu Huang ,  Don-Liang Liu

    Inventor： Alex Horng ,  I-Yu Huang ,  Don-Liang Liu

    IPC: H02N1/00

    CPC classification number: H01H59/0009 ,  B81B3/0075 ,  B81B2201/038 ,  H01H1/06

    Abstract: The present invention relates to a micro actuator, which is located on a substrate and includes a plate and a bushing. A rear end of the plate exhibits a tapered triangular shape or an arc-like shape or has at least a bump disposed on a bottom surface of the rear end of the plate, making that a non-planar contact is present between the rear end of the plate and the substrate when both are contacted, so as to effectively reduce the friction and driving voltage and prolong the lifespan of components.

    Abstract translation: 微型致动器技术领域本发明涉及一种微型致动器，其位于基板上并且包括板和衬套。 板的后端呈锥形的三角形状或弧状，或至少具有设置在板的后端的底面上的凸起，使得在平板的后端之间存在非平面接触 当两者接触时，板和基板，以有效降低摩擦和驱动电压并延长部件的寿命。

    ACTUATOR
    157.
    发明申请
    ACTUATOR 有权
    执行机构

    公开(公告)号：US20090001845A1

    公开(公告)日：2009-01-01

    申请号：US11851784

    申请日：2007-09-07

    Applicant: Tamio IKEHASHI

    Inventor： Tamio IKEHASHI

    IPC: H02N11/00 ,  H01L35/00

    CPC classification number: B81B3/0021 ,  B81B2201/038 ,  H01H59/0009 ,  H02N1/008

    Abstract: An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.

    Abstract translation: 本发明的致动器包括移动部件和驱动电极，驱动电极由彼此电隔离的电极部分组成并驱动移动部件。 驱动电压被选择性地施加到一些电极部分，以控制作用在移动部件上的静电力。

    Process for manufacturing an apparatus that protects features during the removal of sacrificial materials
    158.
    发明授权
    Process for manufacturing an apparatus that protects features during the removal of sacrificial materials 失效
    用于制造在去除牺牲材料期间保护特征的装置的方法

    公开(公告)号：US07452741B2

    公开(公告)日：2008-11-18

    申请号：US11425100

    申请日：2006-06-19

    Applicant: Vladimir A. Aksyuk ,  Nagesh R. Basavanhally ,  Omar D. Lopez ,  Chien-Shing Pai

    Inventor： Vladimir A. Aksyuk ,  Nagesh R. Basavanhally ,  Omar D. Lopez ,  Chien-Shing Pai

    IPC: H01L21/00

    CPC classification number: B81C1/00476 ,  B81B2201/038 ,  B81C1/00801

    Abstract: The present invention provides a process for manufacturing an apparatus. The process, in one embodiment, includes providing a micro-electro-mechanical system (MEMS) device, the micro-electro-mechanical system (MEMS) device including an actuator coupled to a movable feature, sacrificial material fixing the actuator and movable feature with respect to one another, and a layer of material located over the actuator, movable feature and sacrificial material. The process may further include removing only a portion of the layer of material to expose the sacrificial material, and subjecting the exposed sacrificial material to an etchant to release the movable feature.

    Abstract translation: 本发明提供一种制造装置的方法。 在一个实施例中，该过程包括提供微机电系统（MEMS）装置，微机电系统（MEMS）装置包括耦合到可移动特征的致动器，将致动器和可移动特征固定的牺牲材料 相对于彼此，以及位于致动器上方的材料层，可移动特征和牺牲材料。 该方法还可以包括仅去除材料层的一部分以暴露牺牲材料，以及将暴露的牺牲材料经历蚀刻剂以释放可移动特征。

    PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL INTERACTION SYSTEM FOR A STORAGE MEDIUM
    159.
    发明申请
    PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL INTERACTION SYSTEM FOR A STORAGE MEDIUM 审中-公开
    用于制造存储介质的微电子交互系统的方法

    公开(公告)号：US20080164576A1

    公开(公告)日：2008-07-10

    申请号：US11958945

    申请日：2007-12-18

    Applicant: Giuseppe Barillaro ,  Alessandro Diligenti ,  Caterina Riva ,  Roberto Campedelli ,  Stefano Losa

    Inventor： Giuseppe Barillaro ,  Alessandro Diligenti ,  Caterina Riva ,  Roberto Campedelli ,  Stefano Losa

    IPC: H01L21/04 ,  H01L29/06

    CPC classification number: B81C1/00539 ,  B81B2201/038 ,  B81B2201/07 ,  B81B2201/12 ,  B81B2203/0118 ,  B81B2203/019 ,  B81C1/00595 ,  B81C2201/0136 ,  B81C2203/0714 ,  H01L27/10

    Abstract: A process for manufacturing an interaction system of a microelectromechanical type for a storage medium, the interaction system provided with a supporting element and an interaction element carried by the supporting element, envisages the steps of: providing a wafer of semiconductor material having a substrate with a first type of conductivity (P) and a top surface; forming a first interaction region having a second type of conductivity (N), opposite to the first type of conductivity (P), in a surface portion of the substrate in the proximity of the top surface; and carrying out an electrochemical etch of the substrate starting from the top surface, the etching being selective with respect to the second type of conductivity (N), so as to remove the surface portion of the substrate and separate the first interaction region from the substrate, thus forming the supporting element.

    Abstract translation: 一种用于制造用于存储介质的微机电类型的相互作用系统的方法，具有支撑元件的相互作用系统和由支撑元件承载的相互作用元件，其设想是提供具有基板的半导体材料晶片，其具有 第一类电导率（P）和顶面; 在所述顶表面附近的所述衬底的表面部分中形成具有与所述第一类型的导电性（P）相反的第二导电类型（N）的第一相互作用区域; 并且从顶表面开始进行基板的电化学蚀刻，所述蚀刻相对于所述第二导电类型（N）是选择性的，以便移除所述基板的表面部分并将所述第一相互作用区域与所述基板分离 ，从而形成支撑元件。

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