公开(公告)号：FR2160856A1

公开(公告)日：1973-07-06

申请号：FR7240415

申请日：1972-11-08

Applicant: IBM

IPC: H01J29/70 ,  H01J29/76 ,  H01J37/14 ,  H01J37/147 ,  H01J37/153 ,  H01J3/00

公开(公告)号：FR2158320A1

公开(公告)日：1973-06-15

申请号：FR7238247

申请日：1972-10-27

Applicant: STEIGERWALD STRAHLTECH

IPC: B23K15/02 ,  H01J37/24 ,  H01J37/302 ,  H01J37/304 ,  H01J3/00 ,  B23K15/00 ,  H01J37/00

公开(公告)号：NL7115371A

公开(公告)日：1973-05-11

申请号：NL7115371

申请日：1971-11-09

IPC: F16H1/32 ,  F16H23/04 ,  F16J15/52 ,  H01J29/00 ,  H01J37/02 ,  G01N23/00 ,  H01J3/00 ,  H01J37/20

公开(公告)号：FR2140079A1

公开(公告)日：1973-01-12

申请号：FR7219274

申请日：1972-05-30

Applicant: VARIAN ASSOCIATES

IPC: H01J61/98 ,  H01J3/00

公开(公告)号：ES379671A1

公开(公告)日：1972-08-16

申请号：ES379671

申请日：1970-05-14

Applicant: RCA CORP

IPC: H01J29/48 ,  H01J3/00

公开(公告)号：FR2113173A5

公开(公告)日：1972-06-23

申请号：FR7138182

申请日：1971-10-25

Applicant: RCA CORP

IPC: H01J29/87 ,  H01J3/00

公开(公告)号：FR2099295A5

公开(公告)日：1972-03-10

申请号：FR7122754

申请日：1971-06-14

Applicant: AMERICAN OPTICAL CORP

IPC: G01Q70/06 ,  H01J37/073 ,  H01J37/09 ,  H01J37/18 ,  H01J37/248 ,  H01J37/29 ,  H01J3/00 ,  H01J37/00

Abstract: A Field Emission Scanning Electron Microscope having a field emission tip for generating charged particles and being axially aligned with an electrode and with an intermediate electrode interposed there between. The electrode and the intermediate electrode forming a field lens for focusing the charged particles from the field emission tip. Appropriate voltages are applied for providing extraction, acceleration and focus fields. The electrode potential being lower than the intermediate electrode potential with respect to the charged particles and selected to provide a real focus of the charged particles at a position outside the lens field and distal of the field emission tip thereby producing an intense beam of low energy particles.

公开(公告)号：FR2076690A5

公开(公告)日：1971-10-15

申请号：FR7002468

申请日：1970-01-23

Applicant: THOMSON CSF

IPC: G21K1/093 ,  H01J3/00 ,  H01J29/00 ,  H05H7/00

Abstract: Two pairs of electromagnets each with an air gap are constructed with the intermediate faces of the pairs parallel to each other and perpendicular to the direction of the particle beam. Each electromagnet has a pole piece in a quadrant shape. The deviation produced by the magnets is independent of the energy of the particles in the beam allowing achromatic control of beam direction.

公开(公告)号：FR2076567A5

公开(公告)日：1971-10-15

申请号：FR7001862

申请日：1970-01-20

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

IPC: H01J29/80 ,  H01J37/12 ,  H01J37/317 ,  H01J3/00

Abstract: The system comprises an array of parallel filiform electrodes and each micro-lens is made up of at least four adjacent electrodes which define a tunnel having a cross-section in the shape of a square. Each vertex of the square is intercepted by a quarter-circle of the cross-section of the adjacent one of said electrodes and the cross-section of said array in a plane at right angles to said electrodes forms a substantially square lattice. Means are also provided for electrically polarizing said electrodes.

公开(公告)号：FR2075739A5

公开(公告)日：1971-10-08

申请号：FR7101733

申请日：1971-01-20

Applicant: CAMBRIDGE SCIENT

IPC: H01J37/147 ,  H01J37/153 ,  H01J37/28 ,  H01J3/00 ,  H01J37/00

Abstract: In electron probe apparatus modified or designed to display electron-channelling (pseudo-Kikuchi) effects by subjecting a point on a specimen surface to an electron beam scanned through a varying angle, the final lens of the beam forming system is employed as a deflection element in that an image of the source is formed in the plane of deflection means and that this plane and the specimen surface are made conjugate points with respect to the final lens. To facilitate corrections for spherical aberration in the scanning, the scanning is preferably performed on polar co-ordinates, with the beam sweeping out a conical path of slowly varying cone angle, and the result is displayed as a spirally scanned image.