公开(公告)号：DE60234802D1

公开(公告)日：2010-02-04

申请号：DE60234802

申请日：2002-07-29

Applicant: APPLIED MATERIALS ISRAEL LTD

Inventor： PEARL ASHER

IPC: H01J37/04 ,  H01J37/21 ,  A61N5/00 ,  G01N21/00 ,  G21G5/00 ,  H01J3/26 ,  H01J37/08 ,  H01J37/153 ,  H01J37/22 ,  H01J37/26 ,  H01J37/304

公开(公告)号：CA2507734A1

公开(公告)日：2004-06-17

申请号：CA2507734

申请日：2003-11-20

Applicant: UNIV OREGON HEALTH & SCIENCE

Inventor： BERGLUND C NEIL

IPC: G01N23/00 ,  G01Q40/00 ,  H01J3/14 ,  H01J3/26 ,  H01J37/00 ,  H01J37/04 ,  H01J37/08 ,  H01J37/147 ,  H01J37/317

Abstract: A beam blanker array includes a base plate, a plurality of conductor pads, a nd a ground plate. The conductor pads are arranged in a one-dimensional array o n the base plate. The ground plate is coupled to the base plate over the plurality of conductor pads with a gap between the base plate and the ground plate. Each of the plurality of conductor pads forms a beam blanker across t he gap with the ground plate.

公开(公告)号：CS158590A2

公开(公告)日：1991-10-15

申请号：CS158590

申请日：1990-03-30

Applicant: SMEJKAL EMANUEL ING

Inventor： SMEJKAL EMANUEL ING

IPC: H01J3/26 ,  H04N3/16

公开(公告)号：CS8602729A1

公开(公告)日：1989-07-12

申请号：CS272986

申请日：1986-04-14

Applicant: DELONG ARMIN ,  KOLARIK VLADIMIR RNDR

Inventor： DELONG ARMIN AKADEMIK ,  KOLARIK VLADIMIR RNDR

IPC: H01J3/26

公开(公告)号：GB2196175A

公开(公告)日：1988-04-20

申请号：GB8623842

申请日：1986-10-03

Applicant: TRIALSITE LTD

Inventor： GARTH SIMON CHRISTOPHER JOHN

IPC: H01L21/66 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q90/00 ,  G01R31/302 ,  G21K5/04 ,  H01J37/04 ,  H01J37/06 ,  H01J37/26 ,  H01J37/28 ,  H01J3/00 ,  H01J3/08 ,  H01J3/26 ,  H01J37/147

Abstract: Apparatus for producing a pulsed electron beam, particularly adapted for inspecting integrated circuits, includes a beam scanner (10) for causing a continuous electron beam to scan a circle, which beam may emerge from the second of three electrostatic lenses of an electron beam microscope. The beam then passes a deflecting means (12) on the circle for deflecting the beam in a radial direction at selected locations, before being collected by means (14) for collecting the electron pulses from alternate locations to provide a pulsed electron beam.

公开(公告)号：CS239262B1

公开(公告)日：1986-01-16

申请号：CS368283

申请日：1983-05-25

Applicant: VASINA PETR ,  FRANK LUDEK

Inventor： VASINA PETR ,  FRANK LUDEK

IPC: H01J20060101 ,  H01J3/26

公开(公告)号：CS8303682A1

公开(公告)日：1984-05-14

申请号：CS368283

申请日：1983-05-25

Applicant: VASINA PETR RNDR ,  FRANK LUDEK RNDR

Inventor： VASINA PETR RNDR ,  FRANK LUDEK RNDR

IPC: H01J20060101 ,  H01J3/26 ,  H01J

公开(公告)号：DE3066694D1

公开(公告)日：1984-03-29

申请号：DE3066694

申请日：1980-07-25

Applicant: FUJITSU LTD

Inventor： YAMASHITA YOSHIMI ,  YAMAMOTO SUMIO

IPC: H01L21/027 ,  G03F7/207 ,  H01J37/304 ,  H01L21/30 ,  H01L23/544 ,  H01L21/263 ,  H01J3/26

公开(公告)号：CA1152232A

公开(公告)日：1983-08-16

申请号：CA348936

申请日：1980-04-01

Applicant: CGR MEV

Inventor： TRONC DOMINIQUE

IPC: H01J3/02 ,  A61N5/10 ,  G21K1/093 ,  G21K5/04 ,  H01J3/26 ,  H01J49/20 ,  H05H7/00 ,  G21K1/08

Abstract: A DEVICE FOR THE ACHROMATIC MAGNETIC DEFLECTION OF A BEAM OF CHARGED PARTICLES AND AN IRRADIATION APPARATUS USING SUCH A DEVICE An achromatic magnetic deflection device for deflecting by an angle ? between .pi. and 2.pi. a beam of charged accelerated particles having different momentum. This device comprises an electromagnet provided with pole pieces delimiting three contiguous sectors, the whole of these sectors, having an axis of symmetry XX, presenting flat input E and output S faces and common faces F1 and F2 in an arc of a circle, the position, the radius of curvature of these faces F1, F2 as well as the value of the magnetic induction in the sectors being chosen so that the different paths are substantially orthogonal both to faces F1, F2 and to axis XX.

公开(公告)号：HU181245B

公开(公告)日：1983-06-28

申请号：HU309680

申请日：1980-12-23

Applicant: MTA KOEPONTI FIZ KUTATO INTEZE

Inventor： KIRALYHIDI LASZLO ,  PASZTOR ENDRE ,  RIEDL PETER

IPC: H01J3/26