MECHANICAL STRUCTURE INCLUDING A LAYER OF POLYMERISED LIQUID CRYSTAL AND METHOD OF MANUFACTURING SUCH
    172.
    发明申请
    MECHANICAL STRUCTURE INCLUDING A LAYER OF POLYMERISED LIQUID CRYSTAL AND METHOD OF MANUFACTURING SUCH 审中-公开
    包括聚合物液晶层的机械结构及其制造方法

    公开(公告)号:WO2005076247A1

    公开(公告)日:2005-08-18

    申请号:PCT/IB2005/050356

    申请日:2005-01-27

    Abstract: A mechanical structure comprises an element which is moveable by non­mechanical means, such as heat or radiation, between a first state having a first shape and a second state having a second shape different. To this end, the element includes a layer of oriented polymerized liquid crystal which exhibits an anisotropic expansion when subjected to such means. In order to facilitate manufacture the element is positioned on a substrate which has a region of high adhesiveness and a region of low adhesiveness for polymerized liquid crystal. To manufacture such structures a layer of oriented polymerizable liquid crystal is formed on a substrate (201) which is provided with a patterned surface that provides adhesive regions (204) with high adhesiveness to polymerized liquid crystal and non­adhesive regions (203) with low adhesiveness to polymerized liquid crystal. After polymerization, for example a thermal shock is applied which causes the layer of polymerized liquid crystal to delaminate at the non-adhering region while remaining fixed to the adhesive regions. Thus, the method does not require time-consuming under-etching steps.

    Abstract translation: 机械结构包括可在诸如热或辐射之间的非机械装置在具有第一形状的第一状态和具有第二形状的第二状态之间移动的元件。 为此,元件包括定向聚合的液晶层,当经受这种方法时,其呈现各向异性膨胀。 为了便于制造,元件位于具有高粘合性区域的基底和聚合液晶的低粘合性区域。 为了制造这样的结构,在基板(201)上形成定向聚合性液晶层,该基板(201)设置有图案化表面,该图案表面向聚合液晶和非粘附区域(203)提供对粘合性高的粘合性区域(204),其粘合性低 聚合液晶。 聚合后,例如进行热冲击,使得聚合液晶层在非粘附区域分层,同时保持固定在粘合剂区域上。 因此,该方法不需要耗时的蚀刻下步骤。

    ミラーデバイス、光スイッチ、薄膜弾性構造体及び薄膜弾性構造体の製造方法
    173.
    发明申请
    ミラーデバイス、光スイッチ、薄膜弾性構造体及び薄膜弾性構造体の製造方法 审中-公开
    镜子装置,光学开关,薄膜弹性结构和薄膜弹性结构生产方法

    公开(公告)号:WO2002086586A1

    公开(公告)日:2002-10-31

    申请号:PCT/JP2002/003858

    申请日:2002-04-18

    Abstract: A mirror device comprises a mirror (2), and a support mechanism for elastically supporting the mirror (2) with respect to a base board (1) in a floating state above the base board (1) and tiltably in an optional direction. The support mechanism comprises three support sections (3A, 3B, 3C) that mechanically connect the base board (1) and the mirror (2). Each of the support sections (3A, 3B, 3C) has one or more plate springs (5) composed of one or more layers of thin film. The plate springs (5) are connected at one of their respective ends to the base board (1) through legs (9) having a portion rising from the base board (1), and mechanically connected at the other ends to the mirror (2) through connectors having a portion rising from the other ends. The mirror (2) is supported with respect to the base board (1) only through the plate springs (5) of the support sections (3A, 3B, 3C). Thereby, size reduction and mass productivity can be further improved while retaining superior optical characteristics.

    Abstract translation: 反射镜装置包括反射镜(2)和用于相对于基板(1)在基板(1)上方以浮动状态弹性支撑反射镜(2)并且在任意方向上可倾斜地支撑的支撑机构。 支撑机构包括机械地连接基板(1)和反射镜(2)的三个支撑部分(3A,3B,3C)。 每个支撑部分(3A,3B,3C)具有一个或多个由一层或多层薄膜构成的板簧(5)。 板弹簧(5)通过具有从基板(1)上升的部分的腿(9)连接到基板(1)的一端,并且在另一端机械连接到反射镜(2) )通过具有从另一端上升的部分的连接器。 反射镜(2)仅通过支撑部分(3A,3B,3C)的板簧(5)相对于基板(1)支撑。 因此,可以进一步提高尺寸减小和批量生产率,同时保持优异的光学特性。

    THERMAL ISOLATION USING VERTICAL STRUCTURES
    174.
    发明申请
    THERMAL ISOLATION USING VERTICAL STRUCTURES 审中-公开
    使用垂直结构的热隔离

    公开(公告)号:WO01009579A1

    公开(公告)日:2001-02-08

    申请号:PCT/US2000/020699

    申请日:2000-07-28

    Abstract: This invention relates to the construction of microfabricated devices and, in particular, to types of microfabricated devices requiring thermal isolation from the substrates upon which they are built. This invention discloses vertical thermal isolators and methods of fabricating the vertical thermal isolators. Vertical thermal isolators offer an advantage over thermal isolators of the prior art, which were substantially horizontal in nature, in that less wafer real estate is required for the use of the vertical thermal isolators, thereby allowing a greater density per unit area of the microfabricated devices.

    Abstract translation: 本发明涉及微制造装置的构造,特别涉及需要从其构建基板的热隔离的微加工装置的类型。 本发明公开了垂直热隔离器和垂直隔热器的制造方法。 垂直隔热器具有优于现有技术的隔热装置的优点,其本质上基本上是水平的,因为使用垂直热隔离器需要较少的晶片实际尺寸,从而允许微加工装置的每单位面积的密度更大 。

    OPTICAL SCANNING DEVICE AND MANUFACTURING METHOD OF OPTICAL SCANNING DEVICE
    175.
    发明公开
    OPTICAL SCANNING DEVICE AND MANUFACTURING METHOD OF OPTICAL SCANNING DEVICE 审中-公开
    光学扫描装置和光学扫描装置的制造方法

    公开(公告)号:EP3301498A1

    公开(公告)日:2018-04-04

    申请号:EP17190941.9

    申请日:2017-09-13

    Abstract: An optical scanning device is provided. The optical scanning device includes a mirror having an optical reflection surface, a movable frame supporting the mirror, a pair of drive beams supporting the movable frame from both sides, a drive source, disposed on the drive beams, that causes the movable frame to be swung around a predetermined axis, a fixed frame supporting the drive beams. Each of the drive source includes a lower electrode formed on the drive beams, a piezoelectric thin film formed on the lower electrode, an upper electrode formed on the piezoelectric thin film, and a stress counter film, formed on the upper electrode or formed between the piezoelectric thin film and the upper electrode, that generates a compressive stress on the drive beams.

    Abstract translation: 提供了一种光学扫描装置。 该光学扫描装置包括:具有光学反射表面的镜子;支撑镜子的可移动框架;从两侧支撑可移动框架的一对驱动梁;驱动源,设置在驱动梁上,使得可移动框架成为 围绕预定轴线摆动,支撑驱动梁的固定框架。 每个驱动源包括形成在驱动梁上的下电极,形成在下电极上的压电薄膜,形成在压电薄膜上的上电极和形成在上电极上或形成在 压电薄膜和上电极,其在驱动梁上产生压缩应力。

    LOCAL HAPTIC ACTUATION SYSTEM
    176.
    发明公开
    LOCAL HAPTIC ACTUATION SYSTEM 审中-公开
    当地的激励制度

    公开(公告)号:EP3291060A1

    公开(公告)日:2018-03-07

    申请号:EP17187929.9

    申请日:2017-08-25

    Abstract: A haptic actuator device includes a surface with a mechanical property responsive to localized temperature changes. The surface can include a layer or sheet comprising a shape-memory material. The haptic actuator device can further include an actuator configured to selectively deform a plurality of regions in the sheet; and a temperature controller adapted to control the temperatures of the plurality of regions. A method of localized actuation includes selectively controlling the temperatures of the plurality of regions to be above a shape-memory transition temperature of the shape-memory material; selectively deforming at least one of the regions; while maintaining the deformation of the at least one region, lowering the temperature of the at least one region to below the shape-memory transition temperature; subsequently withdrawing the applied stress; and thereafter heating the at least one region to above the shape-memory transition temperature, causing the region to return to its pre-deformation shape.

    Abstract translation: 触觉致动器装置包括具有响应于局部温度变化的机械特性的表面。 表面可以包括包含形状记忆材料的层或片。 触觉致动器装置可进一步包括致动器,致动器构造成选择性地使片材中的多个区域变形; 以及适于控制多个区域的温度的温度控制器。 局部致动的方法包括选择性地将多个区域的温度控制在形状记忆材料的形状记忆转变温度以上; 选择性地使至少一个区域变形; 同时保持所述至少一个区域的变形,将所述至少一个区域的温度降低到低于形状记忆转变温度; 随后撤回施加的应力; 然后将该至少一个区域加热到高于形状记忆转变温度,使该区域恢复到其预变形形状。

    MEMS DEVICE AND METHOD OF FABRICATION
    177.
    发明授权
    MEMS DEVICE AND METHOD OF FABRICATION 有权
    MEMS组件和方法

    公开(公告)号:EP2504273B1

    公开(公告)日:2016-01-27

    申请号:EP10785498.6

    申请日:2010-11-22

    Abstract: A MEMS device (e.g. a piezoelectric actuator), and method of fabrication thereof, having a moveable portion comprising a layer of material (6) (e.g. a substrate layer formed from a substrate wafer) having relatively low rigidity in a direction in the plane of a surface of the layer of material (6), and relatively high rigidity in a direction through the plane; wherein the relatively low rigidity is provided by ridges and grooves (60) in a further surface of the layer of material (6), the further surface of the material (6) being substantially perpendicular to the direction in the plane. The MEMS device may comprise a layer of piezoelectric material (2) bonded to the surface of the layer of material (6). Actuation of the MEMS device (e.g. actuation in the plane of the surface of the layer of material (6)) may be performed by applying an electrical field across the piezoelectric material.

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